H ELECTRICITY
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H10 SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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H10N ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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30/00 Piezoelectric or electrostrictive devices
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H10N30/01 Manufacture or treatment
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H10N30/09 Forming piezoelectric or electrostrictive materials
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H10N30/093 Forming inorganic materials
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H10N30/097 by sintering
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