H03K3/80

Radio frequency generator including pulse generator circuit to provide complex RF pulse pattern
11705305 · 2023-07-18 · ·

A radio frequency (RF) generator includes a pulse generator circuit configured to receive input signals indicative of a pulse pattern comprising pulse segments, the input signals defining power levels and durations for the pulse segments. The pulse generator circuit generates a pulse modulation control signal for each pulse segment responsive to the input signals. The pulse modulation control signal is coupled to adjust an amplitude and to modulate an RF source signal to generate the pulse RF signal having an envelope defined by the pulse segments of the pulse pattern.

Comb signal generator and method of providing a phase and amplitude reference

A comb signal generator that includes at least two signal sources that each provide a signal, wherein the signals provided by the at least two signal sources are shaped similarly. The com signal generator also has a combining circuit connected with the at least two signal sources, wherein the combining circuit is configured to combine the signals provided by the at least two signal sources, thereby generating a combined signal. Further, the com signal generator includes a clipping circuit connected with the combining circuit, wherein the clipping circuit is configured to receive and process the combined signal, thereby generating a comb signal. Further, a method of providing a phase and amplitude reference is described.

Comb signal generator and method of providing a phase and amplitude reference

A comb signal generator that includes at least two signal sources that each provide a signal, wherein the signals provided by the at least two signal sources are shaped similarly. The com signal generator also has a combining circuit connected with the at least two signal sources, wherein the combining circuit is configured to combine the signals provided by the at least two signal sources, thereby generating a combined signal. Further, the com signal generator includes a clipping circuit connected with the combining circuit, wherein the clipping circuit is configured to receive and process the combined signal, thereby generating a comb signal. Further, a method of providing a phase and amplitude reference is described.

GYROMAGNETIC NONLINEAR TRANSMISSION LINE FOR RADIO FREQUENCY SIGNAL GENERATION AND PULSE COMPRESSION

Disclosed are non-linear transmission lines using ferromagnetic materials to generate ferromagnetic resonance oscillations. In one aspect, a non-linear transmission line apparatus is disclosed. The apparatus includes an outer conductor having a first side and a second internally facing side, and an inner conductor positioned internal to the non-linear transmission line apparatus. The apparatus further includes a ferromagnetic material surrounding the inner conductor, wherein the ferromagnetic material comprises nanoparticles of an ε-polymorph of iron oxide expressed as ε—Fe.sub.2O.sub.3. The apparatus also includes a first dielectric material positioned between the outer conductor and the inner conductor, the dielectric material in contact with both the ferromagnetic material and with the second internally facing side of the outer conductor, wherein the outer conductor, the inner conductor, the dielectric material and the ferromagnetic material form the nonlinear transmission line.

RF pulsing within pulsing for semiconductor RF plasma processing

A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.

Radio frequency generator providing complex RF pulse pattern
11328902 · 2022-05-10 · ·

A radio frequency (RF) generator includes a pulse generator circuit configured to receive input signals indicative of a pulse pattern defining an envelope of a pulse RF signal. The pulse generator circuit stores data values defining power levels and durations of segments of the pulse pattern. The pulse generator generates a pulse modulation control signal responsive to the stored data values, the pulse modulation control signal being indicative of the power level and the duration of each segment of the pulse pattern, the pulse modulation control signal being provided to a control circuit to generate a control signal to adjust the amplitude and to modulate the duration or width of the RF signal to generate the pulse RF signal having the pulse pattern.

RF pulsing within pulsing for semiconductor RF plasma processing

A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.

RADIO FREQUENCY GENERATOR INCLUDING PULSE GENERATOR CIRCUIT TO PROVIDE COMPLEX RF PULSE PATTERN
20220399187 · 2022-12-15 ·

A radio frequency (RF) generator includes a pulse generator circuit configured to receive input signals indicative of a pulse pattern comprising pulse segments, the input signals defining power levels and durations for the pulse segments. The pulse generator circuit generates a pulse modulation control signal for each pulse segment responsive to the input signals. The pulse modulation control signal is coupled to adjust an amplitude and to modulate an RF source signal to generate the pulse RF signal having an envelope defined by the pulse segments of the pulse pattern.

RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
20230360883 · 2023-11-09 ·

A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.

RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
20220254608 · 2022-08-11 ·

A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.