Method for electrically contacting a component by galvanic connection of an open-pored contact piece, and corresponding component module
11037862 · 2021-06-15
Assignee
Inventors
Cpc classification
H01L2224/83695
ELECTRICITY
H01L2224/3729
ELECTRICITY
H01L2224/3729
ELECTRICITY
H05K3/4661
ELECTRICITY
H01L2224/3719
ELECTRICITY
H01L2224/37395
ELECTRICITY
H01L23/3733
ELECTRICITY
H01L2224/8385
ELECTRICITY
H05K3/4661
ELECTRICITY
H01L2224/82
ELECTRICITY
H01L2224/04026
ELECTRICITY
H01L2224/82
ELECTRICITY
C25D21/14
CHEMISTRY; METALLURGY
H01L2224/376
ELECTRICITY
H01L2224/836
ELECTRICITY
H01L2224/8359
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/834
ELECTRICITY
H01L23/50
ELECTRICITY
H01L2224/8349
ELECTRICITY
H01L2224/8485
ELECTRICITY
H01L2224/776
ELECTRICITY
H01L2224/32227
ELECTRICITY
H01L2224/8485
ELECTRICITY
H01L2224/37395
ELECTRICITY
H01L2224/84007
ELECTRICITY
H01L2224/83695
ELECTRICITY
H01L2224/8359
ELECTRICITY
H01L2224/841
ELECTRICITY
H01L2224/841
ELECTRICITY
H01L2224/83907
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/3719
ELECTRICITY
H01L24/97
ELECTRICITY
H01L2224/831
ELECTRICITY
H01L2224/831
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L23/49568
ELECTRICITY
H01L2224/376
ELECTRICITY
H01L2224/83007
ELECTRICITY
H01L2224/373
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/9201
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/9205
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L24/75
ELECTRICITY
H01L2224/24227
ELECTRICITY
H01L2224/836
ELECTRICITY
H01L2224/756
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L24/82
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/04034
ELECTRICITY
H01L2224/373
ELECTRICITY
H01L2224/8492
ELECTRICITY
H01L23/49811
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2224/834
ELECTRICITY
H01L2224/8349
ELECTRICITY
H01L23/3735
ELECTRICITY
International classification
H01L23/50
ELECTRICITY
H01L23/498
ELECTRICITY
C25D21/14
CHEMISTRY; METALLURGY
Abstract
The invention relates to a method for electrically contacting a component (10) (for example a power component and/or a (semiconductor) component having at least one transistor, preferably an IGBT (insulated-gate bipolar transistor)) having at least one contact (40, 50), at least one open-pored contact piece (60, 70) is galvanically (electrochemically or free of external current) connected to at least one contact (40, 50). In this way, a component module is achieved. The contact (40, 50) is preferably a flat part or has a contact surface, the largest planar extent thereof being greater than an extension of the contact (40, 50) perpendicular to said contact surface. The temperature of the galvanic connection is at most 100° C., preferably at most 60° C., advantageously at most 20° C. and ideally at most 5° C. and/or deviates from the operating temperature of the component by at most 50° C., preferably by at most 20° C., in particular by at most 10° C. and ideally by at most 5° C., preferably by at most 2° C. The component (10) can be contacted by means of the contact piece (60, 70) with a further component, a current conductor and/or a substrate (90). Preferably, a component (10) having two contacts (40, 50) on opposite sides of the component (10) is used, wherein at least one open-pored contact piece (60, 70) is galvanically connected to each contact (40, 50).
Claims
1. A method for electrically contacting a component having a first component surface, a second component surface opposite the first component surface, and at least two electrical contacts, each of the at least two electrical contacts having a first contact surface and a second contact surface opposite the first contact surface, the second contact surface of a first electrical contact of the at least two electrical contacts being in contact with the first component surface of the component and the second contact surface of a second electrical contact of the at least two electrical contacts being in contact with the second component surface of the component, the method comprising: galvanically connecting a first open-pored contact piece to the first contact surface of the first electrical contact and a second open-pored contact piece to the first contact surface of the second electrical contact of the at least two electrical contacts of the component, each of the first open-pored contact piece and the second open-pored contact piece having a plurality of open pores prior to being galvanically connected to the first electrical contact or the second electrical contact of the at least two electrical contacts.
2. The method of claim 1, wherein each of the first electrical contact and the second electrical contact of the at least two electrical contacts is a flat part, has a respective contact surface, a largest planar extension of which is larger than an extension of the respective contact perpendicular to the respective contact surface, or a combination thereof.
3. The method of claim 1, wherein an electrically conductive contact piece is used as the first open-pored contact piece or the second open-pored contact piece.
4. The method of claim 1, wherein the first open-pored contact piece and the second open-pored contact piece is formed from or with porous material.
5. The method of claim 1, wherein the first open-pored contact piece or the second open-pored contact piece is formed from or with metal.
6. The method of claim 5, wherein the metal includes nickel, silver, gold, tin, copper, or any combination thereof.
7. The method of claim 1, wherein the first open-pored contact piece and the second open-pored contact piece is formed with a tissue structure, a foam structure, a mesh structure, or any combination thereof.
8. The method of claim 1, wherein galvanically connecting the first open-pored contact piece and the second open-pored contact piece comprises galvanically connecting the first open-pored contact piece to the first electrical contact and the second open-pored contact piece to the second electrical contact of the at least two electrical contacts at a temperature not exceeding 100° C., deviating from an operating temperature of the component by no more than 50° C., or a combination thereof.
9. The method of claim 8, wherein galvanically connecting the first open-pored contact piece and the second open-pored contact piece comprises galvanically connecting the first open-pored contact piece to the first electrical contact and the second open-pored contact piece to the second electrical contact of the at least two electrical contacts at a temperature not exceeding 5° C., deviating from the operating temperature of the component by no more than 2° C., or a combination thereof.
