H01L2223/00
Details relating to semiconductor or other solid state devices covered by the group H01L23/00
H01L2223/00
Details relating to semiconductor or other solid state devices covered by the group H01L23/00
H01L2223/58
Structural electrical arrangements for semiconductor devices not otherwise provided for
H01L2223/58
Structural electrical arrangements for semiconductor devices not otherwise provided for
H01L2223/6622
Coaxial feed-throughs in active or passive substrates
H01L2223/6622
Coaxial feed-throughs in active or passive substrates