A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

An amplifier circuit for a millimeter wave (mmW) communication system includes an amplifier coupled to a matching network, and a variable gain control circuit in the matching network, the variable gain control circuit having an adjustable gain control resistance, the adjustable gain control resistance having adjustable segments and a center node therebetween, the center node coupled to an alternating current (AC) ground.

An amplifier circuit for a millimeter wave (mmW) communication system includes an amplifier coupled to a matching network, and a variable gain control circuit in the matching network, the variable gain control circuit having an adjustable gain control resistance, the adjustable gain control resistance having adjustable segments and a center node therebetween, the center node coupled to an alternating current (AC) ground.

A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

Systems, methods, and apparatus for reducing crossover coupling of two or more RF signals are described. In one case, a crossover structure is described where RF signals are routed through coplanar waveguides having a specific characteristic impedance and crossing at a central point of the crossover structure by way of a bridge. A ground shield having a geometry adapted to reduce the crossover coupling while minimally affecting capacitive coupling between the RF signals and the ground shield is introduced in-between a region comprising the central point. Further described is a multi-port rotary RF switch fitted with the crossover structure which allows substantially balanced electrical performance across all the operational states of the rotary RF switch at RF signal frequencies up to 40 GHz and beyond.

Apparatus and arrangements for reducing crossover coupling of two or more RF signals are described. In one case, a crossover structure is described where RF signals are routed through coplanar waveguides having a specific characteristic impedance and crossing at a central point of the crossover structure by way of a bridge. Further described is a multi-port rotary RF switch fitted with the crossover structure which allows substantially balanced electrical performance across all the operational states of the rotary RF switch at RF signal frequencies up to 50 GHz and beyond. A controller unit coupled to the RF switch can support a control interface to configure the rotary switch according to all possible distinct states of the rotary switch, or a subset thereof.

A biased impedance circuit, an impedance adjustment circuit, and an associated signal generator are provided. The biased impedance circuit is coupled to a summation node and applies a biased impedance to the summation node. A periodic input signal is received at the summation node. The biased impedance circuit includes a switching circuit for receiving an output window signal, wherein a period of the output window signal is shorter than a period of the periodic input signal. The switching circuit includes a low impedance path and a high impedance path. The low impedance sets the biased impedance to a first impedance when the output window signal is at a first voltage level. The high impedance path sets the biased impedance to a second impedance when the output window signal is at a second voltage level. The first impedance is less than the second impedance.

A biased impedance circuit, an impedance adjustment circuit, and an associated signal generator are provided. The biased impedance circuit is coupled to a summation node and applies a biased impedance to the summation node. A periodic input signal is received at the summation node. The biased impedance circuit includes a switching circuit for receiving an output window signal, wherein a period of the output window signal is shorter than a period of the periodic input signal. The switching circuit includes a low impedance path and a high impedance path. The low impedance sets the biased impedance to a first impedance when the output window signal is at a first voltage level. The high impedance path sets the biased impedance to a second impedance when the output window signal is at a second voltage level. The first impedance is less than the second impedance.