MEMS MICRO-MIRROR ARRAY LASER BEAM STEERER FOR SIMULTANEOUS ILLUMINATION OF MULTIPLE TRACKED TARGETS

Abstract

A multiple target tracker and beam steerer utilizes a MEMs MMA for beam steering to simultaneously illuminate multiple tracked targets per frame. The MMA can be adaptively segmented to change the number of output beams, and the power in a given beam, based on a list of tracked targets, range to targets, threat level etc. The MMA can be adaptively configured to simultaneously perform one or more Designation, Range Finding and Active Imaging modes on the same or different tracked targets. The MMA can be segmented so that each segment includes a plurality of mirrors to “oversample” the input beam. The mirrors in a given segment may be controlled to provide wavefront correction to the corresponding output beam.

Claims

1. A multiple target tracker and laser beam steerer, comprising: a video camera configured to acquire video images of a scene within a field-of-view (FOV) within a frame time; a video tracker configured to process the video images within at least a cue-box within the FOV and output a list of multiple tracked targets and corresponding angles-to-targets within the frame time; a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) comprising a plurality of independently and continuously controllable mirrors responsive to command signals to tip and tilt each mirror about first and second orthogonal axes, respectively; a laser system configured to transmit one or more input laser beams to illuminate the MEMS MMA; and one or more processors configured to process the list of tracked targets and corresponding angles-to-targets and generate command signals to partition the MEMS MMA into a plurality of segments each including one or more mirrors to generate a plurality of output laser beams, wherein the one or more mirrors within each segment are responsive to command signals to simultaneously steer the output laser beam to a corresponding angles-to-target to simultaneously illuminate multiple tracked targets per frame over at least the entire cue-box.

2. The multiple target tracker and laser beam steerer of claim 1, wherein the MEMS MMA is capable of steering each output laser beam over a steering range of at least −10°×+100 in tip and tilt at a steering rate of at least 1 KHz.

3. The multiple target tracker and laser beam steerer of claim 1, wherein said one or more processors are configured to generate command signals to adaptively partition the MEMS MMA to change the number of segments and corresponding number of output laser beams.

4. The multiple target tracker and laser beam steerer of claim 1, wherein said one or more processors are configured to generate command signals to adaptively partition the MEMS MMA to combine or split segments and output beams to vary the power level of a given output beam.

5. The multiple target tracker and laser beam steerer of claim 1, wherein the laser system comprises a Designator source at a first wavelength λ.sub.1, a Range Finder source at a second wavelength λ.sub.2 and an Active Imaging source at a third wavelength λ.sub.3 configured to illuminate the MEMS MMA, wherein λ.sub.1 is different than λ.sub.2 and λ.sub.3, wherein the one or more processors are configured to control the plurality of output laser beams so that a combination of two or more modes selected from Designation, Range Finding and Active Imaging are simultaneously performed on the same or different tracked targets.

6. The multiple target tracker and laser beam steerer of claim 5, wherein the MEMS MMA is partitioned into at least three sections, wherein said Designator source illuminates the mirrors in a first section, the Range Finder source illuminates the mirrors in a second section, and the Active Imaging source illuminates the mirrors in the third section, wherein said one or more processors generate command signals to partition each selected section into one or more segments to simultaneously steer a plurality of output beams such that two or more modes are simultaneously performed on the same or different tracked targets.

7. The multiple target tracker and laser beam steerer of claim 6, wherein the mirrors in the first section have a reflective coating at the first wavelength λ.sub.1, the mirrors in the second section have a reflective coating at the second wavelength λ.sub.2 and the mirrors in the second section have a reflective coating at the third wavelength λ.sub.3.

8. The multiple target tracker and laser bam steerer of claim 7, wherein the MEMS MMA is partitioned into a fourth section, further comprising a multi-spectral source having a bandwidth that spans a plurality of wavelengths λ.sub.4, . . . λ.sub.N that illuminates the mirrors in the fourth section.

