METHOD OF MANUFACTURING AN OBJECT WITH MICROCHANNELS PROVIDED THERETHROUGH

Abstract

This invention relates to a method of manufacturing an object with microchannels provides therethrough, and more particularly, but not exclusively, to a method of manufacturing a micro heat exchanger with microchannels provided therethrough. The method includes the steps of providing a metal base layer made from a first metal; forming a plurality of spaced apart ridges, made from a second metal, on the base layer; depositing more of the first metal onto the ridges in order to cover the ridges; and re moving the ridges using a chemical etching process so as to produce microchannels in a body made of the first metal.

Claims

1.-29. (canceled)

30. A method of manufacturing an object with microchannels provided therethrough, the method comprising the steps of: providing a metal base layer made from a first metal; forming a plurality of spaced apart ridges, made from a second metal, on the base layer by depositing the second metal onto the base layer by way of a cold spraying process; depositing more of the first metal onto the ridges in order to cover the ridges; and removing the ridges using a chemical etching process so as to produce microchannels in a body made of the first metal.

31. The method of claim 30, wherein the second metal is deposited through a mask having parallel and spaced apart slots provided therethrough, in order to form the plurality of spaced apart ridges on the base layer.

32. The method of claim 30, wherein a sequence of depositing the first metal and the second metal is repeated until a plurality of layers of ridges have been formed before the ridges are removed by way of chemical etching, so as to form a three dimensional network of microchannels in the first metal matrix.

33. The method of claim 30 further comprising a step of removing upper zones of the ridges before the step of depositing more of the first metal onto the ridges in order to cover the ridges.

34. The method of claim 30 further comprising the steps of: depositing more of the first metal onto the ridges in order to fill up a space between the ridges; and removing upper zones of the ridges, as well as the corresponding first metal located between the ridges; before the step of depositing more of the first metal onto the ridges in order to cover the ridges.

35. The method of claim 33, wherein the upper zones of the ridges, the first metal layer, or both, are removed by grinding.

36. The method of claim 30, wherein the ridges are substantially triangular in cross-section.

37. The method of claim 36, wherein the ridges are substantially trapezoidal in cross-section once the upper zones or apexes of the ridges have been removed.

38. The method according to claim 30, wherein the ridges are of elongate configuration.

39. The method according to claim 30, wherein the ridges are parallel relative to one another.

40. The method according to claim 30, wherein the metal base layer comprises a solid metal substrate made from the first metal.

41. The method according to claim 30, wherein the metal base layer is formed by depositing one or more layers of the first metal by way of a surface coating process.

42. The method according to claim 30, wherein the first metal comprises copper, gold, silver, nickel, aluminium or any combination thereof.

43. The method according to claim 30, wherein the second metal comprises aluminium, zinc, copper, or any combination thereof.

44. The method according to claim 42, wherein the second metal comprises aluminium, zinc, copper, or any combination thereof.

45. The method according to claim 30, wherein the first metal comprises copper and the second metal comprises aluminium.

46. A micro heat exchanger manufactured by providing a metal base layer made from a first metal; forming a plurality of spaced apart ridges, made from a second metal, on the base layer by depositing the second metal onto the base layer by way of a cold spraying process; depositing more of the first metal onto the ridges in order to cover the ridges; and removing the ridges using a chemical etching process so as to produce microchannels in a body made of the first metal.

