Patent classifications
H01S3/0816
Apparatus for providing optical radiation
Apparatus for providing optical radiation (15), which apparatus comprises an optical input (13), a coupler (2), a first semiconductor amplifier (3), a controller (4), a preamplifier (61), a power amplifier (62) and an output fibre (5), wherein: the optical input (13) is for receiving input optical radiation (14); the optical input (13) is connected in series to the coupler (2), the first semiconductor amplifier (3), the preamplifier (61), the power amplifier (62), and the output fibre (5); the apparatus being characterized in that: the first semiconductor amplifier (3) comprises a waveguide (6) having a low reflecting facet (8); the first semiconductor amplifier (3) is in a double pass configuration such that the low reflecting facet (8) is connected to both the optical input (13) and the preamplifier (61) via the coupler (2); and the controller (4) is configured to cause the waveguide (6) of the first semiconductor amplifier (3) to operate in saturation thereby enabling the first semiconductor amplifier (3) to reduce non-linear effects in the preamplifier (61), the power amplifier (62), and the output fibre (5).
Condensation prevention for high-power laser systems
In various embodiments, laser systems or resonators incorporate two separate cooling loops that may be operated at different cooling temperatures. One cooling loop, which may be operated at a lower temperature, cools beam emitters. The other cooling loop, which may be operated at a higher temperature, cools other mechanical and/or optical components, for example optical elements such as lenses and/or reflectors.
Femtosecond pulse laser apparatus
A femtosecond pulse laser apparatus includes a pump light source configured to provide a pump light, a gain medium configured to obtain a gain of a laser light using the pump light, a first curved mirror and a second curved mirror, which are provided at both sides of the gain medium, an output mirror configured to transmit a portion of the laser light and reflect the other portion of the laser light to the gain medium, a mode locking portion configured to generate a femtosecond pulse of the laser light, and an acoustic wave generator configured to provide an acoustic wave into the gain medium so as to adjust self-phase modulation of the laser light.
Laser apparatus, EUV light generating system, and electronic device manufacturing method
A laser apparatus according to the present disclosure includes an excitation light source configured to output excitation light, a laser crystal disposed on an optical path of the excitation light, a first monitor device disposed on an optical path of transmitted excitation light after having transmitted through the laser crystal to monitor the transmitted excitation light, a temperature adjustment device configured to adjust a temperature of the excitation light source to a constant temperature based on a temperature command value, and a controller configured to change the temperature command value based on a result of monitoring by the first monitor device.
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser apparatus according to an aspect of the present disclosure includes a master oscillator configured to emit a laser beam, an amplifier including an optical resonator and configured to amplify the laser beam emitted by the master oscillator in the optical resonator, and a phase shift structure disposed on an optical path between the master oscillator and the amplifier at a position closer to the amplifier than a middle point of the optical path. The phase shift structure includes a plurality of cells having different phase shift amounts for the laser beam. The cells have a disposition interval of 80 μm to 275 μm inclusive.
Method for narrowing the linewidth of a single mode laser by injecting optical feedback into the laser cavity through both laser cavity mirrors
A method or apparatus for narrowing the linewidth of a single mode laser is provided. The linewidth of a single mode laser is narrowed by injecting an optical feedback simultaneously into the first laser cavity mirror and the second laser cavity mirror of the single mode laser.
ULTRAVIOLET LASER APPARATUS
An ultraviolet laser apparatus includes: a semiconductor laser that emits an excitation laser light; a fiber laser medium to which the excitation laser light enters from the semiconductor laser and that causes laser oscillation; and an external resonator that: converts a wavelength of a laser light oscillated in the fiber laser medium, and outputs an ultraviolet region continuous wave of at least 0.1W.
LIGHT SOURCE APPARATUS AND INSPECTION APPARATUS
A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.
CONDENSATION PREVENTION FOR HIGH-POWER LASER SYSTEMS
In various embodiments, laser systems or resonators incorporate two separate cooling loops that may be operated at different cooling temperatures. One cooling loop, which may be operated at a lower temperature, cools beam emitters. The other cooling loop, which may be operated at a higher temperature, cools other mechanical and/or optical components, for example optical elements such as lenses and/or reflectors.
METHOD OF LOCALIZED CONSOLIDATION OF PARTS ASSEMBLED BY MOLECULAR ADHESION
A method of assembling together a first part and at least one second part that are made of materials compatible with bonding by molecular adhesion includes a step of pressing a first surface of the first part against a second surface of the second part so as to create molecular bonds at an interface between the parts, and a step of consolidating the interface bonding as created in this way by heat treatment. The consolidation includes a step of emitting a power laser beam towards an impact point forming a portion of the outline of the interface, and a step of moving the impact point along the outline of the interface.