9. The multiple target tracker and laser beam steerer of claim 8, wherein the mirrors in the segments in the fourth section have different reflective coatings at the plurality of wavelengths λ.sub.4, . . . λ.sub.N such that each output beam from the fourth section is multi-spectral.

10. The multiple target tracker and laser beam steerer of claim 5, wherein the Range Finder source and Active Imaging source are a common source where λ.sub.2=λ.sub.3.

11. The multiple target tracker and laser beam steerer of claim 5, wherein the Designator, Range Finder and Active Imaging sources illuminate the entire MEMS MMA, wherein said one or more processors generate command signals to partition the MEMS MMA into a plurality of segments and to simultaneously steer a plurality of output beams such that two or more modes are simultaneously performed on the same or different tracked targets.

12. The multiple target tracker and laser beam steerer of claim 5, wherein the Designation source provides a pulsed laser beam with a pulse repetition rate (PRF) in which a defined pattern of pulses form a designation code; wherein the Range Finder source provides a low PRF pulsed laser beam, further comprising a detector configured to sense reflected high peak power laser energy over at least the entire cue-box, wherein the one or more processors process the sensed reflected laser energy to produce a range estimate for each of the illuminated targets; and wherein the Active Imaging source provides a high PRF pulsed or CW laser beam, wherein the video camera senses high average power reflected laser energy to generate an active image of the illuminated targets.

13. The multiple target tracker and laser beam steerer of claim 1, wherein at least some of the plurality of output laser beams are at different wavelengths.

14. The multiple target tracker and laser beam steerer of claim 1, wherein a plurality of the mirrors in at least on segment comprise reflective coatings at different wavelengths λ.sub.1, λ.sub.2, . . . λ.sub.N.

15. The multiple target tracker and laser beam steerer of claim 1, wherein each segment comprises a plurality of mirrors, wherein each mirror is independently and continuously controllable to translate in a third axis orthogonal to the plane containing the first and second orthogonal axes, said one or more processors generate command signals for the plurality of mirrors in a given segment to perform wavefront correction or focusing/defocusing on the corresponding output laser beam.

16. The multiple target tracker and laser beam steerer of claim 1, wherein as the time between frames increases the uncertainty in target position and the angle-to-target grows, further comprising translating the mirrors in a segment to slightly defocus the beam as the uncertainty grows to illuminate the target.

17. A multiple target tracker and laser beam steerer, comprising: a video camera configured to acquire video images of a scene within a field-of-view (FOV) within a frame time; a video tracker configured to process the video images within at least a cue-box within the FOV and output a list of multiple tracked targets and corresponding angles-to-targets within the frame time; a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) comprising a plurality of independently and continuously controllable mirrors responsive to command signals to tip and tilt each mirror about first and second orthogonal axes, respectively, and to translate each mirror in a third axis orthogonal to the plane containing the first and second orthogonal axes; a laser system configured to transmit one or more input laser beams to illuminate the MEMS MMA; and one or more processors configured to process the list of tracked targets and corresponding angles-to-targets and generate command signals to partition the MEMS MMA into a plurality of segments each comprising a plurality of mirrors to generate a plurality of output laser beams, wherein the mirrors within each segment are responsive to command signals to tip or tilt to simultaneously steer the plurality of output laser beams to corresponding angles-to-targets to simultaneously illuminate multiple tracked targets per frame over at least the entire cue-box and to translate to correct the wavefront of the output laser beams.

18. The multiple target tracker and laser beam steerer of claim 17, wherein as the time between frames increases the uncertainty in target position and the angle-to-target grows, further comprising translating the mirrors in a segment to slightly defocus the beam as the uncertainty grows to illuminate the target.

