The present disclosure provides a laser pulse sequence energy correction system and method. The correction system includes a fundamental frequency light source, a control unit, an energy adjusting unit and a frequency multiplication crystal; the fundamental frequency light source is configured to output a fundamental frequency pulse laser, and the frequency multiplication crystal is configured to convert the fundamental frequency pulse laser into a multiple frequency pulse laser; the control unit prestores an energy-time curve of the multiple frequency pulse laser, and the control unit is configured to control the energy adjusting unit to adjust the intensity of the fundamental frequency pulse laser incident on the frequency multiplication crystal according to the energy-time curve, so that energy of each pulse in the multiple frequency pulse laser is identical. The technical solution of the present disclosure has advantages of simple structure, reliable device, convenient adjustment and the like.

A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.

A laser device may include a laser resonator; a chamber arranged on an optical path of the laser resonator; a pair of electrodes arranged in the chamber; a power source applying a voltage to the electrodes; a storage unit storing a voltage value; and a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to or larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, where i>1 and j>i.

A laser assembly is provided that includes a laser resonator that emits a first light having a first pulse width, and a trigger assembly electrically coupled to the laser resonator to actuate the laser resonator. The laser assembly also includes a sensor configured to detect the first light as the light emits from the laser resonator, and one or more processors coupled to the trigger assembly. The one or more processors are configured to obtain a first time delay interval from when the trigger assembly is actuated to when the sensor detects the first light, and actuate the laser resonator to emit a second light having a second pulse width based on the time delay interval determined.

A lidar system that includes a laser source and a scannable mirror can also include a circuit that schedules a variable rate firing of a plurality of upcoming laser pulse shots by the laser source using a laser energy model as compared to a plurality of energy requirements applicable to the upcoming laser pulse shots, and wherein the laser energy model takes into consideration a retention of energy in the laser source after the upcoming laser pulse shots are fired and quantitatively predicts available energy amounts for the upcoming laser pulse shots from the laser source based on a history of prior laser pulse shots by the laser source. The laser energy model is capable of modeling the energy available for laser pulse shots in the laser source over very short time intervals (such as 10-100 nanoseconds).

An apparatus (such as a laser-based system) and method for providing optical pulses in a broad range of pulse widths and pulse energies uses a pulse slicer which is configured to slice a predefined portion having a desired pulse width of each of the one or more output optical pulses from a laser oscillator, in which timings of a rising edge and a falling edge of each sliced optical pulse relative to a time instance of a maximum of the corresponding each of the one or more output optical pulses from the laser oscillator, are chosen at least to maximize amplification efficiency of the optical amplifier, which may be located after the pulse slicer, and to provide the one or more amplified output optical pulses each having the desired pulse energy and pulse width.

A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.

A smart spool is configured to be optically coupled between a pumping light source and optical point-loss sources in an optical fiber transmission line. The smart spool comprises a probe signal transmitter that transmits an optical probe signal into the transmission line. An optical detector receives probe signals scattered in the transmission line. A loss-measuring device is coupled to the optical detector and operable to measure aggregate losses in the transmission line and report the aggregate losses to a network manager. The spool comprises a fiber of sufficient length to offset the aggregated losses to enable a distributed Raman amplifier to pump the transmission line. The smart spool prevents the distributed Raman amplifier from shutting down and allows the distributed Raman amplifier to achieve entitled gain by pumping the fiber in the spool.

A laser gas regenerating apparatus regenerates a discharged gas discharged from at least one ArF excimer laser apparatus and supplies the regenerated gas to the at least one ArF excimer laser apparatus connected to a first laser gas supply source that supplies a first laser gas and to a second laser gas supply source that supplies a second laser gas. The laser gas regenerating apparatus includes a data obtaining unit that obtains data on a supply amount of the second laser gas supplied to the at least one ArF excimer laser apparatus; a xenon adding unit that adds, to the regenerated gas, a third laser gas; and a control unit that controls, based on the supply amount, an addition amount of the third laser gas by the xenon adding unit.

A control system for controlling a laser, comprising a sensor for sensing a physical value indicative of a characteristic of a laser beam emitted by the laser, a switch, a first controller and a second controller. Each controller is configured, to receive a further sensor value from the sensor, adjust a received setpoint value based on the received further sensor value to give an output value and cause the laser to operate in accordance with the output value. The switch is configured to switch between the controllers such that output values are provided from each controller in a cyclic fashion.