47. The method of claim 34, wherein the upper zones of the ridges, the first metal layer, or both, are removed by grinding.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0057] A preferred embodiment of the invention is described by way of a non-limiting example, and with reference to the accompanying drawings in which:

[0058] FIG. 1 is a representation of the thermal efficiency of a plurality of heat transfer mechanisms known in the art;

[0059] FIG. 2 is a schematic illustration of a micro-fluidic cooling system as is known in the art, and which incorporates a micro heat exchangers having microchannels provided therethrough;

[0060] FIG. 3 provides a breakdown of microfabrication technologies known in the art;

[0061] FIG. 4 shows the setup of a cold spray process used in the method of this invention, and in particular the cold spray process as configured to deposit a first metal used in the method;

[0062] FIG. 5 shows the setup of the cold spray process used in the method of this invention, and in particular the cold spray process as configured to deposit a second metal used in the method;

[0063] FIG. 6 shows the steps of the method in accordance with the invention, utilizing the cold spray setups of FIGS. 4 and 5;

[0064] FIG. 7a is a photograph of a cross-section through the manufactured object in an intermediate state, before the second metal has been removed from the object;

[0065] FIG. 7b is a photograph of a cross-section through the manufactured object in a final state, once the second metal has been removed from the object, and in which trapezoidal microchannels are visible;

[0066] FIG. 8a shows the geometry of the heat sink with microchannels provided therethough based on the manufactured heat sink of FIG. 7b;

[0067] FIG. 8b shows a computational model of the heat sink of FIG. 8a; and

[0068] FIG. 9 depicts the temperature distribution through the heat sink achieved by way of a computational simulation.

DETAILED DESCRIPTION OF INVENTION

[0069] Before any embodiments of the invention are explained in detail, it is to be understood that the invention is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the following drawings. The invention is capable of other embodiments and of being practiced or of being carried out in various ways. Also, it is to be understood that the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting. The use of “including,” “comprising,” or “having” and variations thereof herein is meant to encompass the items listed thereafter and equivalents thereof as well as additional items. The terminology includes the words specifically mentioned above, derivatives thereof, and words or similar import. It is noted that, as used in this specification and the appended claims, the singular forms “a,” “an,” and “the,” and any singular use of any word, include plural referents unless expressly and unequivocally limited to one referent. As used herein, the term “include” and its grammatical variants are intended to be non-limiting, such that recitation of items in a list is not to the exclusion of other like items that can be substituted or added to the listed items.

[0070] Referring to the drawings, in which like numerals indicate like features, a non-limiting example of a method of manufacturing an object provided with microchannels therethrough in accordance with one embodiment of the invention is generally indicated by reference numeral 10.

[0071] In this particular embodiment, a cold spray technique is used as a material deposition methodology. Cold spraying is one of the most recent surface coating innovations through which it is possible to coat several metals by exposing a metallic or dielectric substrate to a high velocity (300-1200 m/s) jet of small (5-50 μm) particles accelerated by a supersonic stream of compressed and preheated gas (Papyrin et al., 2007).

[0072] During the cold spraying process, the gas temperature is always lower than the melting point of the particle's material, so, upon impact on the substrate, these high-velocity ‘cold’ particles deform plastically and bond with the underlying material resulting in coating formation of the particles in their solid state. The deposition process takes place at temperature far below the melting point of the metal powders, and cold spraying is, therefore, a solid state deposition process that provides distinctive advantages when compared to the traditional thermal spraying processes. These advantages include (Papyrin et al. 2007): high thermal/electrical conductivity of coatings; minimal oxidation and undesirable phases changes in coatings; retention of initial materials properties; low thermally induced residual stresses; capability to spray thermally sensitive materials; capability of coating highly dissimilar materials' combinations; needs minimum substrate surface preparation; high productivity due to high powder feed rate, automation and process adjustability; and a cost effective process due to high deposition efficiencies for many materials. As a result of these advantages, cold spraying has been selected to be used for the development of a novel method for the fabrication of microchannels.

[0073] Two cold spraying configurations are utilised during the method in accordance with the invention, and are shown in FIGS. 4 and 5.

[0074] FIG. 4 shows a cold spraying setup 20 where a gun 21 ejects a jet of a first metal powder 23, which is then deposited onto a substrate 22. The distance between the gun 21 and the substrate (SD.sub.GS) is referred to as the standoff distance between the gun 21 and the substrate 22. In this setup no mask is provided between the gun 21 and the substrate 22.