19. A multiple target tracker and laser beam steerer, comprising: a video camera configured to acquire video images of a scene within a field-of-view (FOV) within a frame time; a video tracker configured to process the video images within at least a cue-box within the FOV and output a target list of multiple tracked targets and corresponding angles-to-targets within the frame time; a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) comprising a plurality of independently and continuously controllable mirrors responsive to command signals to tip and tilt each mirror about first and second orthogonal axes, wherein, said mirrors in first, second and third sections of the MMA include reflection coatings at discrete wavelengths λ.sub.1, λ.sub.2, and λ.sub.3; a laser system including a Designator source at a first wavelength λ.sub.1, a Range Finder source at a second wavelength λ.sub.2 and an Active Imaging source at a third wavelength λ.sub.3 configured to transmit input laser beams to illuminate the first, second and third sections of the MEMS MMA, respectively, to implement Designating, Range Finding and Active Imaging modes; and one or more processors configured to process the list of tracked targets and corresponding angles-to-targets and generate command signals to partition each of said selected first, second and third sections of the MEMS MMA into one or more segments each comprising one or more mirrors to generate one or more output laser beams for the corresponding mode, wherein the mirrors within each segment are responsive to command signals to tip or tilt to simultaneously steer the output laser beam to a corresponding angle-to-targets to: simultaneously illuminate multiple tracked targets per frame over at least the entire cue-box; adaptively segment a given section of the MEMS MMA to vary the number of output laser beams; or simultaneously perform a combination of two one or more modes selected from Designation, Range Finding and Active Imaging on the same or different tracked targets.

20. The multiple target tracker and laser beam steerer of claim 19, wherein each segment comprises a plurality of mirrors, wherein each mirror translates each in a third axis orthogonal to the plane containing the first and second orthogonal axes, wherein in Active Imaging mode the one or more processors issue command signals to translate the mirrors to correct the wavefront of the corresponding output laser beam for atmospheric distortion.

21. The multiple target tracker and laser beam steerer of claim 19, wherein each segment comprises a plurality of mirrors, wherein as the time between frames increases the uncertainty in target position and the angle-to-target grows, further comprising translating the mirrors in a segment to slightly defocus the beam as the uncertainty grows to illuminate the target.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0019] FIG. 1 is a diagram of a multiple target tracker and laser beam steerer configured to track and simultaneously illuminate multiple targets per frame within a FOV;

[0020] FIGS. 2A and 2B are timing diagram illustrating notional sequences for the tracking and simultaneous laser illumination of multiple targets in multi-modes of operation per frame;

[0021] FIGS. 3A and 3B are block diagrams of an embodiment of the multiple target tracker and beam steerer using an out-of-band video camera for tracking and a tip/tilt/piston MEMs MMA for beam steering;

[0022] FIG. 4 is a diagram of an embodiment of the multiple target tracker and beam steerer in which Designator, Range-Finder, Active Imager and Multi-Spectral Active imager sources illuminate different sections of a MEMS MMA that partitions each section into multiple segments to generate and independently steer multiple output beams to simultaneously prosecute multiple targets with different operational modes;

[0023] FIG. 5 is a diagram of the reflective coatings formed on the mirrors in the different sections of the embodiment in FIG. 4 to enhance the different modes of operation;

[0024] FIG. 6 is a diagram of an embodiment of the multiple target tracker and beam steerer in which Designator, Range-Finder, Active Imager and Multi-Spectral Active imager sources illuminate the entire MEMS MMA that partitions itself into multiple segments to generate and independently steer multiple output beams to simultaneously prosecute multiple targets with different operational modes;

[0025] FIG. 7 is a diagram of the reflective coatings formed on the mirrors in the different sections of the embodiment in FIG. 6 to enhance the different modes of operation; and

[0026] FIGS. 8A through 8E illustrate a mirror with tip/tilt/piston actuation and different tip, tilt and piston actuations of multiple mirrors within a given segment and across segments to steer or wavefront correct an output optical beam.

DETAILED DESCRIPTION OF THE INVENTION

[0027] The present invention describes a multiple target tracker and beam steerer that utilizes a MEMs MMA for beam steering to simultaneously illuminate multiple tracked targets per frame. The MMA can be adaptively segmented to change the number of output beams, and the power in a given beam, based on a list of tracked targets, range to targets, threat level etc. The MMA can be adaptively configured to simultaneously perform one or more Designation, Range Finding and Active Imaging modes on the same or different tracked targets. The MMA can be segmented so that each segment includes a plurality of mirrors to “oversample” the input beam. The mirrors in a given segment may be controlled to provide wavefront correction to the corresponding output beam.

