Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Provided is a wave control medium capable of controlling waves while decreasing the size of a metamaterial or the like and increasing the bandwidth of the metamaterial or the like.

A wave control medium 10 is formed by combining at least two among a coil 11 and a coil 12 which are three-dimensional microstructures formed into a spiral structure, the coil 11 and the coil 12 including any one of a metal, a dielectric material, a magnetic material, a semiconductor, and a superconductor, or a material selected from a plurality of combinations of these materials, and having functions of a capacitor and an inductor. The coil 11 and the coil 12 form a capacitor between the lateral face of the coil 11 and the lateral face of the coil 12 facing each other, and form an inductor by forming a three-dimensional multiple resonance structure by the coil 11 and the coil 12 having a spiral structure.

Plasma processing systems and methods are disclosed. The plasma processing system includes a high-frequency generator configured to deliver power to a plasma chamber and a low-frequency generator configured to deliver power to the plasma chamber. A filter is coupled between the plasma chamber and the high-frequency generator, and the filter suppresses mixing products of high frequencies produced by the high-frequency generator and low frequencies produced by the low-frequency generator.

Plasma processing systems and methods are disclosed. The plasma processing system includes a high-frequency generator configured to deliver power to a plasma chamber and a low-frequency generator configured to deliver power to the plasma chamber. A filter is coupled between the plasma chamber and the high-frequency generator, and the filter suppresses mixing products of high frequencies produced by the high-frequency generator and low frequencies produced by the low-frequency generator.

A double loop antenna includes a source loop comprising: a spiral-shaped conductive source coil pattern disposed on a top surface of a board, and a source capacitor pattern comprising symmetrical conductive patterns disposed on the top surface and a bottom surface of the board; and a resonance loop comprising: a spiral-shaped conductive resonance coil pattern disposed on the bottom surface of the board, and a resonance capacitor pattern comprising symmetrical conductive patterns disposed on the top surface and the bottom surface of the board, wherein the source coil pattern and the resonance coil pattern are formed on different surfaces of the board.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Filter arrangement comprising an inner electric conductor comprising at least one inner conductor segment, an outer electric conductor at least partly surrounding the inner conductor, at least one dielectric element and at least one coil spring. The at least one dielectric element is arranged sandwiched between at least one inner conductor segment and the outer conductor to form a capacitance between the outer conductor and the inner conductor segment. The at least one coil spring is arranged inside said outer conductor to force the inner conductor segment and the at least one dielectric element against the outer conductor. The at least one coil spring is made from an electrically conducting material to form an inductance and is electrically connected with the inner conductor segment. An antenna feeding network and a multi-radiator antenna comprising such a filter arrangement is also provided.

Disclosed is a resonator for expanding a transfer distance. A conical resonator includes a metal layer configured to operate according to a resonant frequency, and a dielectric layer coupled to the top or bottom of the metal layer to space the metal layer apart from another metal layer without overlap, wherein the metal layer and the dielectric layer have a Swiss-roll structure, and include an input face to which power is supplied on the bottom and an open face on the top.

A magnetic structure for an electromagnetic resonator is provided. The magnetic structure comprises at least a solenoid and a permanent magnet, wherein the solenoid and the permanent magnet are concentrically arranged to each other such that the magnetic field lines provided by the permanent magnet are at least essentially perpendicular to magnetic field lines of a magnetic field generated by the solenoid. The arrangement of the permanent magnet and the solenoid may be housed by an element with a high magnetic permeability.

A magnetic structure for an electromagnetic resonator is provided. The magnetic structure comprises at least a solenoid and a permanent magnet, wherein the solenoid and the permanent magnet are concentrically arranged to each other such that the magnetic field lines provided by the permanent magnet are at least essentially perpendicular to magnetic field lines of a magnetic field generated by the solenoid. The arrangement of the permanent magnet and the solenoid may be housed by an element with a high magnetic permeability.