GETTER CARTRIDGE FOR TOXIC GASES INSIDE VALVES
20220299170 · 2022-09-22
Assignee
Inventors
Cpc classification
B01J20/0281
PERFORMING OPERATIONS; TRANSPORTING
F17C2205/0323
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01J20/0285
PERFORMING OPERATIONS; TRANSPORTING
B01J20/0248
PERFORMING OPERATIONS; TRANSPORTING
F17C2205/0394
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01J20/08
PERFORMING OPERATIONS; TRANSPORTING
F17C11/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01J20/20
PERFORMING OPERATIONS; TRANSPORTING
B01J20/045
PERFORMING OPERATIONS; TRANSPORTING
B01J20/226
PERFORMING OPERATIONS; TRANSPORTING
F16K24/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01J20/0277
PERFORMING OPERATIONS; TRANSPORTING
F17C13/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01J20/043
PERFORMING OPERATIONS; TRANSPORTING
B01J20/28052
PERFORMING OPERATIONS; TRANSPORTING
B01J20/18
PERFORMING OPERATIONS; TRANSPORTING
International classification
F17C13/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01J20/04
PERFORMING OPERATIONS; TRANSPORTING
B01J20/08
PERFORMING OPERATIONS; TRANSPORTING
B01J20/18
PERFORMING OPERATIONS; TRANSPORTING
B01J20/20
PERFORMING OPERATIONS; TRANSPORTING
B01J20/28
PERFORMING OPERATIONS; TRANSPORTING
F16K24/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Abstract
The present invention relates to cylinder packages utilized in the delivery of highly toxic and/or flammable compounds to semiconductor manufacturers. More specifically, the present invention provides a cartridge adapted to removably attach to the gas outlet of a gas discharge passageway in a cylinder valve provided on a toxic gas containing cylinder package, the cartridge comprising a cylindrically shaped housing having at least one end fitted with a barrier member permeable to the toxic gas contained within the cylinder package and the housing containing a toxic-gas getter material.
Claims
1. A getter cartridge for operatively coupling to a gas discharge passageway of a cylinder valve installed on a cylinder package containing a toxic and/or flammable gas, the getter cartridge comprising: a cartridge housing body having an open end and a closed top end, and a center core extending along a housing longitudinal axis through the open end; an absorbing means contained within said cartridge housing body between said open end and said closed top end; an end cap having a through-hole centrally formed therein covering said open end of said cartridge housing; a positioning ring extending from said end cap, said positioning ring fitting configured to be received by said open end; a barrier member positioned within said centrally formed hole which is permeable to said gas, and in fluid communication with said filter media; and a sealing member extending from the said cartridge housing body disposed along the outer edge which is configured to seal against an inside surface of the gas discharge passageway when said getter cartridge is installed in the cylinder valve.
2. The apparatus of claim 1, wherein said absorbing means consisting of a gas absorbent material which chemically reacts with the gas to consume said gas to thereby produce a solid product that is impermeable to said barrier member which is permeable to said gas and impermeable to the toxic-gas absorbent and the reactant produced.
3. The apparatus of claim 2, wherein said gas absorbent comprising a metal such as copper, aluminum, manganese, sodium, calcium, magnesium, potassium and their respective groups such as oxides, hydroxides, carbonates, sulfates, sulfides, amides permanganates and combinations thereof.
4. The apparatus of claim 3, wherein said gas absorbent further includes high surface area adsorbent such as alumina, silica, carbon, molecular sieve, zeolite or metal organic framework for retaining said metals.
5. The apparatus of claim 1, wherein a socket is formed within said closed top end for engaging a wrench.
6. The apparatus of claim 1, wherein said housing body comprises a proximal end and a distal end wherein said sealing member positioned on the outer surface of said proximal end comprises threads that mate with internal threads positioned within said gas discharge passageway.
7. The apparatus of claim 1, wherein said housing body comprises a proximal end and a distal end wherein said positioning member positioned on the outer surface of said proximal end comprises O-rings that meet with the peripheral walls of a non-threaded said gas discharge passageway.
8. The apparatus of claim 1, wherein said absorbing means consisting of a gas absorbent material which absorbs the gas.
9. The apparatus of claim 1, wherein said proximal end has a smaller diameter than the diameter of said distal end which results in the formation of an annular seating surface extending radially outward for accepting a washer that seats the getter cartridge within said gas discharge passageway.
10. A getter cartridge for operatively coupling to a gas discharge passageway of a cylinder valve installed on a cylinder package containing a toxic/flammable gas, the getter cartridge comprising: a cartridge housing having a first end and a second end forming a longitudinal axis and a bore extending along said longitudinal axis through said first end and said second end; a filter media contained within said bore between said first end and said second end; a first end cap covering said first end of the cartridge housing; said first end cap having a through-hole centrally formed therein covering said first end of said cartridge housing; a first positioning ring extending from said first end cap, said first positioning ring fitting configured to be received by said first end; a second end cap covering said second end of said cartridge housing; said second end cap having a through-hole centrally formed therein covering said second end of said cartridge housing; a second positioning ring extending from said second end cap, said second positioning ring fitting configured to be received by said second end; and a barrier member positioned within said centrally formed hole which is permeable to the gas, and in fluid communication with said filter media.
