A microelectromechanical (MEMS) structure includes a fixed frame internally defining a cavity, and a mobile mass suspended in the cavity and movable with a first resonant rotational mode about a first rotation axis and with a second resonant rotational mode about a second rotation axis orthogonal to the first. A pair of supporting elements extends in the cavity, is rigidly coupled to the fixed frame, and is elastically deformable to cause rotation of the mobile mass about the first rotation axis. A pair of elastic-coupling elements is elastically coupled between the mobile mass and the first pair of supporting elements. Each of the elastic-coupling elements includes a first and second elastic portions, the first elastic portion being compliant to torsion about the second rotation axis. The second elastic portion is compliant to bending outside of a horizontal plane of main extension of the MEMS structure.

A MEMS actuator includes a monolithic body of semiconductor material, with a supporting portion of semiconductor material, orientable with respect to a first and second rotation axes, transverse to each other. A first frame of semiconductor material is coupled to the supporting portion through first deformable elements configured to control a rotation of the supporting portion about the first rotation axis. A second frame of semiconductor material is coupled to the first frame by second deformable elements, which are coupled between the first and the second frames and configured to control a rotation of the supporting portion about the second rotation axis. The first and second deformable elements carry respective piezoelectric actuation elements.

A thin film actuator having transversely oriented structural stiffeners that serve to increase actuation stroke that results from longitudinal curvature. The thin film actuator may be deployed within electromechanical devices such that an actuatable deflection of a tip of the actuator plate produces the actuation stroke. The thin film actuator may include an actuator plate affixed to a substantially rigid frame structure. The actuator plate protrudes along a longitudinal axis away from the frame structure such that the actuator plate is cantilevered from the frame structure by some distance along this longitudinal axis. The thin film actuator includes a piezoelectric film on a surface of the actuator plate. Activation of the piezoelectric film generates tensile stress or compressive stress at the surface, thereby inducing a bending moment that causes the actuator plate to undergo longitudinal curvature and some lesser degree of transverse curvature.

A piezoelectric driving device includes: a driving portion to be brought into frictional contact with an object to be driven, which is moved with respect to a fixed body; and at least two piezoelectric portions, which are formed integrally with the driving portion, are arranged on a predetermined plane with the driving portion being sandwiched between the at least two piezoelectric portions, and are configured to be bent with respect to the predetermined plane when voltages are applied to the at least two piezoelectric portions, wherein outer edges of entirety of the at least two piezoelectric portions are fixed to the fixed body.

The present disclosure relates to a linear drive, including: an actuator unit with at least one actuator; two guide elements and a movement element, wherein the movement element is displaceable along both guide elements by a movement generated by the actuator unit as a result of a stick-slip effect. In order to allow a more accurate displacement of the movement element in a compact design of the linear drive, the movement element can be brought into engagement with each of the two guide elements by static friction in order to be displaced along the two guide elements as a result of the stick-slip effect.

An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

A vibrating actuator includes a vibrator and a contact body. The vibrator includes an elastic body and an electrical-mechanical energy transducer. The contact body is long in a predetermined direction and contacts the vibrator. The vibrator and the contact body are relatively moved in the predetermined direction by vibration of the vibrator. An end portion of the long contact body is covered with a viscoelastic body circumferentially with respect to the predetermined direction.

An optical device includes a first reflector; a second reflector; an elastic support unit supporting the second reflector; a piezoelectric element on the elastic support unit; a light emitter configured to emit light having an oscillation wavelength; and circuitry configured to output a signal to apply drive voltage to the piezoelectric element to elastically deform the elastic support unit. The deformation of the elastic support unit changes a distance between the first reflector and the second reflector to change the oscillation wavelength of the light emitted from the light emitter.

A processor applies a first driving signal having a first driving frequency to a first actuator, applies a second driving signal having a second driving frequency to a second actuator, generates a first angle detection signal by performing first frequency filter processing based on the first driving frequency on an output signal of a first angle detection sensor, generates a second angle detection signal by performing second frequency filter processing based on the second driving frequency on an output signal of a second angle detection sensor, derives a first angle, which is an angle of a mirror portion around a first axis, based on the first angle detection signal, derives a second angle, which is an angle of the mirror portion around a second axis, based on the second angle detection signal, adjusts the first driving signal based on the first angle, and adjusts the second driving signal based on the second angle.

The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.