Projection systems and components thereof are described that are well suited to miniaturization. These systems and components may use one or more of the following features: a folded optical path, as in a reflective cavity or a beamsplitter; an illumination beam that is converging at the place where it impinges upon the spatial light modulator; a beamsplitter that uses opposed prisms of substantially different sizes; a beamsplitter whose obliquely disposed partial reflector defines a first rectangular reference space, and where at least a portion of the light source or at least a portion of the projector lens is disposed within such first rectangular reference space; a system in which a ratio of areas of the first rectangular reference space and a second rectangular reference space is within a specified range, where the second rectangular reference space is just large enough to encompass the optical components of the projector; a system in which the projector lens is small compared to the spatial light modulator.

The invention relates to an optical device (1) for enhancing the resolution of an image, comprising: a transparent plate member (10) configured for refracting a light beam (20) passing through the plate member (10), which light beam (20) projects an image comprised of rows and columns of pixels (40), a carrier (50) to which said transparent plate member (10) is rigidly mounted, wherein the carrier (50) is configured to be tilted between a first and a second position about a first axis (A), such that the plate member (10) is tilted between the first and the second position about the first axis (A), whereby said projected image (30) is shifted by a fraction (ΔP) of a pixel, particularly by a half of a pixel, along a first direction (x), and an actuator means (60) that is configured to tilt the carrier (50) and therewith the plate member (10) between the first and the second position about the first axis (A).

In one example, a method comprises forming a first layer on a substrate surface, forming an opening in the first layer, forming a second layer on the first layer and in the opening, and forming a photoresist layer on the second layer, in which the photoresist layer has a first curved surface over a first part of the first layer and over the opening. The method further comprises etching the photoresist layer and a second part of the second layer over the first part of the first layer to form a second curved surface on the second part of the second layer, and forming a mirror element and a support structure in the second layer, including by etching a third part of the second layer and removing the first layer.

Projection systems and components thereof are described that are well suited to miniaturization. These systems and components may use one or more of the following features: a folded optical path, as in a reflective cavity or a beamsplitter; an illumination beam that is converging at the place where it impinges upon the spatial light modulator; a beamsplitter that uses opposed prisms of substantially different sizes; a beamsplitter whose obliquely disposed partial reflector defines a first rectangular reference space, and where at least a portion of the light source or at least a portion of the projector lens is disposed within such first rectangular reference space; a system in which a ratio of areas of the first rectangular reference space and a second rectangular reference space is within a specified range, where the second rectangular reference space is just large enough to encompass the optical components of the projector; a system in which the projector lens is small compared to the spatial light modulator.

An electro-optical device includes a mirror being positioned above a surface of a substrate and modulating light, and a torsion hinge being positioned between the mirror and the substrate and pivotably supporting the mirror. The electro-optical device includes beam portions being disposed between the mirror and the substrate at positions that do not overlap the mirror in plan view, and being supported by the substrate while being spaced away from the mirror and the substrate. Spring tips that regulate a pivot range of the mirror protrude from the beam portions toward positions that overlap the mirror in plan view.

One or more excitation energy sources emit light in an excitation spectrum and direct the emitted light as an excitation beam to the emitting surface of a wavelength conversion element directly or via reflection. Distinct areas of the emitting surface are coated with one or more distinct fluorescent phosphors. The phosphor-coated areas receive the excitation beam and generate a sequence of fluoresced light beams at a light output, each fluoresced beam of a narrow spectrum determined by the type of phosphor and the excitation spectrum. The fluoresced beams travel parallel to an emitting axis at a non-zero angle to axes associated with the excitation beams.

An electro-optical device includes a mirror being positioned above a surface of a substrate and modulating light, a torsion hinge being positioned between the mirror and the substrate, and supporting the mirror via a mirror support post such that the mirror is pivotable about an axis, and address electrodes being positioned between the mirror and the substrate, and supplying electrostatic forces between the address electrodes and the mirror. Each of the address electrodes includes a first address electrode that is positioned on a side of the axis in plan view, and a second address electrode that is positioned on the opposite side of the axis with respect to the first address electrode in plan view. The first address electrode and the second address electrode are driven independently of each other.

An electrooptical device includes a first metal layer disposed spaced apart from a first surface of a substrate and including a mirror, which modulates light, and a mirror support post, which has a tubular shape and protrudes from the mirror toward the substrate. The first metal layer is formed by forming a metal layer on a surface of a sacrificial layer having an opening, patterning the metal layer, and removing the sacrificial layer. Thus, the mirror support post is formed so as to extend over the inner wall of the opening. Here, the mirror support post has a thickness of not less than 1.5 times the length of the mirror support post.

Dual or multi-modulation display systems comprising a first modulator and a second modulator are disclosed. The first modulator may comprise a plurality of analog mirrors (e.g. MEMS array) and the second modulator may comprise a plurality of mirrors (e.g., DMD array). The display system may further comprise a controller that sends control signals to the first and second modulator. The display system may render highlight features within a projected image by affecting a time multiplexing scheme. In one embodiment, the first modulator may be switched on a sub-frame basis such that a desired proportion of the available light may be focused or directed onto the second modulator to form the highlight feature on a sub-frame rendering basis.

An image input/output apparatus and method includes a light source in optical communication with a spatial radiation modulator for projecting an output image and an image sensor for capturing an input image along a shared input/output path. In a described embodiment, the display of an output image and the capture of an input image is effected using a common spatial radiation modulator (SRM) in the form of a deformable mirror device (DMD).