[0028] The steering rate and range as well as steering capability afforded by the MEMS MMA supports various tracker configurations (out-of-band, in-band or dual-band video cameras), LADAR detectors (single pixel or focal plane array) and prioritization of tracked targets to vary the revisit rate (every Nth frame), dwell time (within a single frame) or beam power for an illuminated target. The MEMS MMA can be used to steer a pulsed beam at low or high pulse repetition frequencies (PRFs) or continuous wave (CW) beam. A user interface accepts commands from an operator to select a designation, range finding or active imaging mode, control cue-box size and position within the FOV and target selection. A fourth mode of operation may be multi-spectral active imaging.

[0029] Referring now to FIGS. 1 and 2A-B, an embodiment of a multiple target tracker and beam steerer (“tracker/beam steerer”) 100 for Designation, Range Finding or Active Imaging acquires video images of a scene within a FOV 102 at a frame rate (e.g., 30 Hz) that defines a frame time, processes the video images within at least a cue-box 104 (e.g., a circle or rectangle) within the FOV and outputs a target list 106 of tracked targets T1, T2, T3, . . . 108 and corresponding angles-to-targets within the frame time. The size of cue-box 104 is typically set as a percentage of the FOV 102. The tracker is typically limited to outputting a maximum number of “n” tracked targets on the list. The tracker/beam steerer 100 is suitably mounted on a mechanical gimbal 110 to point its boresight axis 112 in a particular direction e.g., at the center of cue-box 104 or at a selected one of the targets 108 within the cue-box. However, the mechanical gimbal 110 is not required for operation of the tracker/beam steerer system.

[0030] Tracker/beam steerer 100 produces laser spot-beam(s) 114a, 114b, . . . with a low or high PRF or CW, whose spectral band may or may not overlap the spectral band of the passively acquired video images. The tracker/beam steerer 100 processes the target list and corresponding angles-to-targets and generates command signals to steer the laser spot-beams 114a, 114b, . . . to the corresponding angles-to-targets for a given target set using, at least in part, MEMS MMA technology, to simultaneously illuminate multiple tracked targets at the same or different discrete wavelengths per frame. The MEMS MMA may illuminate multiple different target set within a given frame, changing the target composition, or mode(s) of each target set. The tracker/beam steerer 100 generates the command signals to set the revisit rate (e.g., every Nth frame) and dwell time (e.g., the number of pulses per target per frame) of each target based on target prioritization. The steering range, at least −10°×+10° in tip and tilt, and steering rate, at least 1 KHz (<1 millisecond), and steering control afforded by tip/tilt/piston MEMS MMA technology allows for multiple and sequential target tracking per frame over a wide FOV. A sufficient number of pulses can be placed on target to enable target designation, or to improve the accuracy of the range estimate or increase the SNR of the active image. With the MEMS MMA technology, multiple laser beams can simultaneously illuminate multiple tracked targets to simultaneously implement a combination of designation, range finding and active imaging modes on the same or different targets at the same or different discrete wavelengths.

[0031] The ability to steer the laser beam discretely, quickly and finely over a large steering range and to simultaneously generate and steer multiple laser beams greatly expands the trade-space for designing the tracker/beam steerer for designation, range finding or active imaging applications. The MEMS MMA can be adaptively “segmented” to change the number of beams, hence the power in a given beam based on the target list and tracking priorities (e.g. range to target, threat level, etc). For a given output laser beam, the minimum steering speed may be defined as the product of the required steering range, maximum number of targets, number of pulses per illuminated target and PRF, and the frame rate.

[0032] As illustrated in FIGS. 1 and 2A-2B, 5 targets T1, T2, T3, T4 and T5 are positioned in the FOV 102 of tracker/beam steerer 100. Tracker/beam steerer 100 tracks and outputs the list of tracked targets for any target that was acquired in the cue-box 104. Targets T1, T2 and T4 are currently positioned inside cue-box 104. Target T3 was acquired in the cue-box in a previous frame but has left the cue-box. Target T5 has not been acquired (e.g., sensed by the camera and corresponding target data entered into the video/beam steering processing functions).

