Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.

A capacitive actuator motor according to an embodiment of the present invention includes a capacitive actuator having six actuator units and a motor output cam having a periodic shape portion. Each of the six actuator units includes a buckling displacement expansion mechanism configured to convert an output of a piezoelectric element and urge an output joint in a predetermined output direction and a preload adjustment spring configured to urge an output joint with a certain characteristic in a direction in which the periodic shape portion and the output joint come into contact with each other.

A camera system incorporating a MEMS actuator to achieve focus adjustments to compensate for the thermal expansion of the lens assembly is disclosed. The camera comprises a lens barrel, lens holder, infra-red (IR) filter, board circuit, MEMS actuator, housing package for the actuator, and an image sensor. The image sensor is directly wire bonded to pads on the circuit board such that these pads are movable at the image sensor end and fixed at the circuit board end. When the camera is exposed to temperature variations, the MEMS actuator moves the sensor along the optical axis to maintain the image in focus.

At least some embodiments of the present disclosure an electrostatic sheet jamming device comprising a first sheet having a first conductive layer, a first dielectric layer disposed adjacent to the first conductive layer, and a second sheet comprising a second conductive layer and disposed proximate to the first dielectric layer. The first dielectric layer is disposed between the first conductive layer and the second conductive layer. The first sheet and the second sheet are non-extensible and flexible, wherein the first sheet and the second sheet are slidable relative to each other in a first state. The first sheet and the second sheet are jammed with each other in a second state when a voltage is applied between the first conductive layer and the second conductive layer. In some embodiments, the applied voltage is less than or equal to a break-down voltage of air at a distance between the first conductive layer and the second conductive layer.

An actuator drive apparatus according to a first aspect includes a first member, a second member that faces the first member via a gap, a gap sensor that detects a dimension of the gap, a first actuator that changes the dimension of the gap through input of a first voltage signal, and a second actuator that changes the dimension of the gap through input of a second voltage signal, in which the first voltage signal is a voltage signal that becomes a constant bias voltage after a lapse of a predetermined time, and includes an overshoot signal larger than the bias voltage before the lapse of the predetermined time, and the second voltage signal is a voltage signal that is feedback-controlled so that a detection value detected by the gap sensor approaches a target value.

Devices, methods, and systems for electrostatic machines which can act as both an electric motor, converting electrical energy to mechanical energy, and an electric generator, converting mechanical energy to electrical energy, are described. In some embodiments, a spring positioned between two oppositely charged plates may be used as an electric motor and/or electric generator.

The invention relates to a microelectromechanical drive for moving an object, having electrostatic bending actuators, wherein each electrostatic bending actuator has a cantilever having at least one active element which has a layer stack forming at least one capacitor positioned offset to a center-of-gravity-plane of the cantilever which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to a loose end, which is averted from the supported end of the cantilever and which has a contact area for engaging with the object.

The microelectromechanical drive can be used to displace any target objects from nanoscopic to macroscopic sizes that are within the force-displacement configurations of the electrostatic bending actuators. The microelectromechanical drive is suited to act as an inchworm drive.

A force feedback actuator includes a pair of electrodes and a dielectric member. The pair of electrodes are spaced apart from one another to form a gap. The dielectric member is disposed at least partially within the gap. The dielectric member includes a first portion having a first permittivity and a second portion having a second permittivity that is different from the first permittivity. The dielectric member and the pair of electrodes are configured for movement relative to each other.

An actuator has a flexible electrode that has flexibility and a base electrode of which an opposing surface facing the flexible electrode is covered with an insulation layer, and is configured such that, when a voltage is applied between flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposing surface. The actuator includes a restraining member that restrains the flexible electrode on the base electrode. The flexible electrode has a deforming portion that deforms when a voltage is applied between the electrodes. The deforming portion deforms in a direction of approaching the opposing surface, with the restraining member serving as a support point.

Examples include a device including a nanovoided polymer element having a first surface and a second surface, a first plurality of electrodes disposed on the first surface, a second plurality of electrodes disposed on the second surface, and a control circuit configured to apply an electrical potential between one or more of the first plurality of electrodes and one or more of the second plurality of electrodes to induce a physical deformation of the nanovoided polymer element.