H03H2003/0492

VIBRATOR ELEMENT, VIBRATOR DEVICE, AND METHOD OF MANUFACTURING VIBRATOR ELEMENT
20220407499 · 2022-12-22 ·

A vibrating arm of a vibrator element has a first surface, a second surface at an opposite side to the first surface in a Z direction, a first side surface and a second side surface as side surfaces, and a third side surface as a tip surface. At least one of the first side surface, the second side surface, and the third side surface includes a first side surface part tilted with respect to a Z direction, and a second side surface part tilted toward the first surface or the second surface with respect to the first side surface part. The first weight is arranged so that an outer edge of the first weight is located at inner side of innermost parts in the first side surface part and the second side surface part, or at the same position as the innermost parts when viewed from the Z direction.

Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Vibration Element, Physical Quantity Sensor, Inertial Measurement Unit, Electronic Apparatus, And Vehicle

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Tuning fork-type vibrator and manufacturing method for the same
11621696 · 2023-04-04 · ·

A tuning fork-type vibration piece is provided, in which a cushioning portion is formed on the base of a package and allowed to contact parts for contact of arm portions which are any parts but their edges, and the parts for contact of the arm portions that contact the cushioning portion are electrodeless regions, which prevents the risk of frequency fluctuations caused by any electrode being chipped off by contact with the cushioning portion.

Vibration Element, Manufacturing Method of Vibration Element, Physical Quantity Sensor, Inertial Measurement Device, Electronic Apparatus, And Vehicle

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Small piezoelectric resonator
11146239 · 2021-10-12 · ·

The invention relates to a piezoelectric resonator, which comprises a base and at least two vibrating arms (3) extending from the base, at least two grooves (4a, 4b) being formed opposite each other on part of the length of the arms and on upper and lower faces of the arms. The depth of the groove on the upper face is less than 30% of the total thickness of each arm and the depth of the groove on the lower face is more than 50% of the total thickness of each arm, or reversely.

Vibration Element, Manufacturing Method Of Vibration Element, Physical Quantity Sensor, Inertial Measurement Device, Electronic Apparatus, And Vehicle

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Frequency adjustment method for piezoelectric resonator device
11075611 · 2021-07-27 · ·

An object is to provide a frequency adjustment method for a piezoelectric resonator device that is applicable to a microminiaturized device and that can adjust the frequency without deteriorating the accuracy of frequency adjustment. A frequency adjustment method for a tuning-fork quartz resonator is applicable to a tuning-fork quartz resonator that includes a tuning-fork quartz resonator piece having a pair of resonator arms 31, 32 and metallic adjustment films W formed on the resonator arms. The frequency adjustment method adjusts the frequency by reduction of a mass of the metallic adjustment films W. The frequency adjustment method includes: a rough adjustment step for roughly adjusting the frequency by partially thinning or removing the metallic adjustment films W; and a fine adjustment step for finely adjusting the frequency by at least partially thinning or removing products W1, W2 derived from the metallic adjustment film W during the rough adjustment step.

VIBRATOR ELEMENT, VIBRATOR DEVICE, AND METHOD OF MANUFACTURING VIBRATOR ELEMENT
20210265973 · 2021-08-26 ·

The vibrator element includes at least one vibrating arm, and a weight provided to the vibrating arm, the weight is provided with at least one processing scar, when an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is a centroid axis, the processing scar is formed in at least an area at the centroid axis side with respect to the central axis, and S1>S2 an area of the processing scar located at the centroid axis side with respect to the central axis is S1, and an area of the processing scar located at an opposite side to the centroid axis with respect to the central axis is S2.

VIBRATOR ELEMENT, VIBRATOR DEVICE, AND METHOD OF MANUFACTURING VIBRATOR ELEMENT
20210265975 · 2021-08-26 ·

The vibrator element includes a vibrating arm provided with an arm part, and a weight part which has a weight, the weight is provided with at least one processing scar, when an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is a centroid axis, the processing scar is formed in at least an area at an opposite side to the centroid axis, and S1<S2 an area of the processing scar located at the centroid axis side with respect to the central axis is S1, and an area of the processing scar located at an opposite side to the centroid axis with respect to the central axis is S2.