A tunable laser system includes a tunable laser to be scanned over a range of frequencies and an interferometer having a plurality of interferometer outputs. At least two interferometer outputs of the plurality of interferometer outputs have a phase difference. A wavelength reference has a spectral feature within the range of frequencies, and the spectral feature does not change in an expected operating environment of the tunable laser. Processing circuitry uses the spectral feature and the plurality of interferometer outputs to produce an absolute measurement of a wavelength of the tunable laser and controls the tunable laser based on a comparison of the absolute measurement of the wavelength of the tunable laser with a setpoint wavelength.

An exposure method includes reading data indicating a relation between parameters and a wavelength difference between a first pulse laser beam and a second pulse laser beam, the parameters being related to exposure conditions under which a semiconductor wafer is exposed to a plurality of pulse laser beams including the first and second pulse laser beams, determining a target value of the wavelength difference based on the data and command values of the parameters; determining a first wavelength of the first pulse laser beam and a second wavelength of the second pulse laser beam based on the target value; outputting a wavelength setting signal to a laser apparatus to cause emission of the pulse laser beams including the first pulse laser beam having the first wavelength and the second pulse laser beam having the second wavelength; and exposing the semiconductor wafer to the pulse laser beams.

A single-frequency laser apparatus comprises a mirror and a volume Bragg grating (VBG) reflector defining a laser cavity therebetween and an optical gain material for emitting and amplifying an intra-cavity beam in the laser cavity. The optical gain material comprises a transition-metal doped crystal such as a crystal doped with transition-metal ions selected from one or more of Ti.sup.3+ ions, Cr.sup.2+ ions, Cr.sup.3+ ions or Cr.sup.4+ ions. A reflectivity spectrum of the VBG reflector and an optical length of the laser cavity are selected so that a beam output from the laser cavity is a single-frequency output beam and/or includes only one longitudinal mode of the laser cavity. The laser apparatus may provide a robust, compact, low cost, high-power wavelength adjustable (from approximately 650 to 950 nm), narrow linewidth (<100 kHz), single frequency laser source which is suitable for a wide range of applications from laser sensing, spectroscopy, and high precision frequency metrology sectors.

A current control device supplies a current to a semiconductor laser in order to output laser light to the semiconductor laser, and includes a current commander and a supplier. The current commander outputs a command value corresponding to a current value by increasing the command value with a lapse of time until reaching a target command value corresponding to a current value for outputting the laser light with a predetermined strength. The supplier supplies a current with a size corresponding to the command value output by the current commander to the semiconductor laser.

A laser-frequency stabilizer includes: a light detector that converts a laser beam passing through an iodine cell to an optical output signal, an actuator that changes a resonator length in accordance with a received output voltage, and a control unit that controls the output voltage applied to the actuator. The control unit searches for a target saturated absorption line based on the optical output signal and, when the output voltage when the target saturated absorption line is found is within a normal voltage range that is predetermined corresponding to the target saturated absorption line, locks a oscillation frequency of the laser beam to the target saturated absorption line.

A tunable laser wavelength measurement system includes an interferometric wavelength tracking system that uses a combination of interferometric and wavelength reference measurements to directly measure the laser output wavelength, The measurement exhibits the following desirable error signal characteristics: directional information, continuity, low latency, absolute information, high accuracy, high precision, and little or no drift, A tunable laser wavelength control system additionally incorporates electronics to compare the measured laser wavelength to a desired wavelength or wavelength function, and to generate a feedback control signal to control the wavelength of the laser output based on the comparison. In one non-limiting example implementation, the desired wavelength function is repetitive. The difference between the desired wavelength function and the interferometrically-measured wavelength function is taken, and a successive approximation technique is employed to calculate and adjust a repetitive controlling signal to obtain the desired wavelength function.

A laser system comprising two phase-locked solid-state laser sources is described. The laser system can be phase-locked at a predetermined offset between the operating frequencies of the lasers. This is achieved with high precision while exhibiting both low noise and high agility around the predetermined offset frequency. A pulse generator can be employed to generate a series of optical pulses from the laser system, the number, duration and shape of which can all be selected by a user. A phase-lock feedback loop provides a means for predetermined frequency chirps and phase shifts to be introduced throughout a sequence of generated pulses. The laser system can be made highly automated. The above features render the laser system ideally suited for use within coherent control two-state quantum systems, for example atomic interferometry, gyroscopes, precision gravimeters gravity gradiometers and quantum information processing and in particular the generation and control of quantum bits.

Configurations and method fabrication are disclosed for vapor cells used in atomic sensors. In particular vapor cells that include optical resonators. The disclosed configurations can utilize the optical resonance inside the vapor cells to enhance the interaction between laser beams and atoms contained in the vapor cell and enable controlling the temperature of the vapor cell.

A holder and at least one terminal element that are configured and arranged with respect to one another so as to form a cavity of length ΔL bounded axially by two walls the relative position of which with respect to each other varies in the opposite direction to the variation in ambient temperature, an increase in temperature causing the walls to move closer together and vice versa. A linear structure incorporating the device sees its length decrease when temperature increases and vice versa. Electro-optical transducers comprising a piezoelectric actuator of linear structure that acts on the length of a segment of optical fiber that forms the laser source of the transducer, and having such a device incorporated into the actuator in order to compensate, by modifying the length of the segment of fiber, for the variations in wavelength induced in the laser by the variations in temperature.

A holder and at least one terminal element that are configured and arranged with respect to one another so as to form a cavity of length ΔL bounded axially by two walls the relative position of which with respect to each other varies in the opposite direction to the variation in ambient temperature, an increase in temperature causing the walls to move closer together and vice versa. A linear structure incorporating the device sees its length decrease when temperature increases and vice versa. Electro-optical transducers comprising a piezoelectric actuator of linear structure that acts on the length of a segment of optical fiber that forms the laser source of the transducer, and having such a device incorporated into the actuator in order to compensate, by modifying the length of the segment of fiber, for the variations in wavelength induced in the laser by the variations in temperature.