H ELECTRICITY
H10 SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10B ELECTRONIC MEMORY DEVICES
43/00 EEPROM devices comprising charge-trapping gate insulators
H10B43/20 characterised by three-dimensional arrangements, e.g. with cells on different height levels
H10B43/23 with source and drain on different levels, e.g. with sloping channels
H10B43/27 the channels comprising vertical portions, e.g. U-shaped channels