H ELECTRICITY
H05 ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05B ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
3/00 Ohmic-resistance heating
H05B3/10 Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
H05B3/12 characterised by the composition or nature of the conductive material
H05B3/14 the material being non-metallic
H05B3/141 Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
H05B3/143 applied to semiconductors, e.g. wafers heating