H10D44/454

Image sensor with buried-channel drain (BCD) transistors

A charge-coupled device (CCD) image sensor is provided. The CCD image sensor may include an array of photosensors that transfer charge to multiple vertical CCD shift registers, which then in turn transfer the charge to a horizontal CCD shift register. The horizontal CCD shift register then feeds an output buffer circuit. The output buffer circuit can include a load transistor implemented using a buried-channel drain (BCD) structure. The load transistor may include a gate conductor, a source diffusion region, a drain diffusion region, and a buried-channel drain region that at least partially extends under the gate conductor. The BCD region may be formed before or after the formation of the gate conductor. If desired, the BCD region can also be formed at the source edge. An image sensor configured in this way can exhibit higher source-drain breakdown voltages, enhanced amplifier gain, and reduced amplifier glow.