A micro device transfer tool and methods of operation are described. In an embodiment, the micro device transfer tool includes an articulating transfer head assembly capable of six degrees of motion. A miniatured camera assembly may be secured near the point of contact for the articulating transfer head assembly to aid in system alignment. In an embodiment, an encoder system is described for alignment of a micro pick up array and target substrate using complementary concentric grating patterns. In an embodiment a miniaturized position sensor design is described for sensing position of various system components during alignment or pick and place processes.

An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

A vibration-wave motor includes a vibrator having two protruding parts, a holding member configured to hold the vibrator, a movable member configured to translationally move together with the holding member, a rotating unit configured to allow the holding member to rotate around each of three axes relative to the movable member and to restrict the holding member from translating in each of the three axes relative to the movable member, a urging member configured to urge the holding member and the movable member so that the holding member and the movable member translationally move together, and a restricting unit configured to restrict the holding member from rotating around the rotating unit as a center by the urging member.

Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.

Provided is a vibration type driving device enabling multidirectional driving of a moving body while considering a difference in transfer characteristics of the synthesized driving force of a plurality of motors between at least two mutually crossing directions.

A multi-degree-of-freedom sample holder, comprising a housing and a rotating shaft, is disclosed. A frame is provided between the housing and the rotating shaft, and the frame is coaxial with the housing and rotating shaft. The present invention has multiple degrees of freedom such as high-precision translational freedom of the sample along the X-axis, Y-axis and Z-axis, and 360° rotation of the sample around the axis, etc. The sample is always aligned with the sample holder shaft during the rotation, and the static electricity accumulated on the sample can be led out.

A six-degree-of-freedom micro vibration suppression platform includes a basic platform, a load platform, six sets of single-degree-of-freedom active and passive composite vibration isolation devices that are exactly the same and a controller. Upper and lower ends of each set of single-degree-of-freedom active and passive composite vibration isolation devices are connected with the load platform and the basic platform, respectively. A control method includes: calculating a logical axis signal, calculating a logical axis control signal, calculating physical axis real-time control signals and a transfer step.

A first driving signal is supplied to a first electrode of a vibrating body. A second driving signal is supplied to a second electrode of the vibrating body. A common driving signal is supplied to a common electrode of the vibrating body. A phase of the first driving signal is set changeable with respect to a phase of the common driving signal. A phase of the second driving signal is set changeable with respect to the phase of the common driving signal. Then, it is possible to switch a driving direction of a piezoelectric motor according to which phase of the first driving signal or the second driving signal is varied from the phase of the common driving signal. If the phase is simply changed, a switch is unnecessary. It is possible to reduce a driving circuit in size.

A lead screw actuator device includes a base configured to support a plurality of actuators. A first bridge is supported by one of the plurality of actuators and a second bridge is supported by another one of the plurality of actuators. A nut is supported by the first bridge and the second bridge and is rotatably coupled to a screw with a sliding contact friction between the screw and the nut. The plurality of actuators generate small movements of the first bridge, the second bridge, and the nut that produce relative rotation between the nut and the screw. A method of making a lead screw actuator device is also disclosed.

A piezoelectric drive unit is configured for driving a passive element relative to an active element, wherein the active element includes a resonator with two arms, each extending in parallel to a reference plane and ending in a contact element, which is movable by oscillating movements of the arms and thereby drives the passive element. A pre-stress element is arranged to exert a relative force between the active element and passive element, pressing them against one another with pre-stress forces that are normal to the reference plane.