A light source including: a pulse generator for providing a first sequence of light pulses, the first sequence of light pulses including a first number of light pulses within a predetermined time period, a manipulator configured to generate a second sequence of light pulses from the first sequence of light pulses, the second sequence of light pulses having a second number of light pulses within the predetermined time period, the second number being different from the first number, and a nonlinear optical element arranged to receive the second sequence of light pulses.

A method for providing spectral beam combining (SBC) including generating a plurality seed beams each having a central wavelength and a low fill factor profile, where the wavelength of all of the seed beams is different; amplifying the seed beams; causing the amplified beams to expand as they propagate so as to be converted from the low fill factor profile to a high fill factor profile where the high fill factor profile tapers to a lower value at a perimeter of each beam; causing a wavefront of the converted beams to flatten to provide a plurality of adjacent SBC beams having different wavelengths with minimal overlap and a minimal gap between the beams; collimating the SBC beams; and directing the collimated SBC beams onto an SBC element that spatially diffracts the individual beam wavelengths and directing the beams in the same direction as a combined output beam.

A laser apparatus according to an aspect of the present disclosure includes: a master oscillator; at least one amplifier disposed on an optical path of a first pulse laser beam output from the master oscillator; a sensor disposed on an optical path of a second pulse laser beam output from the at least one amplifier; and a laser controller. The laser controller causes the laser apparatus to perform burst oscillation based on a burst signal from an external device, and performs processing of controlling a beam parameter based on a sensor output signal obtained from the sensor in a burst duration, and processing of detecting self-oscillation light from the amplifier based on a sensor output signal obtained from the sensor in a burst stop duration.

An optical fiber amplifier compatible with a small form-factor pluggables (SFP+) package includes a housing, and a circuit device and an optical path device that are disposed in the housing, where the housing includes a structure compatible with an SFP+ package and is provided with an accommodation space; both the circuit device and the optical path device are located in the accommodation space, and the optical path device is located below the circuit device; the circuit device is provided with a card edge connector, and the card edge connector can be exposed outside the housing. The optical fiber amplifier compatible with an SFP+ package has a compact internal space. The amplifer has an appearance compatible with a standard SFP+ package. An electrical interface pin also meets a requirement of an existing SFP+ package, and dynamic plugging and plug-and-play can be satisfied.

Light amplification devices using coupled multi-core optical fibers have a figure of merit that temporally varies, which makes it difficult to perform performance evaluation and to build a light transmission system using the same. Accordingly, a light amplification device of the present invention comprises: a band control means that controls the wavelength band of a light carrier to generate a band control light; and a band control light amplification means that has a plurality of light amplification media through which the band control light propagates, wherein the band control light amplification means amplifies the band control light in a coupled state in which the light propagating through the plurality of light amplification media induces a crosstalk and wherein the band control means controls the wavelength band such that the band control light having propagated through the plurality of light amplification media has a reduced coherence.

An exposure system according to an aspect of the present disclosure includes a laser apparatus emitting a pulse laser beam, an illumination optical system guiding the pulse laser beam to a reticle, a reticle stage moving the reticle, and a processor controlling emission of the pulse laser beam and movement of the reticle. The exposure system performs scanning exposure of a semiconductor substrate by irradiating the reticle with the pulse laser beam. The reticle has first and second regions. The processor instructs the laser apparatus about, based on proximity effect characteristics corresponding to the first and second regions, a value of a control parameter of the pulse laser beam corresponding to each region so that the laser apparatus emits the pulse laser beam with which a difference of the proximity effect characteristic of each region from a reference proximity effect characteristic is in an allowable range.

A multi-stage thulium-doped (Tm-doped) fiber amplifiers (TDFA) is based on the use of single-clad Tm-doped optical fiber and includes a wavelength conditioning element to compensate for the nonuniform spectral response of the initial stage(s) prior to providing power boosting in the output stage. The wavelength conditioning element, which may comprise a gain shaping filter, exhibits a wavelength-dependent response that flattens the gain profile and output power distribution of the amplified signal prior to reaching the output stage of the multi-stage TDFA. The inclusion of the wavelength conditioning element allows the operating bandwidth of the amplifier to be extended so as to encompass a large portion of the eye-safe 2 μm wavelength region.

A photonic lantern couples light from several fibers or fiber cores into one or more fibers or fiber cores. Photonic lanterns are often used to combine several lower-power beams into a single higher-power beam. They can also be used to couple light from multi-core fibers into single-mode, multi-mode, or other multi-core fibers. By modulating the phases of the input beams, the light can be switched from output to output—for example, between output cores of a multi-core output fiber. If desired, the beams can also be amplified using an active fiber in or coupled to the photonic lantern. A first photonic lantern couples signal light and pump light into the core and cladding, respectively, of an active multi-mode or multi-core fiber. And the active multi-mode or multi-core fiber couples amplified signal light into output fiber(s) via a second photonic lantern.

A coherent fiber array laser power projection system scalable to large number of subapertures and includes sensors that produce signals dependent upon beam characteristics, and controllers configured to control beam characteristics to achieve either phasing of outgoing beams at transmitter plane or coherent beam combining at a remote target or both.

A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.