[0075] FIG. 5 shows a further cold spraying setup where a gun 31 ejects a jet of a second metal powder 33, which is then deposited onto a substrate 32. However, in this case the jet 33 passes through a mask 34 having predetermined openings (in the form of spaced apart, parallel, elongate slots) provided therethrough, and the coating on the substrate 32 is therefore not uniform. Instead, a plurality of discrete ridges 35, or hillocks, are formed on the substrate 32. In this setup, the distance between the gun 31 and the mask 34 (SD.sub.GM) is referred to as the standoff distance between the gun 31 and the mask 34, and the distance between the mask 34 and the substrate 32 (SD.sub.MS) is referred to as the standoff distance between the mask 34 and the substrate 32. These two cold spraying setups are used in combination during the method that will now be described in more detail below.

[0076] Generically, the method (depicted by sequence 10 in FIG. 6) comprises a number of iterative sequences, and commences by the deposition of a first material 23 (for example copper) to form a first substrate using the setup 20 described with reference to FIG. 4. Next, a second material 33 (for example aluminium) is deposited onto the first substrate 22 using the setup 30 described with reference to FIG. 5. In this step the material 33 is deposited through a mask 34, resulting in the formation of a plurality of spaced apart and discrete ridges or hillocks 35 formed on the first substrate 22. These ridges or hillocks 35 are generally triangular when viewed in cross-section. Thereafter, a further layer(s) of the first material 23 is deposited onto the workpiece to a level where it covers at least part of the ridges or hillocks 35. It is envisaged that the further layer may even cover the ridges or hillocks 35 in totality. During a subsequent grinding step 40, a grinding tool 41 is used to grind the protruding tips 35.1 of the ridges or hillocks 35 to a predetermined height, in order for the new upper edge 35.2 of the ridges 35 to define upper ends of now trapezoidal shaped ridges or hillocks 35. A further layer of the first material is subsequently deposited onto the work piece, and the sequence is repeated until a desired number of trapezoidal rows of ridges or hillocks 35 have been formed.

[0077] Once the above process has been completed, the second material is de-alloyed and as such removed from the work piece using a suitable chemical process. For example, if the base material (first material) is copper, and the intermediate material (second material) is aluminium, the aluminium can be removed using 30% diluted hydrochloric acid. In this way a copper body is formed, having a plurality of trapezoidally cross-sectioned microchannels provided therethrough.

Specific Example

[0078] A specific, but non-limiting, example of how the above method was put into practice is now described in more detail below.

[0079] In order to develop the new method for microfabrication of microchannels, the following tasks were carried out: [0080] suitable metal powders were selected; [0081] cold spraying process parameters were optimized; [0082] alloying was done using cold spraying processes (as shown in FIGS. 4 and 5); [0083] de-alloying was effected in order to fabricate the microchannels; and [0084] products were characterised.

[0085] The following materials and equipment were used: [0086] metal powders (Copper matrix former as a first metal; Aluminium as a second metal; a microchannels forming agent; and Alumina grit blast for activation of substrate surface); [0087] consumable materials: distilled water, and dilute hydrochloric acid (30%) for de-alloying; and [0088] equipment (cold spraying equipment from Centerline, Canada; slotted mask; surface grinder; and an optical microscope).

[0089] The optimisation of the cold spraying fabrication process was conducted to establish optimal spray parameters. The process parameters considered during laboratory experiment included: [0090] gas temperature (T.sub.0); [0091] gas pressure (P.sub.0); [0092] standoff distance between gun and mask (SDGM); [0093] standoff distance between the substrate and mask (SDSM); [0094] standoff distance between gun and substrate (SDGS); [0095] traversing speed of the gun (V); and [0096] powder feed rate (F).

