Patent classifications
H01S3/1306
FRACTIONAL HANDPIECE WITH A PASSIVELY Q-SWITCHED LASER ASSEMBLY
A fractional handpiece and systems thereof for skin treatment include a passively Q-switched laser assembly operatively connected to a pump laser source to receive a pump laser beam having a first wavelength and a beam splitting assembly operable to split a solid beam emitted by the passively Q-switched laser assembly and form an array of micro-beams across a segment of skin. The passively Q-switched laser assembly generates a high power sub-nanosecond pulsed laser beam having a second wavelength.
Device and method for generating laser pulses by Kerr lens based mode locking with a loss-modulation device as a Kerr medium
A laser device (100), being configured for generating laser pulses by Ken lens based mode locking, comprises a laser resonator (10) with a plurality of resonator mirrors (11.1, 11.2, 11.3) spanning a resonator beam path (12), a solid state gain medium (20) being arranged in the laser resonator (10), a Kerr medium device (30) being arranged with a distance from the gain medium (20) in the laser resonator (10), wherein the Kerr medium device (30) includes at least one Ken medium being arranged in a focal range of the resonator beam path and being configured for forming the laser pulses by the nonlinear Kerr effect, and a loss-modulation device (31, 32) having a modulator medium, which is capable of modulating a power loss of the laser pulses generated in the laser resonator (10), wherein the Kerr medium device (30) includes the modulator medium of the loss-modulation device (31, 32) as the at least one Kerr medium having an optical non-linearity being adapted for both of creating the Kerr lens based mode-locking in the laser resonator and modulating the power loss in the laser resonator. Furthermore, a method of generating laser pulses by Kerr lens based mode locking is described, wherein a loss-modulation device (31, 32) is used for both of introducing a Ken effect in the laser resonator (10) and modulating the power loss.
Laser device and electronic device manufacturing method
A laser device may include a laser resonator; a chamber arranged on an optical path of the laser resonator; a pair of electrodes arranged in the chamber; a power source applying a voltage to the electrodes; a storage unit storing a voltage value; and a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to or larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, where i>1 and j>i.
LIGHT AMPLIFICATION DEVICE, LIGHT TRANSMISSION SYSTEM, AND LIGHT AMPLIFICATION METHOD
Light amplification devices using coupled multi-core optical fibers have a figure of merit that temporally varies, which makes it difficult to perform performance evaluation and to build a light transmission system using the same. Accordingly, a light amplification device of the present invention comprises: a band control means that controls the wavelength band of a light carrier to generate a band control light; and a band control light amplification means that has a plurality of light amplification media through which the band control light propagates, wherein the band control light amplification means amplifies the band control light in a coupled state in which the light propagating through the plurality of light amplification media induces a crosstalk and wherein the band control means controls the wavelength band such that the band control light having propagated through the plurality of light amplification media has a reduced coherence.
SENSOR DEGRADATION EVALUATION METHOD
A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.
EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
An exposure system according to an aspect of the present disclosure includes a laser apparatus emitting a pulse laser beam, an illumination optical system guiding the pulse laser beam to a reticle, a reticle stage moving the reticle, and a processor controlling emission of the pulse laser beam and movement of the reticle. The exposure system performs scanning exposure of a semiconductor substrate by irradiating the reticle with the pulse laser beam. The reticle has first and second regions. The processor instructs the laser apparatus about, based on proximity effect characteristics corresponding to the first and second regions, a value of a control parameter of the pulse laser beam corresponding to each region so that the laser apparatus emits the pulse laser beam with which a difference of the proximity effect characteristic of each region from a reference proximity effect characteristic is in an allowable range.
BURST STATISTICS DATA AGGREGATION FILTER
A system includes a laser source configured to generate one or more bursts of laser pulses and a data collection and analysis system. The data collection and analysis system is configured to receive, from the laser source, data associated with the one or more bursts of laser pulses and determine, based on the received data, that the one or more bursts of laser pulses are for external use. The data collection and analysis system is further configured to determine, based on the received data, whether the one or more bursts of laser pulses are for an on-wafer operation or are for a calibration operation.
METHOD OF CREATING AN OPTICAL ATOM TRAP AND ATOM TRAP APPARATUS, EMPLOYING AN INCOHERENT LIGHT FIELD
A method of creating an optical atom trap comprises the steps of providing an incoherent light field with a light source apparatus, by creating a pulsed laser light beam of laser pulses with a repetition rate equal to or above 100 kHz and a relative spectral width of 10.sup.−4 to 10.sup.−2, coupling the pulsed laser light beam to an input end of a multimode waveguide device and guiding the pulsed laser light beam by total internal reflection to an output end of the multimode waveguide device, wherein the incoherent light field is provided at the output end, and creating the optical atom trap for trapping atoms in an atom trap chamber device by coupling the incoherent light field to the atom trap chamber device, wherein the optical atom trap has a trap frequency and the atoms have multiple resonance frequencies, and the laser pulses for providing the incoherent light field are created such that the repetition rate is above the trap frequency and the spectral width is below a spectral range between the resonance frequencies. Furthermore, an optical atom trap apparatus for optically trapping atoms is described.
LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
A laser processing apparatus includes a semiconductor laser element, a waveform output unit for outputting input waveform data, a driver circuit for supplying a drive current having a time waveform according to the input waveform data to the semiconductor laser element, and a processing optical system for irradiating a processing object with laser light. The semiconductor laser element outputs the laser light in which two or more light pulse groups each including one or a plurality of light pulses are provided with a time interval therebetween. Time waveforms of at least two light pulse are different from each other. The time waveform includes at least one of a time waveform of each of the one or plurality of light pulses, a time width of each of the one or plurality of light pulses, and a time interval of the plurality of light pulses.
Hyper temporal lidar with dynamic laser control using safety models
A lidar system that includes a laser source and transmits laser pulses produced by the laser source toward range points in a field of view via a mirror that scans through a plurality of scan angles can use (1) a laser energy model to model the available energy in the laser source over time and (2) a mirror motion model to model motion of the mirror over time. A shot list for the upcoming laser pulse shots that are modeled according to the laser energy and mirror motion models can further be controlled based on eye safety and/or camera safety models to prevent the lidar system firing too much laser energy into defined spatial areas over defined time periods and thus reduce the risk of damage to eyes and/or cameras in the field of view.