A laser chamber apparatus may include a pipe, an inner electrode extending along a longitudinal direction of the pipe and disposed in a through hole in the pipe, an outer electrode including a contact plate extending along the longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and a leaf spring extending along the longitudinal direction of the pipe and configured to press the outer electrode against the pipe. The leaf spring may include leaf spring pieces separated by slits, and the leaf spring pieces may each include a bent section bent along the edge and are configured to press the bar members in a position shifted from the bent sections toward the edge.

A laser system may include one or more seed lasers to generate a pulsed seed beam including one or more laser pulses, a pulse pattern generator to generate an intermediate patterned burst-mode beam from at least one laser pulse from the pulsed seed beam, where the pulse pattern generator includes splits the at least one laser pulse from the pulsed seed beam along two or more delay paths and combines light along the two or more delay paths to a common optical path, and where the intermediate patterned burst-mode beam includes laser pulses with a selected pattern of inter-pulse spacings associated with the two or more delay paths. The laser system may further include power amplifiers to amplify the intermediate patterned burst-mode beam to form an amplified patterned burst-mode beam, where the amplified patterned burst-mode beam includes amplified laser pulses with the selected pattern of inter-pulse spacings.

An optical arrangement for adjusting the wavelength of light, comprising: a first light source arranged to generate a first beam of light at a first wavelength; a second light source arranged to generate seed light at a second wavelength; a first Raman shifting medium arranged to receive the light from the first light source in combination with the seed light from the second light source, and to produce, by stimulated Raman scattering, output light at the second wavelength and having temporal properties determined by those of the first beam of light; a third light source arranged to generate seed light at a third wavelength; and a second Raman shifting medium arranged to receive the output light from the first Raman shifting medium in combination with the seed light from the third light source, and to produce, by stimulated Raman scattering, output light at the third wavelength and having temporal properties determined by those of the output light from the first Raman shifting medium; wherein the third wavelength is greater than the second wavelength, and the second wavelength is greater than the first wavelength; wherein the frequency difference between the first beam of light and the seed light from the second light source is a frequency difference where the first Raman shifting medium exhibits Raman gain; and wherein the frequency difference between the output light from the first Raman shifting medium and the seed light from the third light source is a frequency difference where the second Raman shifting medium exhibits Raman gain. Also provided is a corresponding method of adjusting the wavelength of light.

A laser apparatus includes: (A) a solid-state laser apparatus that outputs burst seed pulsed light containing a plurality of pulses; (B) an excimer amplifier that amplifies the burst seed pulsed light in a discharge space in a single occurrence of discharge and outputs the amplified light as amplified burst pulsed light; (C) an energy sensor that measures the energy of the amplified burst pulsed light; and (D) a laser controller that corrects the timing at which the solid-state laser apparatus is caused to output the burst seed pulsed light based on the relationship of the difference between the timing at which the solid-state laser apparatus outputs the burst seed pulsed light and the timing at which the discharge occurs in the discharge space with a measured value of the energy.

A laser system includes a beam shaping unit, a random phase plate, and a collimating optical system in an optical path between a solid-state laser device and an excimer amplifier. When a traveling direction of a laser beam entering the excimer amplifier is a Z direction, a discharge direction of a pair of discharge electrodes is a V direction, a direction orthogonal to the V and Z directions is an H direction, a shaping direction of the beam shaping unit corresponding to the V direction is a first direction, a shaping direction of the beam shaping unit corresponding to the H direction is a second direction, an expansion rate in the first direction is E1, and an expansion rate in the second direction is E2, the beam shaping unit expands a beam section of the laser beam such that an expansion ratio defined by E2/E1 is higher than 1.

An extra cavity harmonic generator system may produce a round, non-astigmatic third harmonic output beam from a nominally round, non-astigmatic, diffraction limited input fundamental beam. The system may include a second harmonic generation crystal. An input fundamental beam size is expanded in a non-walkoff direction for the SHG crystal at the SHG crystal input face. A higher harmonic generation crystal has an output face oriented at an oblique angle of incidence in a non-walkoff direction for the HHG crystal such that an output higher harmonic beam size is contracted in this direction. Expansion of the input fundamental beam at the SHG crystal input face exceeds reduction of third harmonic beam at the HHG crystal output face.

A narrow linewidth laser in which an all-optical feedback line-up is used to improve the linewidth from a conventional laser source, such as a laser diode. The feedback line-up comprises an optical device having a controllable unbalanced optical coupler arranged on a cavity input path to couple a source signal from the laser source into the optical cavity, and to couple a seed signal received back from the optical cavity into the laser source. The seed signal has a lower power than the source signal. The unbalanced optical coupler may be an optical isolator arranged to couple the seed signal into the laser source at a power level selected to promote preferential stimulated emission within a narrower linewidth. By controlling the power of seed signal such that only a small portion thereof influences the lasing cavity, the narrowing effect of the preferential stimulated emission can be enhanced.

A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.

A non-reciprocal optical assembly for injection locking a laser to a resonator is described. The laser emits a light beam, and the resonator receives the light beam and returns a feedback light beam to the laser such that the feedback light beam causes injection locking. The non-reciprocal optical assembly is interposed between and optically coupled to the laser and the resonator. The non-reciprocal optical assembly includes a first port that receives the light beam from the laser, and a second port that outputs the light beam to the resonator and receives the feedback light beam from the resonator. The first port also outputs the feedback light beam to the laser. The light beam passes through the non-reciprocal optical assembly with a first power loss, and the feedback light beam passes through the non-reciprocal optical assembly with a second power loss (the first power loss differs from the second power loss).

A laser system according to an embodiment of the present invention includes an oscillation unit to generate a laser output, a connection unit to connect the oscillation unit with an optical fiber loop, an amplifying unit to amplify the laser output on the optical fiber loop, a conversion unit disposed on the optical fiber loop to convert pulsed wave laser output into continuous wave laser output, and an output unit disposed between the connection unit and the conversion unit to split a part of the laser output toward the conversion unit. The system for generating a high output pulsed wave laser and converting the pulsed wave laser into a continuous wave laser may be implemented in a simple structure and small size with high stability and high reproducibility. In addition, a high output laser may be obtained. Also, since conversion from the pulsed wave into the continuous wave is easy, both of the high output pulsed wave and the high output continuous wave may be obtained as necessary.