[0097] During these trials, aluminium (Al) powder was sprayed through the mask onto the activated copper (Cu) substrate to fabricate the Al ridges. The optimised parameters from this process were recorded when the width of the fabricated Al ridges were less or equal to 120% the width of the slots of the mask. Also, at this point, it was ensured that the geometric profile of the ridges was consistent and that there was no overspray of Al powder.

[0098] Furthermore, during optimisation of Cu deposition, Cu was sprayed without the mask, and the optimised parameters were recorded when rapid build-up of Cu coating occurred and the colour of the coating did not change to brown. During copper cold spray coatings, the coating surface present different colors attributed to the different surface temperatures of coatings deposited at different standoff distances. A relatively high temperature causes the oxidation and this could be observed at a shorter standoff distance. In this example, because the colour didn't change to brown, it indicates a good coating.

[0099] In all these trials, single factor variation of process parameters was implemented. The optimal CS process parameters are shown in Table 1.

TABLE-US-00001 TABLE 1 Optimal process parameters for Al and Cu. T.sub.0 P.sub.0 SD.sub.GM SD.sub.SM SD.sub.GS V F Powder (° C.) (bars) (mm) (mm) (mm) (mm/s) (%) Al 390 8 25 2 — 10 5 Cu 400 9.5 — — 10 10 40

[0100] The next step in the new method consists in the microfabrication of microchannels using the alloy-de-alloy concept. In this process, a cold spraying process was used to alloy Al into a Cu matrix and de-alloying was accomplished by etching specimens in acid to selectively dissolve the Al. Initially, the Cu substrate was activated by grit blasting using Alumina powder and spray parameters for Al as shown in Table 1. To alloy, the spray parameters given in Table 1 were used to alternately deposit Al and Cu according to the process sequence illustrated in FIG. 6.

[0101] The alloying steps consisted of the following steps: [0102] 1. Spray three layers Cu powder; [0103] 2. Through the slotted mask, spray one layer of Al powder to fabricate the Al ridges; [0104] 3. Without the mask, spray three layers of Cu to burry bottom potion of the ridges. This determines the depth of the trapezoidal microchannels; [0105] 4. Grind off the protruding tips of the Al coatings to make the trapezoidal ridges; [0106] 5. Repeat step 1 to 4 until there are three layers of Al ridges; [0107] 6. Without the mask, spray three layers of Cu to cover the top layer of Al ridges; and [0108] 7. Lightly grind the periphery of the specimen to expose the cross sections of the Al ridges.

[0109] The de-alloying steps consisted of the following steps: [0110] 8. Immerse the specimen in 30% dilute hydrochloric acid to dissolve the Al ridges; [0111] 9. Repeat step 8 until there are no more bubbles forming around the specimen; and [0112] 10. rinse the specimen in distilled water.

[0113] The process was followed by the analysis of the microfabricated channels. The microfabricated specimens were sectioned, metallographically polished and then characterised for morphology by taking images using the Optical Microscope (OM). The geometric dimensions of the microchannels were measured using the OM. Ten measurements each side were taken and averaged. These measurements were used to computationally model the microchannels to mimic the micro heat sink. To evaluate the cooling capability of the modelled micro heat sink, de-ionised water was chosen as the cooling fluid flowing through the microchannel. Flow was assumed to be laminar and the forced convection heat transfer coefficient which was calculated under these conditions was 7,246 W/m.sup.2.Math.K. Heat flux densities of 100, 200, 300, 400, and 500 W/m.sup.2 which represent the heat fluxes emitted by the microprocessors to the micro heat sink were applied. The ambient temperature was taken to be 20° C.

[0114] Based on process route presented above, the Al ridges were alloyed inside the Cu matrix and the insertion before de-alloying is shown in FIG. 7a. After de-alloying, a three-layered porous Cu microchannel with trapezoidal sections was fabricated, and their cross section is shown in FIG. 7b. The average dimensions of each side of these microchannels were acquired and are shown in Table 2. These measurements related to the geometric structures of the modelled micro heat sinks are shown in FIG. 8a. FIG. 8b shows the computational model of the Cu micro heat sink. Furthermore, the simulated variation of heat flux with junction and surface temperature of the Cu micro heat sink are shown in Table 3, and FIG. 9 depicts the temperature profile on the surface of the micro heat when the maximum heat flux of 500 W/m.sup.2 is applied to the micro heat sink by the microprocessor.

