A substrate block for a fluid delivery system is provided, the substrate block having an upper surface. The upper surface has an inlet substrate port and an outlet substrate port formed into the upper surface. A substrate fluid passageway extends from the inlet substrate port and the outlet substrate port. The substrate fluid passageway extends in a smooth arc which is free of corners or angular walls.

A structure for forming a fluid path is provided. The structure for forming a fluid path according to one embodiment of the present disclosure includes a body configured with first and second fluid paths which communicate with each other, and a third fluid path which is provided at a position, at which the first and second fluid paths are connected to each other, and communicates with the first and second fluid paths, and includes one or more among a first ball which is able to be disposed in the first fluid path, a second ball which is able to be disposed in the second fluid path, and a third ball which is able to be disposed in the third fluid path, wherein a diameter of the first fluid path is greater than that of the second fluid path, and the second ball is able to be disposed in the second fluid path by passing the first fluid path.

A dual-purpose type gas-valve structure especially related to a gas-gun gas-valve used for controlling the igniting and releasing of gas. It is specially designed with the horizontal and vertical gas entrance types coexisting structure to facilitate selecting different types to insert and connect the high-pressure steel cylinder depending on the gun type. It mainly consists of a box-body set with several connected horizontal and vertical channels inside; wherein a group of vertically intersecting channels located below can respectively insert into the high-pressure steel cylinder from the horizontal entrance and the vertical entrance from outside; wherein the lower-layer horizontal channel located at the upper f-type channel belongs to the high-pressure gas control room and the touch-press port, and the gas can be thereby released to the vertical channel and strongly ejected out through the upper-layer horizontal channel to instantaneously propel and launch out the bullet of the connecting barrel.

A valve body (4) for a valve assembly (2) is proposed. The valve body (4) comprises a valve seat (96) which can be accessed by means of an opening (86). A plurality of threaded holes is provided around the opening (86). A plurality of first studs (22a-c) is arranged, in portions, in the threaded holes in order to arrange a valve drive. At least one second stud (24) comprises an electronic data carrier (26) for contactless identification of the valve seat (96). A portion of the second stud (24) is arranged in one of the threaded holes.

A method of processing semiconductors using a fluid delivery system is disclosed in which seal inserts are utilized to fluidly connect an active component that bridges two substrate blocks.

A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring. An outer surface of the substrate ring may form an inner surface of the substrate seal channel. An active component may be selected from a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, a valve, and a flow meter. The active component may comprise a lower surface; a first component port in the lower surface; a component fluid passageway; a component ring; and a component seal channel formed in the lower surface and surrounding the component ring.

A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring. An outer surface of the substrate ring may form an inner surface of the substrate seal channel. An active component may be selected from a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, a valve, and a flow meter. The active component may comprise a lower surface; a first component port in the lower surface; a component fluid passageway; a component ring; and a component seal channel formed in the lower surface and surrounding the component ring.

A circulation pump assembly for a heating and/or cooling system includes an electric drive motor (108) and a connected pump housing (106) in which at least one impeller (118) is situated and which comprises a first inlet (112) and a first outlet (114). The pump housing (106) includes a second inlet (122) which is connected in an inside of the pump housing (106) at a mixing point (130) to the first inlet (112). A regulating valve (134), which is designed for regulating the mixing ratio of two flows mixing at the mixing point (130), as well as a control device, which controls the regulating valve (134) for regulating the mixing ration, are arranged in the pump housing (106). A hydraulic manifold is provided with such a circulation pump assembly.

A control valve compensation system for producing both a pre-compensated and a post-compensated load sensing hydraulic directional control valve module, wherein both configurations use the same components except for a sliding compensating component. The control valve compensation system generally includes a hydraulic directional control valve housing which is adapted to be easily-interchangeable between a load sensing pre-compensated pressure configuration and a load sensing post-compensated pressure configuration by simply removing and replacing a different compensator assembly within the housing. The compensator assembly is adapted to direct oil flow through the housing while simultaneously providing compensation for the valve function. Directional valve assemblies may be provided, with the valve assemblies functioning to provide post-compensated functions, pre-compensated functions, and mixed pre- and post-compensated functions. These directional valve functions can be re-configured in the field by simply swapping the compensator assemblies to produce the desired functionality of the end-user at that particular time.

A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring. An outer surface of the substrate ring may form an inner surface of the substrate seal channel. An active component may be selected from a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, a valve, and a flow meter. The active component may comprise a lower surface; a first component port in the lower surface; a component fluid passageway; a component ring; and a component seal channel formed in the lower surface and surrounding the component ring.