An apparatus for processing wafer-shaped articles comprises a spin chuck adapted to hold and spin a wafer-shaped article of a predetermined diameter during a processing operation. A liquid collector surrounds the spin chuck, and comprises a first inner surface. The first inner surface comprises a first conductive material. The collector further comprises a first conductive pathway for grounding the first conductive material.

A method of monitoring a low water volume of a water circulation system is disclosed that includes detecting an auxiliary measurement associated with an ancillary device fluidly coupled with a reservoir of water in a water circulation system and then determining whether the ancillary device is performing under a low water volume operation. The low water volume operation is based upon a comparison between at least the detected auxiliary measurement of the ancillary device and a condition associated with a performance of the ancillary device under the low water volume operation.

An apparatus for continuously controlling fluid flow in a sewer conduit, comprising: a) moisture sensors detecting levels of fluid in this conduit; b) an inflatable bladder, mounted in the sewer conduit for releasably sealing in fluid tight fashion a section of this conduit; a compressed air source for inflating the bladder; and a control box including a CPU sensitive to the moisture sensor(s) and actuating the air compressor responsively to conduit fluid level conditions reaching beyond a preset threshold value. The performance of the apparatus is independent of the speed of fluid flow in the sewer conduit.

A top fill water reservoir system that allows the reservoirs to be filled without waiting for a reverse osmosis (RO) filter to produce enough water to fill the system and avoids the need for a service worker to remove the system from the cabinet, or wait for RO filtration, to fill the reservoirs. The top fill water reservoir system comprises a drinking reservoir adapted to store and dispense drinking water. A supply reservoir in fluid communication with the drinking reservoir and adapted to feed water into the drinking reservoir and receive water from a reverse osmosis (RO) filter. An overflow tube adapted to connect an upper portion of the drinking reservoir to the supply reservoir and feed overflow water from the drinking reservoir to the supply reservoir.

A system and method of operating a water supply system with one or more water consuming appliances is provided. The water supply system includes a hot water heater for supplying a flow of heated water through a supply conduit to at least one water consuming appliance. The water consuming appliance receives the flow of heated water and provides an indication of a fault condition if excessive water accumulates in the appliance, which might indicate a malfunction with a drain pump or a water supply valve. A safety shutoff valve is positioned on the supply conduit and is in operative communication with the water consuming appliance. The safety shutoff valve is configured for stopping the flow of heated water when it receives the indication of the fault condition.

A distribution station includes a mobile trailer, a pump on the mobile trailer, a manifold on the mobile trailer and connected with the pump, a plurality of hoses connected with the manifold, a plurality of valves on the mobile trailer, each of the valves situated between the manifold and a respective different one of the hoses, a plurality of guided wave radar level sensors, each of the guided wave radar level sensors being associated with a respective different one of the hoses, and a controller configured to communicate with the guided wave radar level sensors and operate the valves responsive to signals from the guided wave radar level sensors.

A top fill water reservoir system that allows the reservoirs to be filled without waiting for a reverse osmosis (RO) filter to produce enough water to fill the system and avoids the need for a service worker to remove the system from the cabinet, or wait for RO filtration, to fill the reservoirs. The top fill water reservoir system comprises a drinking reservoir adapted to store and dispense drinking water. A supply reservoir in fluid communication with the drinking reservoir and adapted to feed water into the drinking reservoir and receive water from a reverse osmosis (RO) filter. An overflow tube adapted to connect an upper portion of the drinking reservoir to the supply reservoir and feed overflow water from the drinking reservoir to the supply reservoir.

An electrically operated valve assembly having a manual override includes a valve body, an actuation cam, a shaft, a gear, and a biasing member. The shaft is connected to the actuation cam and includes a projection. The gear defines an opening which selectively receives the projection of the shaft to engage the shaft to the gear. In a first operating condition of the valve assembly, the actuation cam is in an engaged position relative to the valve and the shaft is biased to be engaged with the gear. In a second operating condition of the valve assembly, the actuation cam is in a disengaged position offset along the axis of the shaft from the valve handle and at least partially rotated about the axis of the shaft such that the shaft is disengaged from the gear. Further, a master control module can control one or more such valve assemblies.

A system and method removes well fluids, which include gas and liquids, from a storage tank. The storage tank has a gas relief valve that opens to admit atmospheric air into the storage tank when the pressure of a gas cap decreases below a vacuum threshold pressure. Well fluids flow into the storage tank and the level of liquid is monitored. When the level reaches a first level, a pump is operated by a controller to remove liquid from the storage tank. The pressure in the gas cap is monitored while the pump is operating. The speed of the pump is adjusted to maintain the gas cap pressure above the predetermined pressure and avoid the introduction of atmospheric air into the gas cap.

A distribution station includes a mobile trailer, a pump on the mobile trailer, a manifold on the mobile trailer and connected with the pump, a plurality of hoses connected with the manifold, a plurality of valves on the mobile trailer, each of the valves situated between the manifold and a respective different one of the hoses, a plurality of guided wave radar level sensors, each of the guided wave radar level sensors being associated with a respective different one of the hoses, and a controller configured to communicate with the guided wave radar level sensors and operate the valves responsive to signals from the guided wave radar level sensors.