The invention relates to a device 10 for holding workpieces 30 in a process chamber. The invention additionally relates to a coating system 20 and to a method for coating a workpiece 30. In order to allow for precise adjustment of the height of the position of workpieces 30 while supporting same in a secure and stable manner, the holding device 10 comprises a tray 72 for the workpieces 30, a height-adjustable first support element 22 and a height-adjustable second support element 48 for the tray 72, wherein each of the support elements 22, 48 comprises at least one first and one second limb element 26, 56, wherein the respective first and the respective second limb element 26, 56 are coupled so as to be pivotable relative to one another about a pivot axis X, Y, and wherein the pivot axis X of the first support element 22 is arranged at an angle to the pivot axis Y of the second support element 48.

A wafer inspection system is provided. The wafer inspection system comprises: a transfer region in which a transfer device is arranged; an inspection region in which test heads for inspecting a substrate are arranged; and a maintenance region in which the test heads are maintained. The inspection region is located between the transfer region and the maintenance region, a plurality of inspection rooms accommodating the test heads are adjacent to each other in the inspection region, and the test heads are configured to be unloaded from the inspection region to the maintenance region.

A semiconductor fabrication facility including raceways on a ceiling of a structural construction and extending in one direction, a vehicle rail assembly coupled to the raceways, outer jig rails on outer sidewalls of the raceways and adjacent to the vehicle rail assembly, and an outer jig on the outer jig rails and configured to allow the vehicle rail assembly to move along the outer jig rails may be provided.

A fixing device that fixes a lower end portion of a suspension belt to a holding portion is provided with a shaft-like portion with an axial direction aligned with a horizontal direction; a fixing portion where the lower end portion of the suspension belt is fixed is provided on an outer circumferential surface of the shaft-like portion; a region of the outer circumferential surface on one side of a virtual vertical surface that runs through an axial center of the shaft-like portion is defined as a first region and a region of the outer circumferential surface on the other side of the virtual vertical surface is defined as a second region; the fixing portion is provided in the first region; and the suspension belt extending from the fixing portion is disposed running through a lowest portion of the outer circumferential surface and running along the second region and upward.

An embodiment of the present disclosure aims to provide a logistics system capable of preventing congestion of transport vehicles in a specific section of a fabrication facility. According to the present disclosure, a logistics system in a fabrication facility includes a stocker equipment that is located near a central passage and stores an article, and a rail that provides a travel path of a transport vehicle that loads and unloads the article to the stocker equipment. The stocker equipment includes a load port disposed on a side opposite to the central passage and a rack that provides a space for storing the article. The rail includes a central rail formed along the central passage and a branch rail that is branched from the central passage and formed along the periphery of the load port.

Provided are an alignment jig, a side track buffer system including the same, and an alignment method using the same. The alignment jig includes a horizontal jig fixed to a bottom plate of a side track buffer to extend in a horizontal direction to a lower portion of the transfer rail, and a vertical jig fixed to the transfer rail to extend downward in a vertical direction so as to be adjacent to a top surface in the horizontal direction. A separation distance between an intersection point of the vertical jig and the horizontal jig and a central portion of the bottom plate is detected as a buffer separation distance, and a buffer frame is horizontally moved automatically or manually to allow the buffer separation distance to match a reference separation distance, so that the side track buffer is installed in an accurate position.

According to an embodiment of the present invention, there is provided an article transport vehicle capable of speeding up and reducing vibration in a manufacturing plant, a rail assembly, and an article transport system including the same. The article transport vehicle that conveys an article between manufacturing facilities along a rail of an article transport system in a manufacturing plant includes an article holder, a vehicle body, a magnetic levitation actuator, and a linear motor coil.

A system and an operating method for automated wafer carrier handling are provided. The system includes a storage rack including a standby position and a storage position separated from each other, a first and second moving mechanism, and a controller operatively coupled to the first and second moving mechanism to control operations of the first and second moving mechanism. The storage position is for buffering a wafer carrier awaiting transfer to a load port. The first moving mechanism is movably coupled to the storage rack and provides at least one degree of freedom of movement to transfer the wafer carrier from the storage position to the standby position. The second moving mechanism is disposed over the storage rack, operatively coupled the storage rack to the load port, and provides at least one degree of freedom of movement to transfer the wafer carrier from the standby position to the load port.

The present disclosure, in some embodiments, relates to an integrated chip processing tool. The integrated chip processing tool includes a first transfer module and a second transfer module. The first transfer module has a first robotic arm disposed within a housing. The first transfer module is configured to receive a single and unitary first die tray configured to hold a plurality of integrated chip (IC) die and to concurrently transfer all of the plurality of IC die held by the single and unitary first die tray to a single and unitary die boat. The second transfer module has an additional robotic arm disposed within the housing and configured to concurrently transfer all of the plurality of IC die from the single and unitary die boat to a single and unitary second die tray.

An overhead transport vehicle includes a conveyor to travel along a track, a holder to hold an object to be conveyed, and a lifting driver to lift and lower the holder. The holder includes a base, a holder including a body and a pair of grippers connected to the body in an openable/closable manner, the holder being attached to the base so as to be movable along an opening/closing direction of the pair of grippers, and a first elastic member to restrict, between the base and the body, movement of the holder along the opening/closing direction.