11. The apparatus of claim 10, wherein said absorbing means consisting of a gas absorbent material which chemically reacts with the gas to consume said gas to thereby produce a solid product that is impermeable to said barrier member which is permeable to said gas and impermeable to the toxic-gas absorbent and the reactant produced.
12. The apparatus of claim 11, wherein said gas absorbent has a main reacting component comprising a metal such as copper, aluminum, manganese, sodium, calcium, magnesium, potassium and their respective groups such as oxides, hydroxides, carbonates, sulfates, sulfides, amides, permanganates and combinations thereof.
13. The apparatus of claim 3, wherein said gas absorbent further includes high surface area adsorbent such as alumina, silica, carbon, molecular sieve, zeolite or metal organic framework for retaining said metals.
14. A getter cartridge comprising: a cartridge housing body having an open end and a closed top end, and a center core extending along a housing longitudinal axis through the open end; an absorbing means contained within said cartridge housing body between said open end and said closed top end; an end cap having a through-hole centrally formed therein covering said open end of said cartridge housing; a positioning ring extending from said end cap, said positioning ring fitting configured to be received by said open end; a barrier member positioned within said centrally formed hole which is permeable to said gas, and in fluid communication with said filter media; and a sealing member extending from the said cartridge housing body disposed along the outer edge which is configured to seal against an inside surface of the gas discharge passageway when said getter cartridge is installed in the cylinder valve.
15. The apparatus of claim 14, wherein said absorbing means consisting of a gas absorbent material which chemically reacts with the gas to consume said gas to thereby produce a solid product that is impermeable to said barrier member which is permeable to said gas and impermeable to the toxic-gas absorbent and the reactant produced.
16. The apparatus of claim 15, wherein said gas absorbent comprising a metal such as copper, aluminum, manganese, sodium, calcium, magnesium, potassium and their respective groups such as oxides, hydroxides, carbonates, sulfates, sulfides, amides permanganates and combinations thereof.
17. The apparatus of claim 16, wherein said gas absorbent further includes high surface area adsorbent such as alumina, silica, carbon, molecular sieve, zeolite or metal organic framework for retaining said metals.
18. The apparatus of claim 14, wherein a socket is formed within said closed top end for engaging a wrench.
19. The apparatus of claim 14, wherein said housing body comprises a proximal end and a distal end wherein said sealing member positioned on the outer surface of said proximal end comprises threads that mate with internal threads positioned within said gas discharge passageway.
20. The apparatus of claim 14, wherein said housing body comprises a proximal end and a distal end wherein said positioning member positioned on the outer surface of said proximal end comprises O-rings that meet with the peripheral walls of a non-threaded said gas discharge passageway.
21. The apparatus of claim 14, wherein said absorbing means consisting of a gas absorbent material which absorbs the gas.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] The accompanying drawings, which are incorporated in and form a part of the specification, illustrate the preferred embodiments of the present invention, and together with the descriptions serve to explain the principles of the invention.
[0011]
[0012]
[0013]
[0014]
[0015]
[0016]
[0017]
[0018]
DETAILED DESCRIPTION OF THE INVENTION
[0019] The getter cartridge 100, according to this invention, is best shown in
[0020] Referring to
[0021] The cylinder valve 6 comprises a valve body 8, the lower portion of which is externally threaded. The valve body 8 can be mounted on the gas cylinder 2 by threadedly engaging the external thread of the valve body 8 with the internal threads of the opening 4.
[0022] The valve body 8 also includes an axial or vertical passageway 16 formed therethrough, which may extend from the top portion to the lower portion of the valve body 8. This vertical passageway 16 is in communication with the interior of the gas cylinder 2 when the valve body 8 is attached to the opening 4 of the gas cylinder 2.
[0023] The cylinder valve 6 further includes a handle 24. The handle 24 comprises a rotating member 26 that abuts against the sealing member 28 of the seat assembly 30 and moves the whole seat assembly 30 downward against the biasing force of the coil spring 32 until the shutoff member 34 seats on the shoulder 36 to close the top opening of the upper portion of passageway 16.
[0024] The valve body 8 has a cylinder valve neck 12 which extends outwardly therefrom to define a peripheral wall for the horizontal gas discharge passageway 18. The cylinder valve neck 12 includes an external thread formed thereon at the outer end 14 thereof so that the dust cap 20 can be attached to the cylinder valve 6. The inner end 18′ of the horizontal gas discharge passageway 18 is located to communicate with the vertical passageway 16 while the outer end of the horizontal gas discharge passageway 18 is opened at the outer end 14 of the valve body 8 to define a gas outlet 18″.
