A bonding apparatus includes a first holder, a second holder, a moving unit, a housing, an interferometer, a first gas supply and a second gas supply. The first holder is configured to attract and hold a first substrate. The second holder is configured to attract and hold a second substrate. The moving unit is configured to move a first one of the first holder and the second holder in a horizontal direction with respect to a second one thereof. The interferometer is configured to radiate light to the first one or an object moved along with the first one to measure a horizontal distance thereto. The first gas supply is configured to supply a clean first gas to an inside of the housing. The second gas supply is configured to supply a second gas to a space between the interferometer and the first one or the object.

Provided is a bonding apparatus. The bonding apparatus includes a stage configured to accommodate a substrate, a laser light source configured to provide laser light to devices on the substrate, and a bonding plate provided between the laser light source and the stage and configured to provide the devices on the substrate. The bonding plate includes a transparent substrate; a transparent layer below the transparent substrate; an device adhesion layer below the transparent layer and a reflective pattern provided above or below the transparent substrate and the transparent layer.

A substrate processing apparatus includes a holder configured to hold a substrate by attracting the substrate on an attraction surface. The attraction surface includes an outer attraction portion configured to attract an outer peripheral portion of the substrate and an inner attraction portion configured to attract a portion of the substrate at an inner side than the outer peripheral portion. The holder includes a transforming unit configured to transform the outer attraction portion relative to the inner attraction portion.

An apparatus for measuring an adhesion force, the apparatus comprising a stage configured to support a specimen, and a sensor adhered to the specimen, wherein the sensor detects the adhesion force of the specimen, the adhesion force of the specimen being a force for detaching the sensor from the specimen.

A bonding apparatus includes: a chamber including a light transmission part configured to transmit light irradiated onto a substrate on which at least one chip is disposed; and a light generation part disposed on the chamber and configured to irradiate the light. The light transmission part may include an absorption prevention layer, in which a plurality of through-holes are defined, and a light diffusion layer that diffuses the light passing through the plurality of through-holes to reduce heat generation in the light transmission part and uniformly irradiate the light passing through the light transmission part onto the substrate on which at least one chip is disposed.

An apparatus for measuring an adhesion force, the apparatus comprising a stage configured to support a specimen, and a sensor adhered to the specimen, wherein the sensor detects the adhesion force of the specimen, the adhesion force of the specimen being a force for detaching the sensor from the specimen.

Various embodiments provide an electronic module comprising a interposer comprising a fluid channel formed in an electrically isolating material and an electrically conductive structured layer; at least one electronic chip attached to the electrically conductive layer and in thermal contact to the fluid channel; and a molded encapsulation formed at least partially around the at least one electronic chip, wherein the electrically conductive structured layer is directly formed on the electrically isolating material.

A chip transferring and bonding device, and a chip transferring and bonding method are provided. The chip transferring and bonding device includes a signal control module, a substrate carrying module, a chip transferring module, a substrate preheating module and a chip bonding module. The substrate preheating module is configured to preheat the circuit substrate at a predetermined preheating temperature, thereby allowing the soldering materials disposed between each chip and the circuit substrate to be preheated at the predetermined preheating temperature. The chip bonding module is configured to instantaneously heat the soldering materials disposed between each chip and the circuit substrate at a predetermined heating temperature. When the substrate preheating module and the chip bonding module are optionally configured to be used simultaneously, the substrate preheating module is configured to provide a predetermined preheating temperature, and the chip bonding module is configured to provide a predetermined heating temperature.

A method of manufacturing a semiconductor package, the method includes preparing a first semiconductor chip including a plurality of first upper connection pads, disposing a plurality of connection bumps electrically connected to the plurality of first upper connection pads on the first semiconductor chip, forming an insulating adhesive layer at least partially covering the plurality of connection bumps on an upper surface of the first semiconductor chip, removing a plurality of regions to be removed of the insulating adhesive layer, and bonding a second semiconductor chip including a plurality of second lower connection pads on the insulating adhesive layer, wherein each of the plurality of regions to be removed is a portion of the insulating adhesive layer that at least partially overlaps a connection bump among the plurality of corresponding connection bumps in a vertical direction.

A chip module comprises a carrier, having a first main surface and a second main surface opposite to the first main surface. A first recess structure is arranged in the carrier in the first main surface, and a chip is arranged in the first recess structure of the carrier. A patterned metallization layer is deposited on the second main surface of the carrier, the metallization layer having a first metallization structure and a second metallization structure, the first metallization structure being electrically isolated from the second metallization structure. The chip is electrically connected to the first metallization structure and the second metallization structure. The chip module comprises in particular an RFID chip and is suited to be connected to a textile substrate by way of laser reflow soldering.