A luminaire is provided that includes a head, a movement system, and a control system. The movement system rotates the luminaire head around an axis of rotation. The movement system includes a motor and a braking system. The motor moves a luminaire mechanism. The luminaire mechanism may be a gobo wheel, a lens, or other optical device of the luminaire, or it may be the luminaire head or the luminaire yoke. The control system determines whether the motor is rotating and engages the braking system when the motor is not rotating. When the motor is stopped, the control system may store in non-volatile memory a current absolute position of the luminaire mechanism.

Provided is a drive circuit for a two-coil stepper motor, including a rotor that is magnetized to an N-pole and an S-pole, first, second, and third stator magnetic-pole portions, a coil A, and a coil B. The drive circuit includes a drive pulse generation circuit configured to output a drive pulse (SP) for driving the coil A and the coil B, a detection pulse generation circuit configured to output a detection pulse (CP) to the coil A and the coil B in order to detect counter-electromotive currents generated in the coil A and the coil B along with a movement of the rotor after the rotor is driven based on the drive pulse, and a detection circuit configured to receive a detection signal (CS) generated based on the detection pulse as input, to thereby detect the movement of the rotor. At least one of the detection pulse to the coil A or the detection pulse to the coil B is output.

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

Provided is a control system of an industrial machine that can automatically detect the presence or absence of a wiring error at a start-up of a machine, and that prevents a dangerous operation such as high rotation/high torque of a motor from occurring due to a wiring error. A control system of an industrial machine includes: a control unit that controls driving of a drive unit of the industrial machine; a command unit that issues a command to the control unit; and a wiring error detection device that detects a wiring error in a system of the control unit and the drive unit on a basis of a feedback value of actual driving of the drive unit upon a start-up of the industrial machine.

A particle beam apparatus and/or a light microscope is operated. A first temperature of an object may be changed, where the object may be arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object may alter a second temperature of the object-receiving device from a first temperature value to a second temperature value. The supply current of the motor may be changed from a first current value to a second current value, where the supply current is designed to hold the object-receiving device in position, and a temperature of the object-receiving device may be changed from the second temperature value to a third temperature value on account of heat generated by the motor, which may be obtained by the second current value of the supply current and fed to the object receiving device.

A control device for a stepping motor capable of hold control that can smoothly reduce an excitation current at a rotation stopping time of the stepping motor is provided. A control device (10) for a stepping motor (20) causes an excitation current to flow in a plurality of coils to rotate a rotor. The control device (10) includes a driving circuit (40) that applies a driving voltage to the coils, and a control circuit (30) that controls the driving voltage. The control circuit (30) performs hold control to move the rotor to a predetermined stop position by changing a magnitude of the excitation current flowing in the coils so that the magnitude of the excitation current becomes close to a target current value that gradually decreases, in a hold time period at a rotation stopping time of the stepping motor (20). The control circuit (30) sets an operation mode of the driving circuit (40) at an operation mode corresponding to a comparison result of the magnitude of the excitation current and the target current value, of a plurality of operation modes, at each predetermined period in the hold time period. The plurality of operation modes include a charge mode to increase the excitation current and a first attenuation mode to attenuate the excitation current.

A control device for a stepping motor capable of hold control that can smoothly reduce an excitation current at a rotation stopping time of the stepping motor is provided. A control device (10) for a stepping motor (20) causes an excitation current to flow in a plurality of coils to rotate a rotor. The control device (10) includes a driving circuit (40) that applies a driving voltage to the coils, and a control circuit (30) that controls the driving voltage. The control circuit (30) performs hold control to move the rotor to a predetermined stop position by changing a magnitude of the excitation current flowing in the coils so that the magnitude of the excitation current becomes close to a target current value that gradually decreases, in a hold time period at a rotation stopping time of the stepping motor (20). The control circuit (30) sets an operation mode of the driving circuit (40) at an operation mode corresponding to a comparison result of the magnitude of the excitation current and the target current value, of a plurality of operation modes, at each predetermined period in the hold time period. The plurality of operation modes include a charge mode to increase the excitation current and a first attenuation mode to attenuate the excitation current.

A control apparatus controls the operation of a stepping motor. The output unit operates a motor in a stopped state at a first driving frequency and switches to a second driving frequency at a stable point. The first driving frequency is a frequency lower than a resonance frequency range of the motor, and the second driving frequency is a frequency higher than the resonance frequency range of the motor.

A control device for a stepping motor capable of hold control that can smoothly reduce an excitation current at a rotation stopping time of the stepping motor is provided. A control device (10) for a stepping motor (20) causes an excitation current to flow in a plurality of coils to rotate a rotor. The control device (10) includes a driving circuit (40) that applies a driving voltage to the coils, and a control circuit (30) that controls the driving voltage. The control circuit (30) performs hold control to move the rotor to a predetermined stop position by changing a magnitude of the excitation current flowing in the coils so that the magnitude of the excitation current becomes close to a target current value that gradually decreases, in a hold time period at a rotation stopping time of the stepping motor (20). The control circuit (30) sets an operation mode of the driving circuit (40) at an operation mode corresponding to a comparison result of the magnitude of the excitation current and the target current value, of a plurality of operation modes, at each predetermined period in the hold time period. The plurality of operation modes include a charge mode to increase the excitation current and a first attenuation mode to attenuate the excitation current.