[0033] As shown in FIG. 2A, the system generates a target set 108 from the target list and selected modes of operation for each frame. The target set may be the entire target list or a subset thereof and may include one or more of the modes of operation including Designation (D), Range Finding (RF), Active Imaging (AI) and Multi-Spectral Active Imaging (AI-MS). A typical MEMS MMA can in theory be segmented to generate a very large number of output laser beams, equal to the number of mirrors in the array, to address the various targets and operating modes. However, the system may choose to select a subset of the target list and modes based on other inputs such as the last range to target, threat level etc. to balance the total number of beams versus the power in a given beam. The MEMS MMA can be segmented into varying sizes to produce output laser beams with varying power levels depending in part on the range to target, threat level etc. The MEMS MMA provides a great deal of flexibility to adapt in real-time to address the multi-target threat.

[0034] As shown in FIG. 2B, the MEMS MMA further adapts the segmentation to change the target set 108 within a frame. For example, prioritization may determined such that tracked targets currently within the cue-box are revisited every frame and tracked targets outside the cue-box are revisited every Nth frame. In every Nth frame, the dwell time of a tracked target in the cue-box is set at a nominal value (e.g., 10 pulses) whereas the dwell time of a primary tracked target along boresight is set at a higher value (e.g., 15 pulses) and the dwell time of tracked target outside the cue-box is set at a lower value (e.g., 5 pulses). In the other N−1 frames, the pulses previously allocated to those tracked target outside the cue-box may be allocated to the primary target. This is example is merely illustrative of the capability afforded by MEMS MMA beam steering to prioritize the revisit rates and dwell times of tracked targets based on heading of the tracked target and position within the cue-box for modes when pulsed lasers are used. Time based multiplexing is possible for CW modes of operation.

[0035] Referring now to FIGS. 3A and 3B, an embodiment of a tracker/beam steerer 600 uses a MEMS MMA 610 to track and simultaneously illuminate multiple targets to provide target Designation or Range Finding. Target tracker/beam steerer 600 comprises an imaging camera 602 configured to acquire video images of a scene within a FOV within a frame time and a video tracker 604 configured to process the video images and output a list of tracked targets and angles-to-targets within the frame time. A laser 606 is configured to produce an input pulsed laser spot-beam 607 at a CW or PRF in a different spectral band. A laser beam steering apparatus 608 including MEMS MMA 610 is responsive to voltage signals to simultaneously generate and discretely steer a plurality of output laser spot-beams 611a, 611b and 611c both in-plane and out-of-plane to the corresponding angles-to-target.

[0036] A video processor 612 is configured to process the list of tracked targets, inputs from a user interface 614 such as target selection, cue-box position and size, MEMS MMA steering rate and prioritization criteria and generate command signals for the MEMS MMA. Within a given frame time, the command signals dictate which tracked targets are simultaneously illuminated, for how long (e.g., number of pulses per illuminated target), at which discrete wavelengths, which mode(s) and at what beam power. From frame-to-frame, the command signals embody the revisit rate for the various targets. For laser Designation, the command signals embody the defined pattern of pulses to form the designation code. Video processor 612 may receive the same or similar information from a source external to the tracker/designator 600.

[0037] The command signals are provided to steering control 615 along with the list of tracked targets (and angles) from video tracker 604, position from a GPS receiver 616 and orientation from an IMU 618. Steering control 615 produces the voltage signals to drive MEMS MMA 610 to simultaneously illuminate the tracked targets with one or more pulses within the frame time.

[0038] A LADAR detector 620 is configured to sense reflected laser energy at a sampling rate sufficient to detect the one or more pulses that illuminate the tracked target. LADAR detector 620 may be a single-pixel detector or a pixelated detector. Depending upon the configuration of the system, the detector can be a single narrowband detector, multiple narrowband detectors or a single multi-spectral detector. A single-pixel detector has the advantages of low SWaP-C, reduced processing and lower noise. A pixelated detector has the advantages of simplified receiver design, larger FOV, and verification of the steered laser beam position for closed-loop control.

