The metal graphite grounding brush including silver is made in slide contact with a peripheral surface of an axle and grounds the axle. The mass ratio between silver and carbonaceous components including a volatile component in the brush is silver above 30% and up to 90% and carbonaceous components less than 70% and down to 10%. When the total of silver and carbonaceous components is made 100%, the volatile component is down to 2.0% and up to 15%. The brush grounds the axle reliably so that noise from a car radio is reduced and has a long service life and mechanical strength.

An electric motor, in particular a separately excited synchronous motor, has a rotor shaft with at least one slip ring and at least one electrically conductive contact element, in particular a carbon brush, which bears against the slip ring and is accommodated in a channel-like guide formed in a housing and extending radially with respect to the rotor shaft and which carbon brush is radially tensioned against the slip ring by means of a spring element, wherein a roller is provided which is tensioned laterally against the contact element via a further spring element and via which the contact element is tensioned against a wall of the guide.

An electric motor, in particular a separately excited synchronous motor, has a rotor shaft with at least one slip ring and at least one electrically conductive contact element, in particular a carbon brush, which bears against the slip ring and is accommodated in a channel-like guide formed in a housing and extending radially with respect to the rotor shaft and which carbon brush is radially tensioned against the slip ring by means of a spring element, wherein a roller is provided which is tensioned laterally against the contact element via a further spring element and via which the contact element is tensioned against a wall of the guide.

A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

A carbon brush for transferring high currents having a connective piece for connecting an electric conductor and a consumable contact piece having a contact surface formed for abutting against a commutator element. The connective piece has a silver content of approximately 5% by weight to approximately 39% by weight and the contact piece has a silver content of approximately 40% by weight to 100% by weight.

A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.

A ground contact and a method for conducting electric currents from a rotor part of a machine to a stationary stator part of the machine, the rotor part having an axis or shaft, the ground contact comprising a holder device connected to the stationary stator part of the machine in an electrically conductive manner and a contact realized as a flexible conductor having a free end disposed on a circumference of the rotor part and an end fastened on the holder device, the conductor being inherently stable such that a contact force can be applied to a contact surface for establishing an electrically conductive sliding contact between a sliding contact surface of the conductor and the circumference of the rotor part. The conductor is bendable such that the free end extends in the direction of a rotational axis of the rotor part when disposing the ground contact on the rotor part.