Method to match SOI transistors using a local heater element

Abstract

An integrated circuit with a matched transistor pair with a matching resistance heater coupled to each transistor of the matched transistor pair. A method for forming a matching resistance heater. A method for operating an SOI integrated circuit containing a matched transistor pair with a matching resistance heater coupled to each transistor of the matched transistor pair.

Claims

1. A process of forming an SOI integrated circuit, comprising the steps: forming a first transistor and a second transistor in said SOI integrated circuit where said first transistor and said second transistor form a matched transistor pair; forming a first matching resistance heater coupled to said first transistor but not the second transistor so as to alter the threshold voltage of the first transistor; and forming a second matching resistance heater coupled to said second transistor but not the first transistor so as to alter the threshold voltage of the second transistor.

2. A process of forming an SOI integrated circuit, comprising the steps: forming a first transistor and a second transistor in said SOI integrated circuit where said first transistor and said second transistor form a matched transistor pair; forming a first matching resistance heater coupled to said first transistor; and forming a second matching resistance heater coupled to said second transistor, wherein said step of forming a first matching resistance heater further comprises the steps: forming a diffusion in contact with at least one of a source and a drain of said first transistor where a doping of said diffusion is opposite to the doping of said source and said drain; doping said diffusion; blocking silicide from a diode between said diffusion and said at least one of said source and said drain; and blocking silicide from a center portion of said diffusion to form a resistor body of said first matching resistance heater.

3. The process of claim 2 where said SOI transistor is nmos and said resistor is p-type single crystal silicon with a resistivity between 100 ohms and 10 kohms.

4. The process of claim 1 where said step of forming a first matching resistance heater further comprises the steps: forming a polysilicon resistor geometry at the same time a gate geometry of said first transistor formed and over an active geometry of said first transistor and adjacent to at least one of a source and a drain said first transistor; doping said polysilicon resistor geometry to a desired resistivity; and blocking silicide formation over a body of said polysilicon resistor geometry.

5. The process of claim 4, wherein said SOI transistor is nmos and said polysilicon resistor has a resistivity between 100 ohms and 10 kohms.

6. The process of claim 1 where said step of forming a first matching resistance heater further comprises the steps: forming a polysilicon resistor geometry which overlies a gate geometry of said SOI transistor; doping said polysilicon resistor geometry to a desired resistivity; and blocking silicide formation over a body of said polysilicon resistor geometry.

7. The process of claim 6, wherein said polysilicon resistor has a resistivity between 100 ohms and 10 kohms.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a circuit diagram of a conventional 3-bit ADC.

(2) FIG. 2 is a circuit diagram of a comparator circuit according to an embodiment of the invention.

(3) FIG. 3 is a plan view of a transistor with a matching resistance heater formed according to an embodiment of the invention.

(4) FIGS. 4A and 4B are plan views of a transistor with a matching resistance heater formed according to an embodiment of the invention.

(5) FIG. 5A is a plan view and FIG. 5B is a cross sectional view of a transistor with a matching resistance heater formed according to an embodiment of the invention.

(6) FIG. 6 is a flow diagram of the operation of an integrated circuit according to an embodiment of the invention.

DETAILED DESCRIPTION

(7) The present invention is described with reference to the attached figures, wherein like reference numerals are used throughout the figures to designate similar or equivalent elements. The figures are not drawn to scale and they are provided merely to illustrate the invention. Several aspects of the invention are described below with reference to example applications for illustration. It should be understood that numerous specific details, relationships, and methods are set forth to provide an understanding of the invention. One skilled in the relevant art, however, will readily recognize that the invention can be practiced without one or more of the specific details or with other methods. In other instances, well-known structures or operations are not shown in detail to avoid obscuring the invention. The present invention is not limited by the illustrated ordering of acts or events, as some acts may occur in different orders and/or concurrently with other acts or events. Furthermore, not all illustrated acts or events are required to implement a methodology in accordance with the present invention.

(8) An embodiment is illustrated in FIG. 2 using a comparator circuit. An analogy voltage 2030 which controls the gate voltage of nmos transistor 2028 may be compared to a reference voltage 2034 which controls the gate voltage of nmos transistor 2036. If the two nmos transistors, 2028 and 2036 are matched perfectly, when the analog voltage 2030 is higher than the reference voltage 2040, nmos transistor 2028 will be turned on harder than nmos transistor 2036 causing the voltage on the drain of nmos transistor 2028 to fall and the voltage on the drain of nmos transistor 2036 to rise. The rising voltage on the drain of nmos transistor 2036 causes the gate voltage of pmos transistors 2044 and 2046 to rise turning these transistors off. The drain of nmos transistor 2028 is pulled low which pulls the gate of pmos transistor 2040 low turning pmos transistor 2040 on pulling Vout 2042 up to a high voltage (logic state “1”). Conversely if the analogy input voltage 2030 is lower than the reference voltage 2036, the drain of nmos transistor 2038 goes high taking the gate of pmos transistor 2040 high, which turns pmos transistor 2040 off. Vout 2042 is then pulled to a low voltage (logic state “0”) by nmos transistor 2048.

(9) If nmos transistors 2028 and 2036 are not perfectly matched, an incorrect logic state may result. For example, if the threshold voltage (vt) of transistor 2034 is 20 mv higher than the vt of transistor 2028, an analog signal 2030 that is actually up to about 19 mV higher than the reference voltage 2034 may output a “0” instead of a “1”.

