An object of the present disclosure is to provide a trench gate type power semiconductor device that does not easily break even when stress is applied. A SiC-MOSFET includes a SiC substrate, a drift layer of a first conductive type, formed on the SiC substrate, a base region of a second conductivity type formed in a surface layer of the drift layer, a source region of the first conductivity type selectively formed in a surface layer of the base region, a trench extending through the base region and the source region and reaching the drift layer, a gate electrode embedded in the trench and having a V-shaped groove on an upper surface thereof, and an oxide film formed on an upper surface including the groove of the gate electrode, in which a bottom of the V-shape groove is deeper than the base region.

A method for producing an ohmic contact on a crystallographic C-side of a silicon carbide substrate. The method includes: applying a layer stack to the crystallographic C-side of the silicon carbide substrate, the layer stack including at least one semiconducting layer containing germanium, and at least one metallic layer; and producing a point-by-point liquid phase of the layer stack, a surface of the layer stack being scanned using laser beams.

A transistor includes a wide bandgap semiconductor layer, a gate electrode, a gate pad, and a gate runner. The gate electrode extends to a region where the gate pad is located and a region where the gate runner is located. The gate pad is connected to the gate electrode. The gate runner is connected to the gate electrode. The gate electrode includes a first region connected to the gate pad, a second region connected to the gate runner, and a third region and a fourth region arranged between the first and second regions in different positions in a first direction. In a cross section perpendicular to the first direction, the gate electrode in the fourth region has a cross-sectional area smaller than that of the gate electrode in the third region.

A transistor device and a method for producing thereof are disclosed. The transistor device includes: a SiC semiconductor body that includes a first semiconductor layer; a plurality of trenches each extending from a first surface of the first semiconductor layer into the first semiconductor layer; and a plurality of transistor cells each coupled to a source node. The first semiconductor layer includes a plurality of mesa regions each formed between two neighboring ones of the trenches, in each of the mesa regions, at least one of the plurality of transistor cells is at least partially integrated, each of the transistor cells is connected to the source node via a respective source contact, and each of the source contacts is arranged in a respective one of the trenches and is spaced apart from a bottom of the respective trench.

A multi-trench super junction IGBT device includes a metallization collector, a P-type substrate, a first N-type epitaxial layer located above the P-type substrate and a second N-type epitaxial layer located above the first N-type epitaxial layer. The second N-type epitaxial layer includes at least a first dummy MOS cell unit and a MOS cell unit, wherein the first dummy MOS cell unit includes a trench formed by reactive ion etching, a thermally grown gate oxide layer provided inside the trench and deposited heavily doped polysilicon located in the gate oxide layer.

In an entire intermediate region between an active region and an edge termination region, a p.sup.+-type region is provided between a p-type base region and a parallel pn layer. The p.sup.+-type region is formed concurrently with and in contact with p.sup.+-type regions for mitigating electric field near bottoms of gate trenches. The p.sup.+-type region has portions that face, respectively, n-type regions and p-type regions of a parallel pn layer in a depth direction Z and at the portions, has protrusions that protrude toward the parallel pn layer. N-type current spreading regions extend in the entire intermediate region from the active region and are between the p.sup.+-type region and the parallel pn layer, positioned between protrusions of the p.sup.+-type region. The impurity concentration of the n-type current spreading regions in the gate region is higher than that of those in other regions. Thus, avalanche capability may be enhanced.

A transistor device and a method for forming a transistor device are disclosed. The transistor device includes: a SiC semiconductor body that includes a first semiconductor layer and a second semiconductor layer formed on top of the first semiconductor; a trench structure extending from a first surface of the semiconductor body through the second semiconductor layer into the first semiconductor layer; a drain region arranged in the first semiconductor layer; and a plurality of transistor cells each coupled between the drain region and a source node. The trench structure subdivides the second semiconductor layer into a plurality of mesa regions and includes at least one cavity. At least one of the plurality of transistor cells is at least partially integrated in each of the mesa regions.

According to an aspect of the present disclosure, a semiconductor device includes a substrate including an IGBT region, and a diode region, a surface electrode provided on a top surface of the substrate and a back surface electrode provided on a back surface on an opposite side to the top surface of the substrate, wherein the diode region includes a first portion formed to be thinner than the IGBT region by the top surface of the substrate being recessed, and a second portion provided on one side of the first portion and thicker than the first portion.

A method and apparatus include an n-doped layer having a first applied charge, and a p.sup.−-doped layer having a second applied charge. The p.sup.−-doped layer may be positioned below the n-doped layer. A p.sup.+-doped buffer layer may have a third applied charge and be positioned below the p.sup.−-doped layer. The respective charges at each layer may be determined based on a dopant level and a physical dimension of the layer. In one example, the n-doped layer, the p.sup.−-doped layer, and the p.sup.+-doped buffer layer comprise a lateral semiconductor manufactured from silicon carbide (SiC).

A transistor semiconductor die includes a first current terminal, a second current terminal, and a control terminal. A semiconductor structure is between the first current terminal, the second current terminal, and the control terminal and configured such that a resistance between the first current terminal and the second current terminal is based on a control signal provided at the control terminal. Short circuit protection circuitry is coupled between the control terminal and the second current terminal. In a normal mode of operation, the short circuit protection circuitry is configured to provide a voltage drop that is greater than a voltage of the control signal. In a short circuit protection mode of operation, the short circuit protection circuitry is configured to provide a voltage drop that is less than a voltage of the control signal.