An electronic device including a thermistor and a thin-film bias reference resistor in a voltage divider configuration integrated into a single die and a method of fabricating the same. In an example, the electronic device comprises a substrate including an n-well region, a thermistor formed in the n-well region, and a thin-film resistor operable as a bias resistor connected in series to the thermistor, the thin-film resistor formed in a region of the substrate isolated from the n-well region.

Resistors and method of forming the same are provided. A device structure according to the present disclosure includes a substrate, a first intermetal dielectric (IMD) layer over the substrate, a resistor that includes a first resistor layer over the first IMD layer, a second resistor layer over the first resistor layer, and a third resistor layer over the second resistor layer, a second IMD layer over the first IMD layer and the resistor, a first contact via extending through the second IMD layer and the third resistor layer and terminating in the first resistor layer, and a second contact via extending through the second IMD layer and the third resistor layer and terminating in the first resistor layer.

Provided is a semiconductor device including a conductive layer, a stop layer, a second dielectric layer disposed on a first dielectric layer and a resistor. The resistor includes a part of the conductive layer, a first strip-like contact, a second strip-like contact, a first auxiliary contact, a second auxiliary contact, a third auxiliary contact and a fourth auxiliary contact. The first strip-like contact and the second strip-like contact respectively extend through the second dielectric layer and the stop layer, and are electrically connected to the conductive layer. The first auxiliary contact and the second auxiliary contact sandwich the first strip-like contact therebetween, extend through the second dielectric layer, and are electrically connected to the conductive layer. The third auxiliary contact and the fourth auxiliary contact sandwich the second strip-like contact therebetween, extend through the second dielectric layer and are electrically connected to the conductive layer.

An electronic component includes an insulator, a first resistor provided on the insulator, a first electrically insulating film provided on the first resistor to be in contact with the first resistor, and a first metal bonding material provided on the first electrically insulating film to be in contact with the first electrically insulating film and be in contact with a heat sink.

An electronic component includes a semiconductor layer that has a first principal surface and a second principal surface at an opposite thereto, a lower insulating layer that is formed on the first principal surface of the semiconductor layer, a resistance layer that is formed on the lower insulating layer and has a notched portion extending in a predetermined first direction from a portion of a peripheral edge thereof, an upper insulating layer that is formed on the lower insulating layer such as to cover the resistance layer, and an uneven structure that is formed in a predetermined region of the first principal surface of the semiconductor layer including at least a region directly below the resistance layer and the uneven structure includes a plurality of grooves disposed at equal intervals in a second direction that is a direction along the first principal surface and is orthogonal to the first direction and extend in parallel to the first direction and a projection portion that is a portion between two adjacent grooves.

Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a first silicon fin having a longest dimension along a first direction. A second silicon fin having a longest dimension is along the first direction. An insulator material is between the first silicon fin and the second silicon fin. A gate line is over the first silicon fin and over the second silicon fin along a second direction, the second direction orthogonal to the first direction, the gate line having a first side and a second side, wherein the gate line has a discontinuity over the insulator material, the discontinuity filled by a dielectric plug.

Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An isolation structure surrounds a lower fin portion, the isolation structure comprising an insulating material having a top surface, and a semiconductor material on a portion of the top surface of the insulating material, wherein the semiconductor material is separated from the fin. A gate dielectric layer is over the top of an upper fin portion and laterally adjacent the sidewalls of the upper fin portion, the gate dielectric layer further on the semiconductor material on the portion of the top surface of the insulating material. A gate electrode is over the gate dielectric layer.

Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes first and second gate dielectric layers over a fin. First and second gate electrodes are over the first and second gate dielectric layers, respectively, the first and second gate electrodes both having an insulating cap having a top surface. First dielectric spacer are adjacent the first side of the first gate electrode. A trench contact structure is over a semiconductor source or drain region adjacent first and second dielectric spacers, the trench contact structure comprising an insulating cap on a conductive structure, the insulating cap of the trench contact structure having a top surface substantially co-planar with the insulating caps of the first and second gate electrodes.

A method for forming a thin film resistor with improved thermal stability is disclosed. A substrate having thereon a first dielectric layer is provided. A resistive material layer is deposited on the first dielectric layer. A capping layer is deposited on the resistive material layer. The resistive material layer is then subjected to a thermal treatment at a pre-selected temperature higher than 350 degrees Celsius in a hydrogen or deuterium atmosphere. The capping layer and the resistive material layer are patterned to form a thin film resistor on the first dielectric layer.

A semiconductor device includes a dummy fin structure disposed over a substrate, a dummy gate structure disposed over a part of the dummy fin structure, a first interlayer dielectric layer in which the dummy gate structure is embedded, a second interlayer dielectric layer disposed over the first interlayer dielectric layer, and a resistor wire formed of a conductive material and embedded in the second interlayer dielectric layer. The resistor wire overlaps the dummy gate structure in plan view.