A displacement magnifying mechanism, polishing device, actuator, electronic component processing apparatus, dispenser, and air valve which can easily control a drive system. The displacement magnifying mechanism includes a base; a piezoelectric element of which an end is attached to a mounting surface of the base, the piezoelectric element extending along a first longitudinal direction; a support member of which an end is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction; an operating portion attached to each of other ends of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction; and a compression member attached to the base and the operating portion so as to compress the piezoelectric element.

An ultrasonic motor is provided with increased torque without an increase in size. The ultrasonic motor includes a stator having a plate-shaped vibrating body including first and second main surfaces and a piezoelectric element on the first main surface; and a rotor in contact with the second main surface. The piezoelectric element is disposed along a circumferential direction of a traveling wave so as to generate the traveling wave circulating around an axial direction Z by vibrating the vibrating body. The piezoelectric element vibrates the vibrating body in a vibration mode including a nodal line extending in the circumferential direction. A mass addition portion is provided along the circumferential direction on at least one of the first and second main surfaces of the vibrating body 3, and the mass addition portion is located outside the nodal line in a direction perpendicular to the axial direction Z.

The invention relates to a piezoelectric motor with bending travelling wave, comprising a rotary shaft (4) connected to a rotor (3), a piezoelectric element (2) attached to a vibrating stator (1), and a decoupling web (5) for attaching the vibrating stator to a mounting (7). The mounting (7) is mechanically connected to a base (9) by means of at least one deformable element (10) and at least one piezoelectric actuator (11), so that the support can be deformed angularly relative to the base in order to rotate the shaft when the vibrating stator is no longer electrically powered. The motor is particularly suitable for applications that require micrometre or nanometre accuracies, for example in positioning tools in industrial processes, precise medical robotics or optical applications.

A vibrator includes an electromechanical transducer which is a piezoelectric ceramic made of sodium-potassium niobate metal oxides and whose temperature characteristics of a relative permittivity is 500 [ppm/° C.] or less in absolute value in a temperature range from −40° C. to 170° C., wherein excitation of the electromechanical transducer produces a vibration wave. Another vibrator includes an electromechanical transducer which is a piezoelectric ceramic made of sodium-potassium niobate metal oxides and whose temperature characteristics of a relative permittivity is 390 [ppm/° C.] or less in absolute value in a temperature range from 0° C. to 60° C., wherein excitation of the electromechanical transducer produces a vibration wave.

The present disclosure provides a rotary motor, which includes: a clamping member having a gripping unit installed at an inner circumference of a rotor to grip the rotor during a predetermined time; and a driving member installed at the inner circumference of the rotor and having a rotation unit configured to make an elastic deformation to rotate by a predetermined angle and then return to an original state so that the rotor is rotated.

The present disclosure provides a rotary motor, which includes: a clamping member having a gripping unit installed at an inner circumference of a rotor to grip the rotor during a predetermined time; and a driving member installed at the inner circumference of the rotor and having a rotation unit configured to make an elastic deformation to rotate by a predetermined angle and then return to an original state so that the rotor is rotated.

A vibration wave motor includes an element configured to be displaced by application of voltage, and an annular elastic body having a bottom surface coming into contact with the element and a drive surface having a groove, configured to drive a moving element by a vibration wave produced on the drive surface by displacement of the element. The element has a density of 4.2 to 6.0×10.sup.3 kg/m.sup.3. A value of [(T/B)÷W] is in a range of 0.84 to 1.94, where T represents a depth of the groove, B represents a distance from a bottom part of the groove to the bottom surface, and W represents a radial width of the elastic body.

A vibration wave motor includes an element configured to be displaced by application of voltage, and an annular elastic body having a bottom surface coming into contact with the element and a drive surface having a groove, configured to drive a moving element by a vibration wave produced on the drive surface by displacement of the element. The element has a density of 4.2 to 6.0×10.sup.3 kg/m.sup.3. A value of [(T/B)÷W] is in a range of 0.84 to 1.94, where T represents a depth of the groove, B represents a distance from a bottom part of the groove to the bottom surface, and W represents a radial width of the elastic body.

A vibration actuator is capable of reducing differences in vibration phase and vibration amplitude without raising a voltage of a drive circuit when driving a contact member using a plurality of vibrators connected in series. The vibration actuator includes a vibrator device and a contact member that moves relative to the vibrator device. The vibrator device includes transformers of which primary coils are connected in series, and vibrators that are respectively connected in parallel to secondary coils of the transformers.

A displacement magnifying device includes a diaphragm structure including a substrate and a diaphragm provided separately from the substrate, actuators provided side by side with the diaphragm structure, and a first member including displacing sections coupled to both ends of the actuators and displaced according to displacement of the actuators. The displacing sections are coupled to the diaphragm of the diaphragm structure.