(10) The number of bits in a flash analog to digital converter is limited by the matching accuracy of the comparator circuits. One way to improve matching between the comparator transistors is to increase the size of the input pair transistors. The impact of small differences in transistor parameters such as vt, gate length, transistor width, etc. are less pronounced for large transistors. However, larger transistors take up more area which is costly and also add capacitance which degrades performance especially at high frequency operation.

(11) Transistor performance may be changed by changing the transistor temperature. The threshold voltage (vt) of a typical transistor may change by as much as 1 mV per 1 degree change in temperature. Tuning transistor performance is especially effective for SOI transistors which are thermally insulated because the buried oxide (BOX) upon which SOI transistors are constructed is an excellent thermal insulator. In this way, the matching of comparator transistors may be significantly improved with little to no increase in transistor area.

(12) For example, as shown in FIG. 2, heater element 2032 may be used to adjust the performance of nmos transistor 2028 and heater element 2038 may be used to adjust the performance of nmos transistor 2036.

(13) A flow diagram illustrating embodiment matching of a matched transistor pair during operation is shown in FIG. 6. In step 1 6002 a reference voltage 2034 is applied to a first input (gate of transistor 2036 in FIG. 2). In step 2 6004 a ramped signal is applied to the other input (analog input 2030 in FIG. 2) to determine when Vout 2042 changes from “0” to “1”. The value of the ramped signal voltage at which Vout 2042 changes is called the trip voltage. The offset voltage is the difference between the trip voltage and the reference voltage. If the two transistors are perfectly matched, the trip voltage equals the reference voltage 2034 so the offset voltage is zero. For a non-zero offset voltage, the matching heater current that is needed to raise the temperature of the transistor to compensate the offset voltage is calculated in step 6006. In step 6008, the calculated current level is then forced through the appropriate matching heater element to raise the vt of the transistor with the lower vt so that it will match the other transistor. For example, If the input signal 2030 is higher than the reference voltage 2036 when Vout 2042 trips, heater element 2038 may be used to increase the temperature of nmos transistor 2036 so that its vt matches the vt of 2028. If, on the other hand, the input signal 2030 is lower than the reference voltage 2036 when Vout 2041 trips, heater element 2032 may be used to increase the temperature of nmos transistor 2028 so that its vt matches the vt of 2036. During operation of the comparator, the recalibration may be performed periodically as shown in step 6010 to ensure the nmos comparison transistors 2028 and 2036 continue to be matched.

(14) An example embodiment SOI nmos transistor with a resistance heater element is shown in FIG. 3. The nmos SOI transistor consists of a transistor gate 3006 formed over p-type silicon into which an n+ source 3008 diffusion and an n+ drain 3002 diffusion are formed. A p-type resistance heater 3010 is formed adjacent to the n+ source. Silicide may be formed over the source 3008 and drain 3002 of the transistor and also over the heads 3018 and 3022 of the resistance heater 3010 where the contacts 3012 and 3014 are formed. Silicide is blocked from the body of the resistance heater 3020 and also blocked from the diode junction region 3024 between the p-type resistance heater 3010 and the n+ diffusion 3008 to prevent a short. Current may be forced through the resistance heater 3010 through contacts 3012 and 3014 to raise the temperature of the transistor to the desired level. In an example embodiment, with a mismatch of 6 mv between the two comparator transistors 2028 and 2036, a 1° C. change in transistor temperature changes the vt by 1.5 mV. To match the transistor vts, a temperature rise of about 4° C. is needed. In the embodiment the change in temperature of the SOI silicon substrate is about 2E5° C./watt so about 2E-4 watts may change the transistor temperature by 4° C. The resistance of resistor 3010 in this embodiment is about 5 kohm. When 1 V is applied across the 5 kohm resistor about 2E-4 watts is generated.

(15) Another embodiment with a matching resistance heater is illustrated in FIGS. 4A and 4B. In this embodiment, a polysilicon resistor 4010 is formed at the same time as the transistor gate 4006. The resistor body 4020 is blocked during silicidation whereas the resistor heads 4018 and 4022 where contacts 4008 and 4012 are formed may be silicided. The temperature of the transistor may be raised a desired amount by forcing an appropriate current through the polysilicon resistor. This resistor may be added with no additional processing cost for a baseline cmos process flow that includes silicide block.

(16) An additional embodiment matching heater is illustrated in FIGS. 5A and 5B. In a double poly integrated circuit flow that includes silicide block, matching heater element 5010 may be formed on top of the transistor gate 5006 with no additional processing cost. Top down view in FIG. 5A and cross-sectional view in FIG. 5B shows the matching heater element 5010 on top of the transistor gate 5006, with a layer of interpoly dielectric 5018 in between. Current may be forced through resistor 5010 through contacts 5008 and 5012 to raise the temperature of the transistor by the desired amount.

(17) While the embodiments have been illustrated using nmos transistors in a comparator circuit, the instant invention also may be used to match transistors in other circuits such as the input pairs of operational amplifiers or current mirrors. Additionally, the embodiments are illustrated by forming a matching heater element on the source or drain of a transistor, but matching heater elements may be formed on both the source and drain of a transistor if desired.

(18) While various embodiments of the present invention have been described above, it should be understood that they have been presented by way of example only and not limitation. Numerous changes to the disclosed embodiments can be made in accordance with the disclosure herein without departing from the spirit or scope of the invention. Thus, the breadth and scope of the present invention should not be limited by any of the above described embodiments. Rather, the scope of the invention should be defined in accordance with the following claims and their equivalents.