The purpose of the invention is suppressing a kink phenomenon and improvoning the image quality of a display device. The display device has a TFT in a pixel. The TFT has a semiconductor layer, a first insulating layer under the semiconductor layer, a second insulating layer over the semiconductor layer, and a gate electrode facing the semiconductor layer with a gap. The gate electrode has a first gate electrode portion facing a lower surface of the semiconductor layer, a second gate electrode portion facing an upper surface of the semiconductor layer, and a third gate electrode portion facing a lateral surface of the semiconductor layer and connected to the first and second gate electrode portions. A laminated part where the first and second insulating layers are stacked is around the semiconductor layer, and a part of the laminated part is between the lateral surface and the third gate electrode portion.

Provided is a thin film transistor, including: a base that includes, on an upper surface, a first region and a second region; a gate electrode that is provided on the first region of the base; a gate insulating film that is provided on a surface of the gate electrode and the second region of the base; and a semiconductor layer that is provided on a surface of the gate insulating film, wherein the semiconductor layer includes a third region and a fourth region, in the third region, the semiconductor layer and the gate electrode face with a minimum interval, in the fourth region, a distance from the semiconductor layer to the gate electrode is larger than the minimum interval, and at a boundary position between the third region and the fourth region, the semiconductor layer forms a linear shape or a substantially linear shape.

The invention provides the guided design approach to optimize the device performance for a best area-efficient layout footprint in a single-leg MOS device that is based on any of the SOL SOS or SON technologies. The design methodology depends on new proprietaries device architectures that are also being claimed in this patent and that allow the implementations of the design equations in our methodology.

A semiconductor device according to the present disclosure includes an anti-punch-through (APT) region over a substrate, a plurality of channel members over the APT region, a gate structure wrapping around each of the plurality of channel members, a source/drain feature adjacent to the gate structure, and a diffusion retardation layer. The source/drain feature is spaced apart from the APT region by the diffusion retardation layer. The source/drain feature is spaced apart from each of the plurality of channel members by the diffusion retardation layer. The diffusion retardation layer is a semiconductor material.

A semiconductor structure is formed with an active layer having an active device including a body region. The active device is formed by top side processing in and on a top side of a semiconductor on insulator wafer. A damaged region is formed within a portion of the body region by bottom side processing at a bottom side of the semiconductor on insulator wafer, the damaged region having a structure sufficient to prevent a kink effect and self-latching in operation of the active device.

A semiconductor device according to the present disclosure includes an active region including a channel region and a source/drain region adjacent the channel region, a vertical stack of channel members over the channel region, a gate structure over and around the vertical stack of channel members, a bottom dielectric feature over the source/drain region, a source/drain feature over the bottom dielectric feature, and a germanium layer disposed between the bottom dielectric feature and the source/drain region.

A semiconductor device according to the present disclosure includes an anti-punch-through (APT) region over a substrate, a plurality of channel members over the APT region, a gate structure wrapping around each of the plurality of channel members, a source/drain feature adjacent to the gate structure, and a diffusion retardation layer. The source/drain feature is spaced apart from the APT region by the diffusion retardation layer. The source/drain feature is spaced apart from each of the plurality of channel members by the diffusion retardation layer. The diffusion retardation layer is a semiconductor material.

A semiconductor device according to the present disclosure includes an active region including a channel region and a source/drain region adjacent the channel region, a vertical stack of channel members over the channel region, a gate structure over and around the vertical stack of channel members, a bottom dielectric feature over the source/drain region, a source/drain feature over the bottom dielectric feature, and a germanium layer disposed between the bottom dielectric feature and the source/drain region.

A semiconductor device according to the present disclosure includes an active region including a channel region and a source/drain region adjacent the channel region, a vertical stack of channel members over the channel region, a gate structure over and around the vertical stack of channel members, a bottom dielectric feature over the source/drain region, a source/drain feature over the bottom dielectric feature, and a germanium layer disposed between the bottom dielectric feature and the source/drain region.

The present disclosure provides an integrated circuit that includes a circuit formed on a semiconductor substrate; and a de-cap device formed on the semiconductor substrate and integrated with the circuit. The de-cap device includes a filed-effect transistor (FET) that further includes a source and a drain connected through contact features landing on the source and drain, respectively; a gate stack overlying a channel and interposed between the source and the drain; and a doped feature disposed underlying the channel and connecting to the source and the drain, wherein the doped feature is doped with a dopant of a same type of the source and the drain.