Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.

Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.

A two-dimensional magneto-optical trap (2D GMOT) that is configured to produce a cold-atom beam exiting the 2D GMOT is disclosed. In embodiments, the 2D GMOT is configured to feed a three-dimensional GMOT with the cold atom beam. In embodiments, the 2D GMOT includes an input light beam having its direction along a first axis, its width along a second axis, normal to the first axis, and a substantially flat input light beam intensity profile. 2D GMOT may further includes a quadrupole magnetic field with its magnitude being zero along a third axis that is centered at the center of the input light beam's width. The 2D GMOT may also include a diffraction-grating surface positioned normal to the first axis, composed of closely adjacent parallel grooves spread across the width and run parallel to the third axis.

A two-dimensional magneto-optical trap (2D GMOT) that is configured to produce a cold-atom beam exiting the 2D GMOT is disclosed. In embodiments, the 2D GMOT is configured to feed a three-dimensional GMOT with the cold atom beam. In embodiments, the 2D GMOT includes an input light beam having its direction along a first axis, its width along a second axis, normal to the first axis, and a substantially flat input light beam intensity profile. 2D GMOT may further includes a quadrupole magnetic field with its magnitude being zero along a third axis that is centered at the center of the input light beam's width. The 2D GMOT may also include a diffraction-grating surface positioned normal to the first axis, composed of closely adjacent parallel grooves spread across the width and run parallel to the third axis.

An atom interferometer that utilizes two counterpropagating continuous 3D-cooled atom beams which are directed into a vacuum chamber. Momentum-transfer laser (MTL) beams are directed into the atom beams to produce a predetermined recoil and subsequently generate an interference signal that is read by a photodetector and analyzed by a processor to provide information regarding inertial forces such as acceleration and rotation rate. Reversal of the recoil direction of the MTL beams allows for the suppression of errors in the measurement of the inertial forces.

An atom interferometer that utilizes two counterpropagating continuous 3D-cooled atom beams which are directed into a vacuum chamber. Momentum-transfer laser (MTL) beams are directed into the atom beams to produce a predetermined recoil and subsequently generate an interference signal that is read by a photodetector and analyzed by a processor to provide information regarding inertial forces such as acceleration and rotation rate. Reversal of the recoil direction of the MTL beams allows for the suppression of errors in the measurement of the inertial forces.

An ion throughput pump (ITP) includes a pump inlet configured to communicate with a vacuum chamber; an ionization source fluidly communicating with the vacuum chamber via the pump inlet and configured for ionizing gas species received from the vacuum chamber; a pump outlet; ion optics configured for accelerating ions produced by the ionization source toward the pump outlet; and a roughing pump stage configured for receiving the ions from the ionization source, producing neutral species from the ions, and pumping the neutral species through the pump outlet.

An ion throughput pump (ITP) includes a pump inlet configured to communicate with a vacuum chamber; an ionization source fluidly communicating with the vacuum chamber via the pump inlet and configured for ionizing gas species received from the vacuum chamber; a pump outlet; ion optics configured for accelerating ions produced by the ionization source toward the pump outlet; and a roughing pump stage configured for receiving the ions from the ionization source, producing neutral species from the ions, and pumping the neutral species through the pump outlet.

The present invention designs an elementary element which operates by low-energy particles less susceptible to influence on an S/N ratio by the particles pseudo-one-dimensionally conducting throw a particle movement portion of particles including electromagnetic waves, electrons, holes, atoms, and molecules between emission and absorption sources of the particles. The present invention designs an elementary element which comprises a modification portion for allowing the particle movement portion coming and going of particles between another elementary element and the elementary element, an interaction, a chemical reaction, and the like between these particles, and time dependent mechanical/electromagnetic force, and controls the emission/absorption of low-energy particles less susceptible to the influence of atomic/molecular species of a constituent material of the particle movement portion, the stereo structure or lattice thereof, the disorders thereof, or the heat of the elementary element thereof on the S/N ratio, and a device constructed from a plurality of elementary elements, which enables much better readiness of a catalytic action not only to control electrons and holes of a transistor and the oxidation-reduction reaction of a fuel cell but also to control the input/output of neutral or ionized atoms than conventional catalysts, tolerance to external field noise including external radiation, and a reduction in energy consumption required to operate the transistor and the like at low temperatures. A device, a module, and a system are constructed from elements including the elementary elements and others.

The present invention designs an elementary element which operates by low-energy particles less susceptible to influence on an S/N ratio by the particles pseudo-one-dimensionally conducting throw a particle movement portion of particles including electromagnetic waves, electrons, holes, atoms, and molecules between emission and absorption sources of the particles. The present invention designs an elementary element which comprises a modification portion for allowing the particle movement portion coming and going of particles between another elementary element and the elementary element, an interaction, a chemical reaction, and the like between these particles, and time dependent mechanical/electromagnetic force, and controls the emission/absorption of low-energy particles less susceptible to the influence of atomic/molecular species of a constituent material of the particle movement portion, the stereo structure or lattice thereof, the disorders thereof, or the heat of the elementary element thereof on the S/N ratio, and a device constructed from a plurality of elementary elements, which enables much better readiness of a catalytic action not only to control electrons and holes of a transistor and the oxidation-reduction reaction of a fuel cell but also to control the input/output of neutral or ionized atoms than conventional catalysts, tolerance to external field noise including external radiation, and a reduction in energy consumption required to operate the transistor and the like at low temperatures. A device, a module, and a system are constructed from elements including the elementary elements and others.