A molecular detection apparatus includes a detector. The detector includes: a vibrator having a piezoelectric member that has a first surface and a second surface, a first electrode connected to the first surface, a second electrode connected to the second surface, and a third electrode connected to the second surface and disconnected from the second electrode; a sensitive film overlapping at least one part of the second electrode and at least one part of the third electrode and configured to change a vibration frequency of the vibrator in response to an interaction with target molecules; and a detection electrode to detect the changed vibration frequency.

A suspended piezoelectric ultrasonic transducer includes a semiconductor substrate and a piezoelectric ultrasonic sensing element. The semiconductor substrate includes a columnar arrangement area, a peripheral wall, and one or more bridge portions. A cavity is between the columnar arrangement area and the peripheral wall. The cavity surrounds the columnar arrangement area, and the bridge portion is connected to the columnar arrangement area and the peripheral wall. The piezoelectric ultrasonic sensing element is disposed on the columnar arrangement area. Through providing the cavity and the bridge portion on the semiconductor substrate, the resonance frequency, the acoustic pressure, and the emitting angle of the transducer can be adjusted, thereby providing a greater manufacturing tolerance for the transducer.

An artificial tongue is provided. The artificial tongue includes tongue tissue formed by a bioprinting process, an antenna embedded within the tongue tissue and configured to wirelessly receive power from an external device, a processor embedded within the tongue tissue and operatively coupled to the antenna, and a piezoelectric element embedded within the tongue tissue and operatively coupled to the processor. The piezoelectric element is configured to deform in response to an applied electric bias, and the processor is configured to cause the electric bias to be applied to the piezoelectric element based on the power received by the antenna.

A piezoelectric element and a method of manufacturing the piezoelectric element are provided. The piezoelectric element is provided with a substrate having an intermediate layer disposed between a first substrate layer and a second substrate layer, a first electrode layer of an electrically conductive non-ferroelectric material disposed on the second substrate layer, a ferroelectric, piezoelectric and/or flexoelectric layer disposed on the first electrode layer, and a second electrode layer of an electrically conductive non-ferroelectric material disposed on the ferroelectric, piezoelectric and/or flexoelectric layer. The intermediate layer and/or the first substrate layer is removed below a layer stack formed by the first electrode layer, the ferroelectric, piezoelectric and/or flexoelectric layer, and the second electrode layer so that the layer stack can be moved in a translatory manner along its normal directed along the layer sequence.

A movable piezo element and to a method for producing the element are provided. The movable piezo element may have a structured substrate, in which an intermediate layer is arranged between a first substrate layer and a second substrate layer. The element may also have a first electrode layer. The element may also have a second electrode layer arranged on the ferroelectric, piezoelectric, or flexoelectric layer. The second substrate layer may be structured such that at least one bar of the second substrate layer is formed. The bar may be clamped on one side and may be physically spaced from the first substrate layer. A surface of the bar facing away from the first substrate layer, and/or a lateral surface of the bar, may be at least partly covered by another layer.

A safety valve is provided with an electronic control unit for generating a control voltage. An electro-fluidic preliminary stage has a piezo bending actuator which can be actuated between a working position and a safety position by the control voltage and influences the flow of a secondary control fluid flow depending on its position. A fluid-mechanical main stage has an influencing device for influencing the flow of a primary working fluid flow. The influencing device can be actuated by means of the secondary control fluid flow which flows into a control chamber of the main stage. The control unit caries out a test of the preliminary stage repeatedly in an iterative manner after the expiration of a specified time interval. As part of the functionality test, the position of the piezo bending actuator is changed slightly by varying the control voltage.

An ultrasound transducer, wherein the ultrasound transducer includes a membrane including a top portion and a bottom portion, wherein the membrane is configured to vibrate and generate an ultrasound in response to voltage applied the transducer, wherein the membrane includes a perimeter including a plurality of sides and a top surface and a bottom surface with one or more feet extending away from the bottom surface; and a support member that attaches to and connects to the membrane and supports the membrane, wherein the support member includes one or more platforms extending to and attaching to the membrane and a substrate, wherein a first end of the platform connects to the membrane and includes a support portion, wherein the support portion away from the platform, wherein the platform includes the one or more piezoelectric layers, wherein the one or more platforms support and surround the membrane.

A piezoelectric element includes a piezoelectric element body including a first principal surface and a second principal surface opposing each other, and a plurality of external electrodes disposed on the first principal surface. A vibration member includes a third principal surface opposing the second principal surface. The piezoelectric element is joined to the third principal surface. A wiring member is electrically connected to the piezoelectric element. The wiring member includes a region located on the plurality of external electrodes and joined to the plurality of external electrodes. The region of the wiring member monolithically covers the plurality of external electrodes when viewed from a direction orthogonal to the first principal surface.

A MEMS device having a body with a first and a second surface, a first portion and a second portion. The MEMS device further has a cavity extending in the body from the second surface; a deformable portion between the first surface and the cavity; and a piezoelectric actuator arranged on the first surface, on the deformable portion. The deformable portion has a first region with a first thickness and a second region with a second thickness greater than the first thickness. The second region is adjacent to the first region and to the first portion of the body.

A locking isolator includes one or more joints. The one or more joints are configured to transition between a clearance fit state and an interference fit state in response to a change in temperature. The locking isolator includes a dampener. The dampener is configured to attenuate transmission of vibration through the one or more joints when the one or more joints are in the clearance fit state.