The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. Upper electrodes and lower electrodes of the first actuator part and the second actuator part are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part and third piezoelectric conversion parts and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts and a fourth piezoelectric conversion part generate stresses in opposite directions.

An electroactive polymer actuator comprises an electroactive polymer structure and a driver for providing an actuation drive signal. In one aspect a first drive level is used to charge the electroactive polymer structure from a non-actuated state to an actuated state. When or after the electroactive polymer structure reaches the actuated state, a lower second drive level is used to hold the electroactive polymer structure at the actuated state. This temporary overdrive scheme improves the speed response without damaging the electroactive polymer structure. In another aspect, a driving method makes use of several different level segments over time which compensate for the delayed actuation response of the EAP actuator.

An optical scanning device includes: a mirror that has an optical reflection surface; a mirror support unit configured to support the mirror; a pair of drive beams arranged on both sides of the mirror support unit and connected such that the mirror support unit is swingable; a drive source provided on the drive beams and configured to swing the mirror support unit, the drive source including a stack structure of a plurality of piezoelectric thin films; and a piezoelectric sensor formed on a connection beam connected to the drive source or the drive beams, a number of piezoelectric thin films included in the piezoelectric sensor being less than a number of the piezoelectric thin films included in the drive source.

The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

Surface modifications and improvements to piezoelectric-based sensors, such as QCMs and other piezoelectric devices, that significantly increase the sensitivity and the specificity (selectivity). These modifications can comprise mechanical and chemical changes to the surfaces of the sensors, either individually or together. For example, nanosize structures may be provided on the surface to improve sensitivity. Additionally, chemical coatings may be tethered to the surfaces, walls, or crystal to provide targeted sensitivity. Additionally, porous, layered and multiple sensor arrays may be formed to enhance sensitivity and selectivity.

A MOSFET is turned On and Off by applying an acoustic signal to a material having a piezoelectric effect to generate a charge creating a conducting path at the silicon/gate oxide interface. In an acoustic transistor, instead of the gate voltage, the accumulation of the charge under the oxide region is created by a piezoelectric material stimulated by an acoustic (sound) wave from an acoustic generator. A piezoelectric thin film, such as Aluminum Nitride or HfSiO, can be deposited near the transistor to stimulate the signal and another piezo film also on top of the silicon oxide/aluminum gate. The acoustic waves from a signal generator on the silicon surface bounce within the substrate and stimulate the piezo film on top of the gate oxide. This results in electric charge across the oxide film, induced by the piezo film on top of the gate and turns on and off the transistor.

Provided is a cell detachment device causing to know whether the vibration applied to a culture vessel and the cells under the desired condition is applied. The device generating a first vibration and detaching a culture cell from a culture vessel using the first vibration, comprises: a piezoelectric element in which a second vibration is excited by applying a first alternating current using a first and second electrodes; a vibrated system in which the second vibration propagates, including a vibration member to which the piezoelectric element is fixed and on which the culture vessel mounted; a third electrode used outputting a second alternating current excited on the piezoelectric element by the first vibration generated in the vibrated system caused by the second vibration; and a detection unit detecting a state of the first vibration generated in the vibrated system by using the second alternating current output from the third electrode.

Disclosed is a self-sensing bending actuator. The self-sensing bending actuator includes a stack of layers including a first piezoelectric bending element and a second piezoelectric bending element, a metallic layer disposed between the first piezoelectric bending element and the second piezoelectric bending element such that the metallic layer is electrically coupled to the first piezoelectric bending element and the second piezoelectric bending element, an insulating layer disposed on the second piezoelectric bending element, and a sensing element disposed on the insulating layer. In the disclosed self-sensing bending actuator, the one or more of the first piezoelectric bending element and the second piezoelectric bending element are constructed of PZT-5H material, the metallic layer is composed of brass material, the insulating layer is composed of a polyimide material such as Kapton, and the sensing element is constructed of one of more of polyvinylidene fluoride and polyvinylidene difluoride (PVDF) material.

Disclosed is a scalable piezoelectric linear actuator. The linear actuator includes a central rod and one or more bending modules connected to the central rod. Each of the one or more bending modules includes one or more bending actuators. Each of the one or more bending actuators includes at least two layers of bending elements. Further, each of the one or more bending actuators incudes a metallic layer disposed between each of the at least two layers of bending elements. Further, each of the one or more bending actuators includes an insulating layer disposed on at least one of the at least two layers of bending elements. Further, each of the one or more bending actuators includes a sensing element disposed on the insulating layer.