A semiconductor device and a method for manufacturing a semiconductor device are provided. The semiconductor device comprises a substrate, a conductive element disposed within a first region of the substrate, and a first transistor disposed within a second region adjacent to the first region of the substrate. The conductive element is electrically connected to an electrode of the first transistor, and the conductive element penetrates the substrate and is configured to receive a supply voltage.

The present disclosure relates to the technical field of integrated circuits, and provides a test structure of an integrated circuit, to solve the technical problem of difficulty in measuring electrical parameters of the integrated circuit. The test structure of an integrated circuit includes: a first P-type heavily doped region, a second P-type heavily doped region, and an N-type heavily doped region. There is a first distance between the first P-type heavily doped region and the second P-type heavily doped region, and there is a second distance between the second P-type heavily doped region and the N-type heavily doped region. Electrical parameters of the integrated circuit are obtained by adjusting at least one of the first distance and the second distance.

Embodiments of the present disclosure relate to the technical field of integrated circuits, and specifically to a test structure of an integrated circuit. The embodiments of the present disclosure are intended to solve the problem that the related art does not provide a test structure of an integrated circuit. In the test structure of an integrated circuit provided in the present disclosure, there is a first distance between a first N-type heavily doped region and a second N-type heavily doped region, and there is a second distance between the second N-type heavily doped region and a first P-type heavily doped region; electrical parameters of the integrated circuit corresponding to the test structure are tested by adjusting at least one of the first distance and the second distance.

A CMOS device with a plurality of PMOS transistors each having a PMOS drain and a plurality of NMOS transistors each having an NMOS drain includes a first interconnect and a second interconnect. The first interconnect is on an interconnect level extending in a length direction to connect the PMOS drains together, and the second interconnect is on the interconnect level extending in the length direction to connect the NMOS drains together. A set of interconnects on at least one additional interconnect level physically couple the first interconnect and the second interconnect to an output of the CMOS device. A third interconnect on the interconnect level extends perpendicular to the length direction and offset from the set of interconnects. The third interconnect is capable of flowing current from the PMOS drains or from the NMOS drains to the output of the CMOS device.

A method includes forming an anti-punch-through layer over a first region and a second region of a substrate, forming a semiconductor layer over the anti-punch-through layer, patterning the semiconductor layer and the anti-punch-through layer to form a first plurality of fins over the first region and a second plurality of fins over the second region, and forming a patterned resist layer over the first plurality of fins and the second plurality of fins. The method also includes recessing a portion of the substrate between the first plurality of fins and the second plurality of fins in an etching process through openings of the patterned resist layer.

Structures and processes for improving radiation hardness and eliminating latch-up in integrated circuits are provided. An example process includes forming a first doped buried layer, a first well, and a second well, and using a first mask, forming a second doped buried layer only in a first region above the first doped buried layer and between at least the first well and the second well, where the first mask is configured to control spacing between the wells and the doped buried layers. The process further includes using a second mask, forming a vertical conductor located only in a second region above the first region and between at least the first well and the second well, where the vertical conductor is doped to provide a low resistance link between the second doped buried layer and at least a top surface of the substrate.

A device includes a semiconductor substrate having a first region and a second region. The device further includes a first pair of fin structures within the first region. The device further includes a second pair of fin structures within the second region. A top surface of the semiconductor surface between fin structures within the first pair is higher than a top surface of the semiconductor surface between the first pair and the second pair.

In an integrated circuit supporting complementary metal oxide semiconductor (CMOS) integrated circuits, latch-up immunity is supported by surrounding a hot n-well with an n-well strap spaced from the hot n-well by a specified distance in accordance with design rules. The n-well strap is positioned between the hot n-well and other n-well or n-type diffusion structures.

An integrated device that includes a substrate, a first transistor, and a second transistor. The second transistor is configured to be coupled to the first transistor. The first transistor is configured to operate as a N-type channel metal oxide semiconductor transistor (NMOS) transistor. The first transistor includes a dielectric layer disposed over the substrate; a first source disposed over the dielectric layer; a first drain disposed over the dielectric layer; a first plurality of channels coupled to the first source and the first drain; and a first gate surrounding the plurality of channels. The second transistor is configured to operate as a P-type channel metal oxide semiconductor transistor (PMOS). The second transistor includes the dielectric layer; a second source disposed over the dielectric layer; a second drain disposed over the dielectric layer; a second plurality of channels coupled to the second source and the second drain; and a second gate.

Disclosed is an SOI active interposer for three-dimensional packaging and a fabrication method thereof. An SOI substrate is used as the substrate, and a CMOS inverter is formed on the top silicon of the SOI by using standard integrated circuit manufacturing processes, so that short channel effect and latch-up effect can be suppressed. A via hole structure is etched on the SOI substrate between the PMOS and NMOS transistors of the CMOS inverter, which on the one hand can be used as a conductive channel between the chips in a vertical direction, and on the other hand, can be used as an electrical isolation layer between the PMOS and NMOS transistors.