[0025] As shown in
[0026] In
[0027] Referring now to
[0028] Referring now to
[0029] To complete the assembly of getter cartridge 100, as best seen in
[0030] The preferred getter cartridge housing 110 will have a sealing member, such as external threads 132 positioned around the exterior surface of proximal end 112″ thereby allowing the cartridge 100 to be removably positioned by mating with the internal threads 40 of the horizontal gas discharge passageway 18. However, in instances where internal threads are not available in the horizontal gas discharge passageway 18, an optional attachment means may be added, such as positioning O-rings (not shown) around the exterior surface of proximal end 112″ instead of threads. In the alternative, thermoplastic ribs may be co-molded into the exterior surface of proximal end 112″ making the use of O-rings unnecessary. Alternatively, ribs may be cut or molded into a metallic proximal end 112″.
[0031] As discussed previously housing body 110 is molded or machined as a unitary piece and the housing closed top 116 is molded with either a 4-, 6-, or 12-point socket 117, as shown in
[0032] In an alternate embodiment, as shown in
[0033] The distal end 212″ can be cylindrical in shape; however, it may be advantageous to square off the sides so that a socket or wrench can be used to screw getter cartridge 200 securely into place.
[0034] Operation of the getter cartridge 100 will be described below. With the cylinder valve 6 being in its shutoff position, the getter cartridge 100 of the present invention is secured into the horizontal gas discharge passageway 18 and the dust cap 20 is securely positioned on the cylinder valve neck 12 forming void 22. Toxic and/or flammable gas temporarily having been adsorbed by the inner peripheral wall of the horizontal gas discharge passageway 18, will form in void 22 through the gradual outgassing from the inner peripheral wall of the horizontal gas discharge passageway 18 as well as across the polymer seat from vertical passageway 16. The toxic and/or flammable gas permeates through the barrier member 130 of the outlet cap 126 to the toxic/flammable-gas absorbent 124. The toxic/flammable-gas absorbent 124 then absorbs the toxic and/or flammable gas, thereby resulting in the formation of a solid product. The solid product cannot move through the barrier member 130. Consequently, the toxic gas will not diffuse externally from the cylinder valve 6 even when the dust cap 20 is removed from the cylinder valve 6.
[0035] Further, the toxic/flammable-gas absorbent 124 in the aforementioned embodiment may include a material that can absorb at least moisture and preferably the toxic gas and/or flammable gas in addition to the moisture, such as molecular sieve, zeolite, alumina or activated charcoal. This example is advantageous in that the toxic/flammable-gas absorbent 124 can hold water produced by its reaction with the toxic gas. Further, the toxic/flammable-gas absorbent 124 for absorbing the toxic and/or flammable gas by the chemical reaction as in the aforementioned embodiment may be replaced, for example, by a toxic/flammable-gas adsorbent formed of a material which can absorb at least the toxic and/or flammable gas and preferably moisture in addition to the toxic gas, such as molecular sieve, zeolite, alumina or active carbon. The toxic-gas adsorbent made of any one of the listed materials is particularly preferred since it can absorb not only the toxic and/or flammable gas, but also any moisture contained in the air within the gas discharge passageway. The moisture contained in the air within the horizontal gas discharge passageway 18 may corrode the metallic surface of the horizontal gas discharge passageway 18 to produce a corrosion reactant which may in turn degrade the purity of toxic and/or flammable gas when the toxic and/or flammable gas is used.
[0036] The foregoing description is considered as illustrative only of the principles of the invention. The words “comprise,” “comprising,” “include,” “including,” and “includes” when used in this specification and in the following claims are intended to specify the presence of one or more stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, or groups thereof. Furthermore, since a number of modifications and changes will readily occur to those skilled in the art, it is not desired to limit the invention to the exact construction and process shown described above. Accordingly, all suitable modifications and equivalents may be resorted to falling within the scope of the invention as defined by the claims which follow.
[0037] Reference throughout this specification to “one embodiment,” “certain embodiments,” “one or more embodiments” or “an embodiment” means that a particular feature, structure, material, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. Thus, the appearances of the phrases such as “in one or more embodiments,” “in certain embodiments,” “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily referring to the same embodiment of the invention. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments.
[0038] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the invention pertains. Although a number of methods and materials similar or equivalent to those described herein can be used in the practice of the present invention, materials and methods according to some embodiments are described herein. While the invention has been described in detail herein in accord with certain preferred embodiments thereof, many modifications and changes therein may be effected by those skilled in the art. Without further elaboration it is believed that one skilled in the art can, using the description set forth above, utilize the invention to its fullest extent.
[0039] Having disclosed several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the disclosed embodiments. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Accordingly, the above description should not be taken as limiting the scope of the invention.
[0040] As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise.