H
ELECTRICITY
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H03
ELECTRONIC CIRCUITRY
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H03H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
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9/00
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
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H03H9/15
Constructional features of resonators consisting of piezoelectric or electrostrictive material
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H03H9/17
having a single resonator
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H03H9/171
implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
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H03H9/172
Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
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H03H9/175
Acoustic mirrors
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