[0039] Optics 622 are configured such that detector 620 senses reflected laser energy over at least the entire cue-box and suitably the entire FOV of the video camera. Optics 622 may be shared with video camera 602, in which case a beam splitter is used to split the incident light into the respective spectral bands. Optics 622 may provide a zoom capability. For example, at great distances the FOV may be narrowed to increase the spatial resolution to facilitate target acquisition. As the range-to-target decreases, the FOV may be widened to facilitate multiple target tracking and designation.

[0040] A signal processor 624 processes the detector response to the reflected laser energy to determine range-to-target. The signal processor will typically operate on the “time of flight” principle by measuring the time taken for the laser beam to travel to the target and be reflected back to the range finder. The signal processor determines when the pulsed spot-beam is transmitted either by directly controlling laser 606 or by picking off a small amount of the laser output (<1%). With the speed of the laser light being a known value, and with an accurate measurement of the time taken for the laser light to travel to the target and back to the range finder, the range finder is able to calculate the distance from the range finder to the target. Other techniques such as CW or FM modulated CW may be used to determine range. Designation and AI/RF are performed at different wavelengths. AI is performed with a CW or high-PRF laser whereas RF is performed with a low PRF laser. The return signals off of the multiple targets are discriminated by wavelength and/or PRF. The signal processor sends the range-to-target to the video processor 612, which pairs it with the designated target, and sends a video signal to display 628.

[0041] Operating in the same band provides multiple possible advantages. First, the in-band video camera will simultaneously capture an image of both the target to be designated and the reflected laser energy (ideally the reflected laser energy is aligned with the target center). Second, since the reflected laser energy is “in-band” it is sensed by the video camera to form an active image of the illuminated target as part of the video image. Imagery obtained via active imaging with a laser will have a higher SNR than imagery passively obtained with the video camera. Signal processor is configured to send a timing signal to in-band video camera (or video tracker) to identify those images that contain reflected laser energy. Identifying frames that contain laser pulses enables the video tracker to maintain track on targets even with the higher SNR scene.

[0042] An embodiment of a “dual-band” tracker/beam steerer tracks targets in a pair of bands (e.g., SWIR and MWIR) and illuminates targets in in one of the two bands (e.g., SWIR). The dual-band tracker/beam steerer can be used for target Designation, Range Finding or Active Imaging. There is considerable similarity of the dual-band and out-of-band configurations. A dual band video camera is configured to passively acquire video images of a scene within a FOV within a frame time in first and second spectral bands, with the second spectral band being the same spectral band as the LADAR detector (or physically the same detector). Band 1 and Band 2 readout integrated circuits (ROICs) process the first and second spectral bands, respectively. The ROICs are typically implemented as an integral part of dual band video camera. Operating in the same band provides the advantages presented for the in-band configuration plus others. The images generated in the first spectral band by the Band 1 ROIC are unaffected by the reflected laser energy. In a first mode of operation, the second spectral band (Band 2 ROIC) is used only to provide closed-loop steering control. In this case, band 2 ROIC does not have to blank the images. In a second mode, the second spectral band (Band 2 ROIC) is used to provide closed-loop steering control and dual-band tracking. In this case, band 2 ROIC does have to identify those images containing reflected laser energy. Designation and AI/RF are performed at different wavelengths. AI is performed with a CW or high-PRF laser whereas RF is performed with a low PRF laser. The return signals off of the multiple targets are discriminated by wavelength and/or PRF.

