A system and method for a planar positioning system for an output member, the system having a pair of x-coordinate linear carriages and a pair of y-coordinate linear carriages. The system has a guide mechanism for the pair of x-coordinate linear carriages and the pair of y-coordinate linear carriages. The system has a plurality of movement and constraining cables extending from the pair of x-coordinate linear carriages and the pair of y-coordinate linear carriages to the output member for driving the output, wherein the pair of x-coordinate linear carriages and the output member move in sync in the x-direction and the pair of y-coordinate linear carriages and the output member move in sync in the y-direction. A restraint mechanism restrains the output member in an additional degree of freedom besides the x- and y-directions. The restraint can be a cable uptake and release device.

A system and method for a planar positioning system for an output member, the system having a pair of x-coordinate linear carriages and a pair of y-coordinate linear carriages. The system has a guide mechanism for the pair of x-coordinate linear carriages and the pair of y-coordinate linear carriages. The system has a plurality of movement and constraining cables extending from the pair of x-coordinate linear carriages and the pair of y-coordinate linear carriages to the output member for driving the output, wherein the pair of x-coordinate linear carriages and the output member move in sync in the x-direction and the pair of y-coordinate linear carriages and the output member move in sync in the y-direction. A restraint mechanism restrains the output member in an additional degree of freedom besides the x- and y-directions. The restraint can be a cable uptake and release device.

Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

A platform comprises a base platform, a linear motor is provided on the base platform and connected with an air flotation platform, a bearing platform is provided below the air flotation platform, a plurality of shock absorption assemblies are embedded in the base platform and arranged at intervals below the bearing platform, the shock absorption assembly comprises a bottom plate, shock absorption columns are symmetrically provided on an upper end of the bottom plate, a piston is cooperatively arranged in the shock absorption column, a cavity is formed between a bottom end of the piston and an inner wall of the shock absorption column, a sliding rod is fixed on an upper end of the piston, and an assembly joint is connected to a top end of the sliding rod and to a bottom end of the bearing platform.

One pair each of a Y linear motor (a total of four) on the +X side and the X side that drive a reticle stage include one pair each of a stator section (a total of four) and three each of a mover section (a total of six) on the +X side and the X side. In this case, the three each of the mover sections on the +X side and the X side configure one each of a mover. The mover section located in the center in the Z-axis direction of each of the movers is used in common by each pair of the Y linear motors. Therefore, the weight of the mover section (reticle stage) of the reticle stage device is reduced, which allows a higher acceleration. Further, the mover section located in the center in the Z-axis direction of each of the movers coincides with a neutral plane of the reticle stage.

A system and method for a planar positioning system for an output member, the system having a pair of x-coordinate linear carriages and a pair of y-coordinate linear carriages. The system has a guide mechanism for the pair of x-coordinate linear carriages and the pair of y-coordinate linear carriages. The system has a plurality of movement and constraining cables extending from the pair of x-coordinate linear carriages and the pair of y-coordinate linear carriages to the output member for driving the output, wherein the pair of x-coordinate linear carriages and the output member move in sync in the x-direction and the pair of y-coordinate linear carriages and the output member move in sync in the y-direction. A restraint mechanism restrains the output member in an additional degree of freedom besides the x- and y-directions. The restraint can be a cable uptake and release device.

Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

A machine tool including: a table disposed on a saddle movable along an X-axis; a pair of linear motors that moves the table along a Y-axis; position detectors that detect a first position and a second position of the table on the Y-axis; a pair of guide rails attached to the saddle; and four bearings engaged with the pair of guide rails, is provided. The machine tool includes a connecting unit connecting the table to the four bearings such that the table is rotatable relative to the four bearings, and a control unit that controls the pair of linear motors on the basis of the first and second positions.

A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.