TABLE-US-00002 TABLE 2 Geometric dimensions for fabricated microchannels (relate to FIG. 8a) Dimension a b c d e h w l t t.sub.w μm 1091 443 300 400 650 436 4 132 7500 2708 870

TABLE-US-00003 TABLE 3 Variation of heat flux with temperature of the Cu— micro heat sink Heat Flux Q W/cm.sup.2 100 200 300 400 500 Junction Temp (° C.) 22 22 25 27 28 Surface Temp (° C.) 20 20 20 20 20

[0115] In addition to the examples given above, there are several other combinations of metals that could be used in this respect including gold, silver and nickel. Nickel has already been sprayed combined with other metals, while silver can also be sprayed. From these results, it is probable that other metals such as gold can be sprayed when combined with other metals such as copper or nickel as binders. Spraying of metal mixtures is also possible. Further, besides aluminium, several other metals can be preferentially etched out of the matrix or their combinations of metals as illustrated in the following pairs:

TABLE-US-00004 Second (removed) First (base) material material De-alloying chemical Gold & Copper Aluminium Sulfide solutions Gold & Copper Zinc NaOH, Na2SO4, and salty NaCl Silver Copper Hydrofluoric acids Silver Aluminium Hydrochloric acid Nickel Zinc Dilute Nitric Acid Nickel Aluminium Sulphuric Acid Copper Aluminium Hydrochloric acid Copper Zinc Hydrochloric acid Aluminium Zinc Hydrochloric acid

[0116] Currently available commercial techniques, such as stereolithography, selective laser sintering, or fused deposition manufacturing, are able only to produce prototypes using wax, plastic, nylon, paper, polycarbonate materials, etc. However, material melting and solidification created difficulties that have hindered the widespread adoption of these techniques. There are many difficulties that must be addressed when attempting to use these techniques with materials with high melting temperature such as metal. Also, their applicability is restricted by high costs, as well as the production of toxic waste. The chemical etching method has very low productivity and the process does not lend itself to precise control of the geometric dimensions of the fabricated microchannels. Micro-machining of microchannels is particularly suitable for low volume production and has drawbacks such as limited tool geometries which make it difficult to fabricate microchannels with sizes below 500 microns. Consequently, the newly developed method for fabrication of microchannels has different process routes to those of stereolithography, chemical etching and micro-machining processes. In addition, Cu/Al is one of the preferred embodiments due to the fact that Copper is ideally suited to cold spraying and the resulting coating possesses excellent electrical and thermal conductivity.

[0117] The new method is a hybridisation of additive and subtractive microfabrication and so this new method could be added as a new group of microfabrication technological process.

[0118] The simulation of the fabricated microchannels indicate very high heat transfer capability since they can keep the mean temperature of the microprocessor at 4° C. above ambient temperature, and which it is far below the critical temperatures of 55-100° C. required for the commercially available microprocessors (Mihai 2011). The cooling capability is also in line with the microfluidic cooling systems that have superior thermal extraction capability compared to any other thermal solution (Upadhya et al. 2006).

[0119] In addition, and unlike other microfabrication technologies presented in the published literature, this new method for the fabrication of microchannels offers: [0120] repeatability of the geometric profile requirements for specific microchannels' design; [0121] high production flexibility since the process parameters could be independently altered which result in microchannels with different geometric dimensions; and [0122] a very short throughput time, thereby making it a very strong candidate for mass production of micro heat sinks.

[0123] It will be appreciated that the above is only one embodiment of the invention and that there may be many variations without departing from the spirit and/or the scope of the invention.

REFERENCES

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