In an example, for manufacturing a semiconductor device, first dopants are implanted through a first surface section of a first surface of a silicon carbide body. A trench is formed that extends from the first surface into the silicon carbide body. The trench includes a first sidewall surface and an opposite second sidewall surface. A spacer mask is formed. The spacer mask covers at least the first sidewall surface. Second dopants are implanted through a portion of a bottom surface of the trench exposed by the spacer mask. The first dopants and the second dopants have a same conductivity type. The first dopants and the second dopants are activated. The first dopants form a doped top shielding region adjoining the second sidewall surface. The second dopants form a doped buried shielding region adjoining the bottom surface.

A power semiconductor device (10) comprises a semiconductor body (11) which includes a first main surface (12) and a second main surface (13), a gate insulator (14) arranged at the first main surface (12), and a gate electrode (15) separated from the semiconductor body (11) by the gate insulator (14). The semiconductor body (11) comprises a drift layer (16) of a first conductivity type, a well layer (27) of a second conductivity type being different from the first conductivity type and forming a first junction (18) to the drift layer (16), a source region (20) of the first conductivity type forming a second junction (21) to the well layer (27), and an island region (30) of the second conductivity type attaching the source region (20) such that the source region (20) separates the island region (30) from the well layer (27) in at least 50% of an island surface area of the island region (30) in the semiconductor body (11).

A switched-mode power supply includes a power semiconductor device that includes a semiconductor body comprising transistor cells and a drift zone between a drain layer and the transistor cells, the transistor cells comprising source zones, wherein the device exhibits a first output charge gradient when a voltage between the drain layer and the source zones of the transistor cells increases from a depletion voltage of the semiconductor device to a maximum drain/source voltage of the semiconductor device, wherein the device exhibits a second output charge gradient when a voltage between the drain layer and the source zones of the semiconductor device decreases from the maximum drain/source voltage to the depletion voltage of the semiconductor device, and wherein the semiconductor device is configured such that the first output charge gradient deviates by less than 5% from the second output charge gradient.

A power semiconductor device includes: a semiconductor body with a drift region of a first conductivity type; a first load terminal at a first side of the semiconductor body; a second load terminal at a second side of the semiconductor body opposite the first side, the power semiconductor device configured to conduct a load current between the load terminals; a control terminal at the first side configured to receive a control signal for controlling the load current; within an active region at least partially surrounded by an edge termination region, first trenches laterally confining mesas for conducting the load current, having control trenches electrically connected to the control terminal, and arranged in accordance with a first average pitch; and in a region laterally overlapping the control terminal, second trenches arranged in accordance with a second average pitch different from the first average pitch and electrically connected to the control terminal.

A semiconductor device includes a semiconductor layer made of SiC. A transistor element having an impurity region is formed in a front surface portion of the semiconductor layer. A first contact wiring is formed on a back surface portion of the semiconductor layer, and defines one electrode electrically connected to the transistor element. The first contact wiring has a first wiring layer forming an ohmic contact with the semiconductor layer without a silicide contact and a second wiring layer formed on the first wiring layer and having a resistivity lower than that of the first wiring layer.

A power semiconductor device includes a substrate, a first conductivity type epitaxial layer disposed on the substrate, a second conductivity type well partially disposed on the first conductivity type epitaxial layer, a second conductivity type ion implantation region partially disposed in the second conductivity type well, a source region partially disposed in the second conductivity type well and disposed on the second conductivity type ion implantation region, a gate insulating layer disposed on the source region and the second conductive type well, a gate disposed on the gate insulating layer, an interlayer insulating layer disposed on the gate, and a source electrode disposed on the source region. The gate insulating layer may include a channel gate insulating layer having a first thickness and a protruding gate insulating layer having a second thickness thicker than the first thickness, A concentration in a Rb region which is a lateral resistance of the second conductivity type ion implantation region may be higher than that of the second conductivity type well.

A method of manufacturing a silicon carbide device includes forming a transfer foil that includes a porous silicon carbide layer. A composite substrate is formed that includes the transfer foil and a support substrate. The transfer foil and the support substrate are brought into contact with each other and connected to each other. An epitaxial layer is formed on a side of the porous silicon carbide layer opposite to the support substrate. The composite substrate is divided into a device substrate and a reclaim substrate. The device substrate includes the epitaxial layer and the reclaim substrate includes the support substrate.

The application relates to a semiconductor transistor device, having a source region, a body region including a channel region extending in a vertical direction, a drain region, a gate region arranged aside the channel region in a lateral direction, and a body contact region made of an electrically conductive material, wherein the body contact region forms a body contact area, the body contact region being in an electrical contact with the body region via the body contact area, and wherein the body contact area is tilted with respect to the vertical direction and the lateral direction.

Disclosed is a silicon carbide power semiconductor device and, more particularly, a silicon carbide power semiconductor device capable of improving on-resistance characteristics by contacting at least one lowermost surface of a base or a source with an underlying JFET region.

A 3D semiconductor device including: a first level including a first single crystal layer and first transistors, which each include a single crystal channel; a first metal layer with an overlaying second metal layer; a second level including second transistors, overlaying the first level; a third level including third transistors, overlaying the second level; a fourth level including fourth transistors, overlaying the third level, where the second level includes first memory cells, where each of the first memory cells includes at least one of the second transistors, where the fourth level includes second memory cells, where each of the second memory cells includes at least one of the fourth transistors, where the first level includes memory control circuits, where second memory cells include at least four memory arrays, each of the four memory arrays are independently controlled, and at least one of the second transistors includes a metal gate.