The present disclosure provides a drive device and an acoustic output device including the drive device. The drive device comprises one or more drive units, each drive unit having a beam-like structure, the beam-like structure including a vibration output end and a fixed end and extending from the fixed end toward the vibration output end. Each drive unit includes: a piezoelectric layer configured to cause the drive unit to output a vibration from the vibration output end in response to an electrical signal; and a reinforcement layer, wherein the reinforcement layer includes one or more reinforcement components arranged in an extension direction of the beam-like structure, at least one reinforcement component of the one or more reinforcement components being arranged close to the vibration output end and having a dimension not exceeding one-half of a distance from the vibration output end to the fixed end in the extension direction.

A flexure guidance system may be provided for controlling movement of an optical subassembly and/or a connected combiner lens. For instance, the flexure guidance system may include a distal end piece, a proximal end piece, and multiple wire flexures that link the distal end piece to the proximal end piece. The linking wire flexures may be spaced to form an interior cavity between the distal end piece and the proximal end piece. This interior cavity may house various electronic components. One or more actuators in the system may move the electronic components according to input signals along different axes of movement provided by the wire flexures. Various other methods, systems, and computer-readable media are also disclosed.

Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.

In at least one illustrative embodiment, a microelectromechanical system (MEMS) includes a composable piezoelectric actuator electrically coupled to a terminal. In response to a voltage applied across electrodes of the actuator, a piezoelectric rod moves from an initial position to a displaced position. In an embodiment, the MEMS includes two terminals, a resistive element is coupled between the terminals, and when in the displaced position the rod contacts one of the terminals. In an embodiment, the MEMS includes three terminals, and when a threshold voltage is applied to one of the terminals, the rod moves to the displaced position and allows current to flow between the other two terminals. In an embodiment, the MEMS includes a primary set of actuators that are mechanically but not electrically connected to a secondary set of actuators. An output terminal is coupled to the second set of actuators. Other embodiments are described and claimed.

A flexure guidance system may be provided for controlling movement of an optical subassembly and/or a connected combiner lens. For instance, the flexure guidance system may include a distal end piece, a proximal end piece, and multiple wire flexures that link the distal end piece to the proximal end piece. The linking wire flexures may be spaced to form an interior cavity between the distal end piece and the proximal end piece. This interior cavity may house various electronic components. One or more actuators in the system may move the electronic components according to input signals along different axes of movement provided by the wire flexures. Various other methods, systems, and computer-readable media are also disclosed.

A mechanical microsystem including a pair of elastically deformable elements, a mechanical hinge joining the deformable elements together, and at least two electroactive layers. The microsystem is configured such that, from a rest position wherein the deformable elements fall into a plane, a deformation of one of the deformable elements displacing it outside of the plane induces an electric current circulation in one of the two electroactive layers, and/or conversely. Each deformable element has a front face and a rear face opposite one another and substantially parallel to the plane. A first electroactive layer is arranged together with a first deformable element on its rear face, and a second electroactive layer, different from the first layer, is arranged with a second deformable element, different from the first element, on its front face.

This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of attaching suspenders to the inertial mass with at least one flexure, which allows the end of the suspender which is attached to the inertial mass to rotate in relation to the inertial mass at this attachment point when the inertial mass is in motion. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.

The present invention is a novel electroactive actuator device provides high active and passive performances for electromechanical and smart systems. The electroactive actuator device is capable of operating in a manner that achieve good passive isolation characteristics, amplifies the stroke displacement per applied voltage, and also enhances the active forces of the electroactive mechanism without weight or size penalties. The electromechanical responses can be transferred to the objective systems using lightweight electrical-mechanical connectors fastened at the center of the piezoelectric actuator elements. When an alternating voltage potential is across the upper and lower electrodes of a piezoelectric actuator element, the center portions of all the piezoelectric actuator elements, as well as the electrical-mechanical connectors attached thereto, reciprocate harmoniously in one direction generating high electroactive forces and dynamic responses.

A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.

Disclosed is a scalable piezoelectric linear actuator. The linear actuator includes a central rod and one or more bending modules connected to the central rod. Each of the one or more bending modules includes one or more bending actuators. Each of the one or more bending actuators includes at least two layers of bending elements. Further, each of the one or more bending actuators incudes a metallic layer disposed between each of the at least two layers of bending elements. Further, each of the one or more bending actuators includes an insulating layer disposed on at least one of the at least two layers of bending elements. Further, each of the one or more bending actuators includes a sensing element disposed on the insulating layer.