H01L23/28
Encapsulations, e.g. encapsulating layers, coatings,; e.g. for protection
H01L23/28
Encapsulations, e.g. encapsulating layers, coatings,; e.g. for protection
H01L23/29
characterised by the material; , e.g. carbon
H01L23/29
characterised by the material; , e.g. carbon