H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L2221/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
H01L2221/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
H01L2221/10
Applying interconnections to be used for carrying current between separate components within a device
H01L2221/10
Applying interconnections to be used for carrying current between separate components within a device
H01L2221/1005
Formation and after-treatment of dielectrics
H01L2221/1005
Formation and after-treatment of dielectrics
H01L2221/1052
Formation of thin functional dielectric layers
H01L2221/1052
Formation of thin functional dielectric layers
H01L2221/1057
in via holes or trenches
H01L2221/1057
in via holes or trenches
H01L2221/1063
Sacrificial or temporary thin dielectric films in openings in a dielectric
H01L2221/1063
Sacrificial or temporary thin dielectric films in openings in a dielectric