[0043] The target tracker/beam steerer 600 utilizes the capabilities of a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) 610 comprising a plurality of independently and continuously controllable mirrors 613 as shown in FIG. 3b. Each mirror 613 is capable of “Tip” (rotation about an X-axis), “Tilt” (rotation about a Y-axis) and “Piston” (translation along a Z-axis, perpendicular to the XY plane) where the X, Y and Z are orthogonal axes in a three-dimensional space. The independently controllable mirrors can be adaptively segmented to change the number of output laser beams and the size/power of a given beam. The “Tip” and “Tilt” capabilities are used to perform beam steering. The MMA is preferably capable of steering an output laser beam over a steering range of at least −10°×+10° in tip and tilt at a steering rate of at least 1 KHz (<1 millisecond). The Piston function is useful to perform wavefront correction for a given output beam when a segment includes multiple mirrors that “oversample” the input beam. The MMA is preferably capable of translating the mirror plus or minus 10 microns. As such, the “Piston” capability is not strictly required unless wavefront correction is implemented. As time between frames increases (time gets further from the last frame and closer to the next frame), the uncertainty in target position and angle-to-target grows. The piston function can be used to slightly defocus the beam as the uncertainty grows to ensure illumination of the target. When the next frame occurs, the uncertainty resets and grows until the next frame. Further, the MEMS MMA must have a sufficient number of mirrors, mirror size/resolution, fill factor, range of motion, response time, response accuracy and uniformity across the array. One such MEMS MMA is described in U.S. Pat. No. 10,444,492 entitled “Flexure-Based, Tip-Tilt-Piston Actuation Micro-Array”, which is hereby incorporated by reference. This MEMS MMA is currently being commercialized by Bright Silicon technologies for “digitally controlling light.”

[0044] The MEMS MMA provides several advantages for use as a beam steerer in a multi-target tracking system. The MMA can be segmented to simultaneously generate and steer multiple output beams to simultaneously illuminate multiple tracked targets. The MMA can be adaptively segmented to change the number of output beams, and power of a given output beam, based on the target list, range to target, threat level etc. The MMA can be coated with different AR coatings to implement different single-wavelength or multi-spectral beams. Of particular import, these different wavelengths can be implemented without any changes to the underlying MEMS MMA itself or the command signals to actuate the mirrors, only the AR coatings and/or the spectral content of the input laser beam need be modified. The MMA can be adaptively configured to simultaneously perform one or more Designation, Range Finding and Active Imaging modes on the same or different tracked targets. The Tip-Tilt-Piston MMA can be segmented so that each segment includes a plurality of mirrors to “oversample” the input beam. The mirrors in a given segment may be controlled to provide wavefront correction to the corresponding output beam.

[0045] The target tracker/beam steer is used to simultaneously illuminate multiple tracked targets for one or more modes of operation selected from Designation, Range Finding, Active Imaging and perhaps Multi-Spectral Active Imaging. Designation and AI/RF are performed at different wavelengths. The MEMS MMA allows for two or more modes of operation to be performed on the same or different tracked targets. In a typical embodiment, the Designation source provides a pulsed laser beam at a wavelength in 0.8 to 1.1 microns range, for example with a pulse repetition rate (PRF) in which a defined pattern of pulses form a designation code. A 3.sup.rd party detects the return of the target to prosecute the target. The Range Finder source provides a low PRF (e.g. 100 Hz) pulsed laser beam at a wavelength in 1.2 to 1.3 microns. The detector is configured to sense reflected high peak power laser energy over at least the entire cue-box, which is processed to produce a range estimate for each of the illuminated targets. The Active Imaging source provides a high PRF (e.g. 5 kHz) pulsed or CW laser beam at a wavelength in 1.4 to 1.7 microns. The video camera senses high average power reflected laser energy to generate an active image of the illuminated targets. In some cases a common source may be used for RF and AI operating in a band from 1.3 to 1.5 microns, or similar. The PRF can be controlled from low to high depending on the mode of operation. An optional Multi-Spectral Active Imaging source provides a high PRF pulsed or CW multi-spectral beam that spans a broader band such as 1.2 to 1.7 microns. Designation and AI/RF are performed at different wavelengths. AI is performed with a CW or high-PRF laser whereas RF is performed with a low PRF laser. The return signals off of the multiple targets are discriminated by wavelength and PRF.

