A combination structure of semiconductor deep trench devices includes: a deep trench insulator device, which includes at least one deep trench ring unit, wherein the deep trench ring unit includes: a deep trench ring, a first dielectric side wall layer and a first poly silicon fill region; and a deep trench capacitor device, which includes a plurality of deep trench capacitor units and a cathode, wherein each of the deep trench capacitor units includes: a deep trench hole; a second dielectric side wall layer; and a second poly silicon fill region. The deep trench hole is formed by etching a semiconductor substrate with a same etch process step with the deep trench ring. The first dielectric side wall layer and the second dielectric side wall layer is formed by a same oxide growth process step.

Systems, apparatus, articles of manufacture, and methods for stacks of glass layers including deep trench capacitors are disclosed. An example substrate for an integrated circuit package disclosed herein includes a first glass layer, a second glass layer coupled to the first glass layer, and a deep trench capacitor embedded in the first core.

Various embodiments of the present application are directed towards an integrated chip (IC). The IC comprises a trench capacitor overlying a substrate. The trench capacitor comprises a plurality of capacitor electrode structures, a plurality of warping reduction structures, and a plurality of capacitor dielectric structures. The plurality of capacitor electrode structures, the plurality of warping reduction structures, and the plurality of capacitor dielectric structures are alternatingly stacked and define a trench segment that extends vertically into the substrate. The plurality of capacitor electrode structures comprise a metal component and a nitrogen component. The plurality of warping reduction structures comprise the metal component, the nitrogen component, and an oxygen component.

Various embodiments of the present disclosure are directed towards a FinFET MOS capacitor. In some embodiments, the FinFET MOS capacitor comprises a substrate and a capacitor fin structure extending upwardly from an upper surface of the substrate. The capacitor fin structure comprises a pair of dummy source/drain regions separated by a dummy channel region and a capacitor gate structure straddling on the capacitor fin structure. The capacitor gate structure is separated from the capacitor fin structure by a capacitor gate dielectric.

Various embodiments of the present disclosure are directed towards a trench capacitor with a trench pattern for yield improvement. The trench capacitor is on a substrate and comprises a plurality of capacitor segments. The capacitor segments extend into the substrate according to the trench pattern and are spaced with a pitch on an axis. The plurality of capacitor segments comprises an edge capacitor segment at an edge of the trench capacitor and a center capacitor segment at a center of the trench capacitor. The edge capacitor segment has a greater width than the center capacitor segment and/or the pitch is greater at the edge capacitor segment than at the center capacitor segment. The greater width may facilitate stress absorption and the greater pitch may increase substrate rigidity at the edge of the trench capacitor where thermal expansion stress is greatest, thereby reducing substrate bending and trench burnout for yield improvements.

A method for controlling a MIS structure design in a TFT and a system thereof are disclosed. The method comprises: obtaining dielectric constant of silicon nitride in the MIS structure as designed through calculation; and judging whether the dielectric constant of silicon nitride reaches a set value in a TFT manufacturing procedure, wherein if a negative judgment result is obtained, parameters of the MIS structure are adjusted, so as to enable dielectric constant of silicon nitride in the MIS structure after being adjusted to reach the set value in the TFT manufacturing procedure. A MIS structure design can be effectively controlled, thereby improving performance and stability of TFT-LCD products.

A semiconductor device and methods of formation are provided herein. A semiconductor device includes a conductor concentrically surrounding an insulator, and the insulator concentrically surrounding a column. The conductor, the insulator and the conductor are alternately configured to be a transistor, a resistor, or a capacitor. The column also functions as a via to send signals from a first layer to a second layer of the semiconductor device. The combination of via and at least one of a transistor, a capacitor, or a resistor in a semiconductor device decreases an area penalty as compared to a semiconductor device that has vias formed separately from at least one of a transistor, a capacitor, or resistor.

Field-plate structures are disclosed for electrical field management in semiconductor devices. A field-plate semiconductor device comprises a semiconductor substrate, a first ohmic contact and a second ohmic contact disposed over the semiconductor substrate, one or more coupling capacitors, and one or more capacitively-coupled field plates disposed over the semiconductor substrate between the first ohmic contact and the second ohmic contact. Each of the capacitively-coupled field plates is capacitively coupled to the first ohmic contact through one of the coupling capacitors, the coupling capacitor having a first terminal electrically connected to the first ohmic contact and a second terminal electrically connected to the capacitively-coupled field plate.

A metal-oxide-semiconductor (MOS) type semiconductor device, comprising a silicon substrate, a first cathode electrode and a second cathode electrode coupled to the silicon substrate and located on distal ends of the silicon substrate, a poly-silicon (Poly-Si) gate proximally located above the silicon substrate and between the first cathode electrode and the second cathode electrode, wherein the Poly-Si gate comprises a first post extending orthogonally relative to the silicon substrate comprising a first doped silicon slab, a second post extending orthogonally relative to the silicon substrate comprising a second doped silicon slab, wherein the second post is positioned so as to create a width between the first post and the second post, an anode electrode coupled to the first post and the second post and extending laterally from the first post to the second post, and a dielectric layer disposed between the first silicon substrate and the second silicon substrate.

The present disclosure provides a chip part. The chip part includes a substrate, a first external electrode, a second external electrode, a capacitor portion, a lower electrode, a capacitive film and an upper electrode. The first external electrode and the second external electrode are disposed on a first main surface of the substrate. The capacitor portion is disposed on the first main surface of the substrate. The lower electrode includes a first body portion and a first peripheral portion integrally drawn out around the capacitor portion from the first body portion. The capacitive film includes a second body portion disposed within the capacitor portion and a second peripheral portion integrally drawn out from the second body portion to the first peripheral portion. The upper electrode is disposed on the capacitive film.