H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
29/00 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; ; Multistep manufacturing processes therefor;
H01L29/40 Electrodes; ; Multistep manufacturing processes therefor
H01L29/43 characterised by the materials of which they are formed
H01L29/49 Metal-insulator-semiconductor electrodes,; e.g. gates of MOSFET
H01L29/495 the conductor material next to the insulator being a simple metal, e.g. W, Mo
H01L29/4958 with a multiple layer structure