[0046] Referring now to FIGS. 4 and 5, in an embodiment for multi-mode operation, the MEMS MMA 200 is partitioned into at least three sections 202, 204 and 206, one each for Designation, Range Finding and Active Imaging and optionally a fourth section 208 for Multi-Spectral Active Imaging. The sections do not need to be equally sized and can be any portion of the array based on the number of targets supported for each mode. The mirrors in each section are provided with reflective coatings 210, 212, 214 and 216 at the corresponding center wavelength. Designator, Range Finder, Active Imager and Multi-Spectral Active Imager sources 220, 222, 224 and 226 illuminate sections 202, 204, 206 and 208, respectively, with input laser beams 230, 232, 234 and 236 (CW or pulsed as appropriate) when selected. In response to command signals, the MEMS MMA 200 partitions each section in accordance with the target list to generate output laser beams 240, 242, 244 and 246 for the corresponding input source and mode of operation. Taken together, the MEMS MMA simultaneously prosecutes multiple tracked targets using one or multiple modes of operation. In this particular example, the Designation section 202 is partitioned into 4 segments 238 to generate and independently steer 4 output laser beams 240 at, for example, 1.1 microns. The Range Finding section 204 is partitioned into 7 segments 238 to generate and independently steer 7 output laser beams 242 at, for example, 1.3 microns. The Active Imaging section 206 is partitioned into 2 segments 238 to generate and independently steer 2 output laser beams 244 at, for example, 1.5 microns. Optionally, the Multi-Spectral Active Imaging section 208 is partitioned into a single segment 238 to generate and steer 1 output laser beam 246.

[0047] Referring now to FIGS. 6 and 7, in an embodiment Designator, Range Finder, Active Imager and Multi-Spectral Active Imager sources 300, 302, 304 and 306 generate input laser beams 310, 312, 314 and 316, respectively, (CW or pulsed as appropriate) when selected to illuminate an entire MEMS MMA 318. The mirrors are provided with reflective coatings 320, 322, and 324 at the corresponding center wavelengths of the various input sources in, for example, a “checkerboard” type pattern. Multi-Spectral Active Imager source 306 illuminates an entire segment. The broadband beam reflects off of the different wavelength reflective coatings 320, 322, and 324 to produce the multi-spectral beam. In response to command signals, the MEMS MMA 318 partitions itself in accordance with the target list and specified operational modes into multiple segments 328 to generate output laser beams 330, 332, 334 and 346 for the corresponding input source and mode of operation. If all of the mirrors in a given segment were controlled to steer the beam to the angle-to-target, the output beam could simultaneously perform all four operational modes on the illuminated target. Typically this is not the case. A subset of the four possible modes, typically a single mode may be specified for a given target on the target list at a given time. If Designation is not selected, the mirrors within a given segment corresponding to designation should be steered to avert the output laser beam component so it does not illuminate the target or the designation may be turned off. Targets not on the target list should not be designated. The output laser beam components for other unselected modes may or may not illuminate the target. The returns although unneeded at that time may complicate processing of the desired returned signals.

[0048] Referring now to FIGS. 8A-8E, an exemplary mirror 400 is responsive to command signals to tip and tilt each mirror about X and Y orthogonal axes, respectively, and to translate each mirror in the Z orthogonal to the XY plane containing. The mirrors in a given segment may be tilted/tipped 402 all in the same direction to steer an output beam. The piston function providing for translation of the mirror in the Z axis may be used to perform wavefront correction 404 across the output laser beam. In Active Imaging mode, the wavefront may be corrected for atmospheric distortion e.g. Adaptive Optics (AO) Piston. The tip/tilt and piston functions may be used to provide focusing 406 of the output laser beam. The wavefront correction or focusing may be superimposed on top of the tilt/tip that steers the output laser beam. The mirrors in different segments may have different tilt/tip 408 to independently steer the output laser beams or any combination of tip/tilt, piston and focusing.

[0049] While several illustrative embodiments of the invention have been shown and described, numerous variations and alternate embodiments will occur to those skilled in the art. Such variations and alternate embodiments are contemplated, and can be made without departing from the spirit and scope of the invention as defined in the appended claims.