An electronic timepiece enables driving by appropriate drive conditions even when the load on a motor changes. The electronic timepiece includes a motor having a coil; a driver that is controlled to an on state supplying drive current to the coil, and an off state not supplying the drive current; a driver controller configured to control the driver to the on state or the off state based on a control parameter and current value through the coil; and a control parameter setter configured to maintain or change the control parameter based on the on state or the off state control state of the driver controller.

An electronic timepiece enables driving by appropriate drive conditions even when the load on a motor changes. The electronic timepiece includes a motor having a coil; a driver that is controlled to an on state supplying drive current to the coil, and an off state not supplying the drive current; a driver controller configured to control the driver to the on state or the off state based on a control parameter and current value through the coil; and a control parameter setter configured to maintain or change the control parameter based on the on state or the off state control state of the driver controller.

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

An electronic timepiece enables driving by appropriate drive conditions even when the load on a motor changes. The electronic timepiece includes a motor having a coil; a driver that is controlled to an on state supplying drive current to the coil, and an off state not supplying the drive current; a driver controller configured to control the driver to the on state or the off state based on a control parameter and current value through the coil; and a control parameter setter configured to maintain or change the control parameter based on the on state or the off state control state of the driver controller.

An electronic timepiece enables driving by appropriate drive conditions even when the load on a motor changes. The electronic timepiece includes a motor having a coil; a driver that is controlled to an on state supplying drive current to the coil, and an off state not supplying the drive current; a driver controller configured to control the driver to the on state or the off state based on a control parameter and current value through the coil; and a control parameter setter configured to maintain or change the control parameter based on the on state or the off state control state of the driver controller.

A driving device for a stepping motor includes a motor driving circuit configured to generate a current waveform representing an electrical angle in synchronization with a mechanical angle of the stepping motor, and excite the stepping motor using the current waveform; a memory configured to store a value of the electrical angle; and a controller configured to: when a power supply to the stepping motor and the motor driving circuit is stopped, store a first value of the electrical angle held by the motor driving circuit in the memory; and when the power supply is resumed, replace a value of the electrical angle of the motor driving circuit with the first value while suppressing a rotational operation of the stepping motor.

A driving device for a stepping motor includes a motor driving circuit configured to generate a current waveform representing an electrical angle in synchronization with a mechanical angle of the stepping motor, and excite the stepping motor using the current waveform; a memory configured to store a value of the electrical angle; and a controller configured to: when a power supply to the stepping motor and the motor driving circuit is stopped, store a first value of the electrical angle held by the motor driving circuit in the memory; and when the power supply is resumed, replace a value of the electrical angle of the motor driving circuit with the first value while suppressing a rotational operation of the stepping motor.

A driving device for a stepping motor includes a motor driving circuit configured to generate a current waveform representing an electrical angle in synchronization with a mechanical angle of the stepping motor, and excite the stepping motor using the current waveform; a memory configured to store a value of the electrical angle; and a controller configured to: when a power supply to the stepping motor and the motor driving circuit is stopped, store a first value of the electrical angle held by the motor driving circuit in the memory; and when the power supply is resumed, replace a value of the electrical angle of the motor driving circuit with the first value while suppressing a rotational operation of the stepping motor.