H10B20/60

Method of forming an array boundary structure to reduce dishing

A semiconductor structure including a semiconductor substrate and at least one patterned dielectric layer is provided. The semiconductor substrate includes a semiconductor portion, at least one first device, at least one second device and at least one first dummy ring. The at least one first device is disposed on a first region surrounded by the semiconductor portion. The at least one second device and the at least one first dummy ring are disposed on a second region, and the second region surrounds the first region. The at least one patterned dielectric layer covers the semiconductor substrate.

NON-VOLATILE MEMORY DEVICE INCLUDING PASS TRANSISTOR

A non-volatile memory device comprises a memory cell region including a plurality of cell transistors, a first-type semiconductor substrate including a peripheral circuit region including circuits configured to control the plurality of cell transistors, and a plurality of pass transistors on the peripheral circuit region of the semiconductor substrate, wherein the peripheral circuit region includes a first region and a second region which are doped to a depth at an upper portion of the semiconductor substrate while being insulated from each other by an implant region, wherein the first region is a second type different from the first type, and includes a first doped region, and a first well region beneath the first doped region and configured to have a higher doping concentration than the first doped region, wherein the second region is the first type, and includes a second doped region, and a second well region beneath the second doped region and configured to have a higher doping concentration than the second doped region, wherein a first pass transistor on the first region from among the plurality of pass transistors is connected to a string selection line or a ground selection transistor, wherein a second pass transistor on the second region from among the plurality of pass transistors is connected to a word line, wherein a positive voltage or a negative voltage is configured to be applied to the second well region during operation of the second pass transistor.

Semiconductor device including contact structure and method of manufacturing semiconductor device
11508740 · 2022-11-22 · ·

A semiconductor device may include a plurality of first contact structures, plug-shaped second contact structures configured to be connected to a first number of the plurality of first contact structures, respectively, a slit-shaped second contact structure configured to be connected to a second number of the plurality of first contact structures, adjacent in a first direction, and a third contact structure configured to be connected to sidewalls of the plug-shaped second contact structures, adjacent in the first direction.

SEMICONDUCTOR MEMORY DEVICES WITH DIFFERENT DOPING TYPES

A semiconductor device includes first nanostructures vertically separated from one another, a first gate structure wrapping around each of the first nanostructures, and second nanostructures vertically separated from one another. The semiconductor device also includes a second gate structure wrapping around the second nanostructures, a first drain/source structure coupled to a first end of the first nanostructures, a second drain/source structure coupled to both of a second end of the first nanostructures and a first end of the second nanostructures, and a third drain/source structure coupled to a second end of the second nanostructures. The first drain/source structure has a first doping type, the second and third drain/source structures have a second doping type, and the first doping type is opposite to the second doping type.

SEMICONDUCTOR MEMORY DEVICES WITH DIELECTRIC FIN STRUCTURES

A semiconductor device includes a plurality of first nanostructures extending along a first lateral direction. The semiconductor device includes a plurality of second nanostructures extending along the first lateral direction. The semiconductor device includes a dielectric fin structure disposed immediately next to a first sidewall of each of the plurality of first nanostructures along a second lateral direction perpendicular to the first lateral direction. The semiconductor device includes a first gate structure wrapping around each of the plurality of first nanostructures except for the first sidewalls. The semiconductor device includes a second gate structure straddling the plurality of second nanostructures.

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
20230045057 · 2023-02-09 · ·

A semiconductor device may include a plurality of first contact structures, plug-shaped second contact structures configured to be connected to a first number of the plurality of first contact structures, respectively, a slit-shaped second contact structure configured to be connected to a second number of the plurality of first contact structures, adjacent in a first direction, and a third contact structure configured to be connected to sidewalls of the plug-shaped second contact structures, adjacent in the first direction.

CAPACITORS HAVING VERTICAL CONTACTS EXTENDING THROUGH CONDUCTIVE TIERS
20230031083 · 2023-02-02 ·

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes conductive materials located in different levels of the apparatus, dielectric materials located in different levels of the apparatus, a first conductive contact, and a second conductive contact. One of the conductive materials is between two of the dielectric materials. One of the dielectric materials is between two of the conductive materials. The first conductive contact has a length extending through the conductive materials and the dielectric materials in a direction perpendicular to the levels of the apparatus. The first conductive contact is electrically separated from the conductive materials. The second conductive contact contacts a group of conductive materials of the conductive materials.

Capacitors having vertical contacts extending through conductive tiers
11489038 · 2022-11-01 · ·

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes conductive materials located in different levels of the apparatus, dielectric materials located in different levels of the apparatus, a first conductive contact, and a second conductive contact. One of the conductive materials is between two of the dielectric materials. One of the dielectric materials is between two of the conductive materials. The first conductive contact has a length extending through the conductive materials and the dielectric materials in a direction perpendicular to the levels of the apparatus. The first conductive contact is electrically separated from the conductive materials. The second conductive contact contacts a group of conductive materials of the conductive materials.

Method of cointegrating semiconductor structures for different voltage transistors
11488954 · 2022-11-01 · ·

The disclosed technology relates generally to semiconductor devices and manufacturing methods thereof, and more particularly to field-effect transistors operating at different voltages and methods for integrating the same. In one aspect, a method of fabricating a semiconductor device comprises: a) providing a substrate and a first hardmask; b) next, providing a second hardmask over a first region of the first hardmask; c) next, forming a first set of hardmask fins in a second region of the first hardmask; d) next, masking the second region; e) next, providing a set of photoresist fins on the second hardmask; f) next, patterning the second hardmask and the first region by using the photoresist fins as a mask; g) next, forming a first set of semiconductor fins of a first height by etching the substrate; h) next, removing the mask provided in step d; i) next, forming a second set of semiconductor fins of a second height in the second region and extending the height of the first set of semiconductor fins to a third height in the first region, by etching the substrate by using the first and second sets of hardmask fins as masks.

Super CMOS devices on a microelectronics system
11658178 · 2023-05-23 · ·

A low cost IC solution is disclosed to provide Super CMOS microelectronics macros. Hereinafter, the Super CMOS or Schottky CMOS all refer to SCMOS. The SCMOS device solutions with a niche circuit element, the complementary low threshold Schottky barrier diode pairs (SBD) made by selected metal barrier contacts (Co/Ti) to P— and N—Si beds of the CMOS transistors. A DTL like new circuit topology and designed wide contents of broad product libraries, which used the integrated SBD and transistors (BJT, CMOS, and Flash versions) as basic components. The macros include diodes that are selectively attached to the diffusion bed of the transistors, configuring them to form generic logic gates, memory cores, and analog functional blocks from simple to the complicated, from discrete components to all grades of VLSI chips. Solar photon voltaic electricity conversion and bio-lab-on-a-chip are two newly extended fields of the SCMOS IC applications.