A semiconductor device is provided. The semiconductor device includes a substrate including an active pattern, a gate electrode extending in a first direction and crossing the active pattern which extends in a second direction, a separation structure crossing the active pattern and extending in the first direction, a first gate dielectric pattern disposed on a side surface of the gate electrode, a second gate dielectric pattern disposed on a side surface of the separation structure, and a gate capping pattern covering a top surface of the gate electrode. A level of a top surface of the separation structure is higher than a level of a top surface of the gate capping pattern.

A method for forming a semiconductor structure includes the following steps. A semiconductor device is formed over a substrate. A trench is formed in the semiconductor device. The trench is filled with a gap-fill material using a deposition process, wherein a precursor used in the deposition process includes azidosilane, di-azidosilane or halide azidosilane.

Inner spacers between a source/drain region of a nanostructure transistor and sacrificial nanostructure layers of the nanostructure transistor are removed prior to formation of a gate structure of the nanostructure transistor. The sacrificial nanostructure layers are removed, and then the inner spacers are removed. The sacrificial nanostructure layers are then replaced with the gate structure of the nanostructure transistor such that the gate structure and the source/drain region are spaced apart by air gaps that result from the removal of the inner spacers. The dielectric constant (or relative permittivity) of the air gaps between the source/drain region and the gate structure is less than the dielectric constant of the material of the inner spacers. The lesser dielectric constant of the air gaps reduces the amount of capacitance between the source/drain region and the gate structure.

Integrated circuit structures might include a semiconductor material, a first active area in the semiconductor material, a second active area in the semiconductor material, and an isolation structure comprising a dielectric material deposited in a trench formed in the semiconductor material between the first active area and the second active area. The isolation structure might further include a first edge portion extending below a surface of the semiconductor material to a first depth, a second edge portion extending below the surface of the semiconductor material to the first depth, and an interior portion between the first edge portion and the second edge portion, and extending below the surface of the semiconductor material to a second depth, less than the first depth.

A semiconductor device having a high degree of integration is provided. A first and second transistors which are electrically connected to each other and a first insulating layer are included. The first transistor includes a first semiconductor layer, a second insulating layer, and a first to third conductive layers. The second transistor includes a second semiconductor layer, a third insulating layer, and a fourth to sixth conductive layers. The first insulating layer is positioned over the first conductive layer and includes an opening reaching the first conductive layer. The second conductive layer is positioned over the first insulating layer. The first semiconductor layer is in contact with a top surface of the first conductive layer, an inner wall of the opening, and the second conductive layer. The third conductive layer is positioned over the second insulating layer to overlap with the inner wall of the opening. The third insulating layer is positioned over the fourth conductive layer. The fifth and sixth conductive layers are positioned over the fourth conductive layer with the third insulating layer therebetween. The second semiconductor layer is in contact with top surfaces of the fifth and sixth conductive layers, side surfaces thereof that face each other, and a top surface of the third insulating layer sandwiched between the fifth conductive layer and the sixth conductive layer.

A semiconductor device includes a first power supply line, a second power supply line, a first ground line, a switch circuit connected to the first and the second power supply line, and a switch control circuit connected to the first ground line and the first power supply line. The switch circuit includes a first and a second transistor of a first conductive type. A first gate electrode of the first transistor is connected to a second gate electrode of the second transistor. The switch control circuit includes a third transistor of a second conductive type, and a fourth transistor of a third conductive type. A third gate electrode of the third transistor is connected to a fourth gate electrode of the fourth transistor. A semiconductor device includes a signal line that electrically connects a connection point between the third and fourth transistor to the first and second gate electrode.

A method includes forming a first and a second gate dielectric on a first semiconductor channel region and a second semiconductor channel region overlapping the first semiconductor region, forming a first dipole film on the first gate dielectric, wherein the first dipole film comprises a first dipole dopant of a first type, and forming a second dipole film on the second gate dielectric. A drive-in process is performed to drive dipole dopants in the first dipole film and the second dipole film into the first gate dielectric and the second gate dielectric, respectively. The first dipole film and the second dipole film are removed. A gate electrode is formed on both of the first gate dielectric and the second gate dielectric to form a first transistor and a second transistor.

A method includes forming a lower semiconductor region, forming an upper semiconductor region overlapping the lower semiconductor region, forming a lower gate dielectric and an upper gate dielectric on the lower semiconductor region and the upper semiconductor region, respectively, forming a lower gate electrode on the lower gate dielectric and the upper gate dielectric, etching back the lower gate electrode, forming a gate isolation layer on the lower gate electrode that has been etched back, and forming an upper gate electrode over the gate isolation layer. The upper gate electrode is on the upper gate dielectric.

A method of microfabrication includes providing a substrate having an existing pattern of features formed within a first layer, depositing a selective attachment agent on the substrate, wherein the selective attachment agent attaches to the features and includes a solubility-shifting agent, depositing a first resist on the substrate, activating the solubility-shifting agent such that a portion of the first resist over the features becomes soluble to a first developer, developing the first resist using the first developer such that a relief pattern having openings that expose the features of the existing layer is formed, growing a selective growth material on the features and within the openings of the relief pattern to provide self-aligned selective growth features, removing the first resist, depositing a fill layer on the substrate, and repeating the steps a predetermined number of times to provide a stacked device including a predetermined number of levels.

A method includes forming a first bottom-tier transistor; forming a second bottom-tier transistor, the first and second bottom-tier transistors sharing a same source/drain region; forming a first top-tier transistor over the first bottom-tier transistor, the first top-tier transistor comprising a first channel layer and a first gate structure around the first channel layer; forming a second top-tier transistor over the second bottom-tier transistor, the second top-tier transistor comprising a second channel layer and a second gate structure around the second channel layer, the first and second top-tier transistors sharing a same source/drain region, wherein from a top view, a first dimension of the first channel layer in a lengthwise direction of the first gate structure is different than a second dimension of the second channel layer in the lengthwise direction of the first gate structure.