The present disclosure relates to a LTPS TFT unit for liquid crystal modules and the manufacturing method thereof. The manufacturing method includes: forming a SiNx layer on a glass substrate; forming a SiOx layer and an a-Si layer on the SiNx layer in sequence; scanning the a-Si layer by laser beams to remove hydrogen within the a-Si layer; adopting excimer laser to re-crystallization anneal the a-Si layer to form the polysilicon layer; forming a gate insulation layer on the polysilicon layer; forming a gate on the gate insulation layer; and forming a drain insulation layer on the gate.

A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Embodiments of the present invention disclose a manufacturing method of a thin film transistor, a thin film transistor, an array substrate and a display device. The manufacturing method of a thin film transistor includes a step of forming an active layer, and the step of forming an active layer includes: forming a first poly-silicon layer and a second poly-silicon layer on the first poly-silicon layer separately, and adding dopant ions into the second poly-silicon layer and an upper surface layer of the first poly-silicon layer. By using the manufacturing method of a thin film transistor, defect states and unstable factors of interface in the thin film transistor can be reduced, thereby improving stability of the LTPS thin film transistor and obtaining an array substrate and a display device having more stable performance.

The present invention provides a method for manufacturing an LTPS TFT substrate structure and a structure of an LTPS TFT substrate. The method for manufacturing the LTPS TFT substrate structure according to the present invention provides patterns of a thermally conductive electrical-insulation layer that are of the same size and regularly distributed under a buffer layer of a driving TFT area to absorb heat in a subsequent excimer laser annealing process so as to speed up the cooling rate of amorphous silicon to form crystal nuclei that gradually grow up in the annealing process. Since the thermally conductive electrical-insulation layer is made up of regularly distributed and size-consistent patterns, crystal grains of a polycrystalline silicon layer located in the driving TFT area show improved consistency and homogeneity and the grain sizes are relatively large to ensure the consistency of electrical property of the driving TFT. The structure of the LTPS TFT substrate structure according to the present invention includes patterns of a thermally conductive electrical-insulation layer that are regularly distributed under a buffer layer of a driving TFT area and have the same size, so that crystal grains of a polycrystalline silicon layer located in the driving TFT area show improved consistency and homogeneity and the grain sizes are relatively large and thus, the electrical property of the driving TFT is consistent.

A method of manufacturing a semiconductor device includes modifying a first laser beam from a first laser to form a first linear-shaped laser beam and modifying a second laser beam from a second laser to form a second linear-shaped laser beam. The method further includes overlaying the first linear-shaped laser beam and the second linear-shaped laser beam to form an overlayed linear-shaped laser beam, wherein the overlayed linear-shaped laser beam has a width and a length where the length is ten times or more as large as the width. The method also includes scanning a semiconductor film formed over a substrate with the overlayed linear-shaped laser beam to increase crystallinity of the semiconductor film, and patterning the semiconductor film to form a semiconductor layer which includes a channel formation region of a transistor.

One embodiment of the present invention provides a highly reliably display device in which a high mobility is achieved in an oxide semiconductor. A first oxide component is formed over a base component. Crystal growth proceeds from a surface toward an inside of the first oxide component by a first heat treatment, so that a first oxide crystal component is formed in contact with at least part of the base component. A second oxide component is formed over the first oxide crystal component. Crystal growth is performed by a second heat treatment using the first oxide crystal component as a seed, so that a second oxide crystal component is formed. Thus, a stacked oxide material is formed. A transistor with a high mobility is formed using the stacked oxide material and a driver circuit is formed using the transistor.

If an optical path length of an optical system is reduced and a length of a laser light on an irradiation surface is increased, there occurs curvature of field which is a phenomenon that a convergent position deviates depending on an incident angle or incident position of a laser light with respect to a lens. To avoid this phenomenon, an optical element having a negative power such as a concave lens or a concave cylindrical lens is inserted to regulate the optical path length of the laser light and a convergent position is made coincident with a irradiation surface to form an image on the irradiation surface.

The present disclosure relates to a LTPS TFT unit for liquid crystal modules and the manufacturing method thereof. The manufacturing method includes: forming a SiNx layer on a glass substrate; forming a SiOx layer and an a-Si layer on the SiNx layer in sequence; scanning the a-Si layer by laser beams to remove hydrogen within the a-Si layer; adopting excimer laser to re-crystalization anneal the a-Si layer to form the polysilicon layer; forming a gate insulation layer on the polysilicon layer; forming a gate on the gate insulation layer; and forming a drain insulation layer on the gate.

A method of compensating for Mura in a display panel includes displaying a high gray-scale image and a low gray-scale image on a display panel. The displayed images are photographed to generate a high gray-scale luminance image and a low gray-scale luminance image. An ELA Mura for-measurement image having moir-removed luminance values is generated by dividing luminance values of the low gray-scale luminance image by luminance values of the high gray-scale luminance image. One-dimensional average data is obtained from the ELA Mura for-measurement image. The one-dimensional average data is transformed into frequency-domain data. Target frequency-domain data having a maximum peak value is identified from the frequency-domain data. A direction, an intensity, and a frequency of the ELA Mura are obtained from the target frequency-domain data. A filter is determined based on the obtained information. The filter is applied to image data.