10. The method of claim 1, wherein galvanically connecting the first open-pored contact piece or the second open-pored contact piece comprises galvanically connecting the first open-pored contact piece or the second open-pored contact piece using an electrochemical plating process.
11. The method of claim 1, wherein galvanically connecting the first open-pored contact piece or the second open-pored contact piece comprises galvanically connecting the first open-pored contact piece to the first electrical contact and the second open-pored contact piece to the second electrical contact of the at least two electrical contacts by a method free of external current.
12. The method of claim 11, wherein the method free of external current includes transfer metallization, reduction metallization, contact metallization, or any combination thereof.
13. The method of claim 1, wherein the component is contacted with another component, a current conductor, with a substrate, or any combination thereof by one of the first open-pored contact piece or the second open-pored contact piece, and wherein the method further comprises coating the one of the first open-pored contact piece or the second open-pored contact piece, the component, the other component, the current conductor, the substrate, or any combination thereof with an electrical insulation layer.
14. The method of claim 13, wherein the coating comprises forming the electrical insulation layer, forming the electrical insulation layer comprising casting the insulation layer, molding the insulation layer, forming the insulation layer from or with siloxanes, polymers, or silxanes and polymers, or any combination thereof.
15. The method of claim 1, wherein a power component is used as the component.
16. The method of claim 1, wherein a component having at least one transistor is used as the component.
17. The method of claim 1, wherein the first contact surface of the first electrical contact is a top surface and the second contact surface of the first electrical contact is a bottom surface.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
(9) The power component 10 shown in
(10) For contacting these surface contacts 40, 50, contact pieces 60, 70 of open-pored material that extend substantially in a planar fashion along the surface contacts 40, 50 are placed on the surface contacts 40, 50. In the exemplary embodiment illustrated, the contact pieces 60, 70 are conductive and implemented as conductive copper sponges. In other exemplary embodiments, not separately shown, which correspond to the exemplary embodiments described by reference to the figures, the open-pored contact pieces 60, 70 may also consist of other open-pored conductive materials, such as contact pieces made of aluminum, Ti, or from or with other metals, implemented in the form of meshes or tissues or other porous structures. For example, polymer sponges either partially coated with conductive materials or packed with conductive particles may also be used as contact pieces.
(11) One of the surface contacts 50 of the power component 10 faces towards another surface contact 80 of a ceramic substrate 90 having a ceramic core 100 of aluminum nitride (AlN). In other exemplary embodiments, the ceramic core 100 may consist of another ceramic material, or else of printed circuit board materials such as FR 4 or other substrates made of silicone and/or epoxy. The other surface contact 80 of the ceramic substrate 90 is implemented as a superficial substrate metallization, in the exemplary embodiment illustrated, as a copper substrate metallization. The surface contact 50 of the power component 10 facing towards the ceramic substrate 90 and the other surface contact 80 of the ceramic substrate 90 extend parallel to one another and therefore form a level gap. The contact piece 70 arranged on the contact surface 50 facing towards the ceramic substrate 90 completely fills this level gap and rests with a whole surface against this surface contact 50 of the power component 10, and against the other surface contact 80 of the ceramic substrate 90. The contact piece 70 is therefore arranged to contact the power component 10 and the ceramic substrate 90.
(12) In a further method act, the open-pored contact pieces 60, 70 are contacted with electrodes 110, 120 (
(13) As a result of the contacting of the open-pored contact pieces with electrodes 110, 120, by the known electrochemical plating process, metal (e.g., copper) is deposited in the region between the open-pored contact pieces 60, 70 and the surface contacts 40, 50, 80 (
(14) A component contact between the power component 10, the contact piece 70, and the ceramic substrate 90 realized in accordance with the previously described exemplary embodiment is shown enlarged in
(15) In a subsequent processing act, the power modules according to one or more of the present embodiments formed by the ceramic substrate 90 and the contacted power component 10 are encapsulated with insulating material 170 (e.g., a siloxane (
(16) In a further exemplary embodiment shown in
(17) Using the external current-free electroplating process, metal (e.g., copper) is deposited according to a known method in the region between the open-pored contact pieces 60′, 70′ and the power component 10 (
(18) In a further exemplary embodiment, which corresponds to the exemplary embodiment described based on
(19) In a subsequent processing act, the power modules according to one or more of the present embodiments formed by the ceramic substrate 90 and the contacted power component 10 are encapsulated with the insulating material 170 (e.g., a siloxane (
(20) In the same way as the above-described exemplary embodiments, in other exemplary embodiments, the galvanized metal may also be a different metal instead of copper.
(21) In other exemplary embodiments, not shown separately, a power module according to one or more of the present embodiments may be implemented with a plurality of ceramic or other substrates, piled up in the form of a stack. Electronic contacts may be implemented in a plurality of layers at the same time by the method according to one or more of the present embodiments. Alternatively or additionally, using the method according to one or more of the present embodiments, a plurality of components in a single layer may be contacted at the same time.
(22) The elements and features recited in the appended claims may be combined in different ways to produce new claims that likewise fall within the scope of the present invention. Thus, whereas the dependent claims appended below depend from only a single independent or dependent claim, it is to be understood that these dependent claims may, alternatively, be made to depend in the alternative from any preceding or following claim, whether independent or dependent. Such new combinations are to be understood as forming a part of the present specification.
(23) While the present invention has been described above by reference to various embodiments, it should be understood that many changes and modifications can be made to the described embodiments. It is therefore intended that the foregoing description be regarded as illustrative rather than limiting, and that it be understood that all equivalents and/or combinations of embodiments are intended to be included in this description.